Study of a chemically amplified resist for X-ray lithography by Fourier transform infrared spectroscopy

Future applications of microelectromechanical systems (MEMS) require lithographic performance of very high aspect ratio. Chemically amplified resists (CARs) such as the negative tone commercial SU-8 provide critical advantages in sensitivity, resolution, and process efficiency in deep ultraviolet, electron-beam, and X-ray lithographies (XRLs), which result in a very high aspect ratio. In this investigation, an SU-8 resist was characterized and optimized for X-ray lithographic applications by studying the cross-linking process of the resist under different conditions of resist thickness and X-ray exposure dose. The exposure dose of soft X-ray (SXR) irradiation at the average weighted wavelength of 1.20 nm from a plasma focus device ranges from 100 to 1600 mJ/cm(2) on the resist surface. Resist thickness varies from 3.5 to 15 mum. The cross-linking process of the resist during post-exposure bake (PEB) was accurately monitored using Fourier transform infrared (FT-IR) spectroscopy. The infrared absorption peaks at 862, 914, 972, and 1128 cm(-1) in the spectrum of the SU-8 resist were found to be useful indicators for the completion of cross-linking in the resist. Results of the experiments showed that the cross-linking of SU-8 was optimized at the exposure dose of 800 mJ/cm(2) for resist thicknesses of 3.5, 9.5, and 15 microm. PEB temperature was set at 95 degrees C and time at 3 min. The resist thickness was measured using interference patterns in the FT-IR spectra of the resist. Test structures with an aspect ratio 3:1 on 10 microm thick SU-8 resist film were obtained using scanning electron microscopy (SEM).     

A study of physicochemical characteristics of respirable dust in an Indian coal mine

The respirable coal dust samples were collected from the mine atmosphere during drilling of coal seams using ‘Hexlet’ apparatus. Sixteen dust samples were collected from each three different seams for investigations. After destruction of the organic matter by wet oxidation and filtering off the clay and silica, Fe, Ca, Mg, Na, K, Mn, Zn, Cu, Cd and Ni were determined directly in the resulting solution by atomic absorption spectrophotometric methods. The x-ray diffraction studies have shown the presence of kaolinite, quartz, pirrsonite, and beidellite clay minerals in the coal dust.The mass-size distribution of the coal dust has been studied by using micron photosizer. The results showed that the distribution are unimodal, asymmetric, and positively skew. Although the assumption of log-normality was useful in interpreting the results, closer observations indicated that the relationship between the size and weight of the particles can be represented by a second degree parabolic equation W = a + bS + cS², where W and S are weight and size of the particles and a, b and c are constants. This equation helps us to characterise the mass of the respirable particles if the size is known.The studies throw light on the nature and mode of trace elements found in Indian Coal as well as on the causes of respiratory disease, pneumoconiosis, affecting the workers in the mine environmental condition.     

Surface distortion features on indented CaF2 cleavages

Surface distortion features around static indents on the cleavages of CaF₂ single crystals have been investigated by multiple beam interference technique. At room temperature microcracks around such indents nucleate at the sinking in regions. Fizeau fringe patterns (around indents at 200° C) revealed a transition from a three-fold to a six-fold material flow.     

Soft X-ray Imaging using a Neon Filled Plasma Focus X-ray Source

A 3 kJ Mather-type UNU/ICTP plasma focus device with neon filling is used, for the first time, as a soft X-ray source for imaging of thin biological samples including insects. A charge-coupled-device (CCD) based pinhole projection system, placed in a differentially pumped chamber, is used for radiography using neon soft X-rays. The image brightness, contrast and resolution have been optimized by varying soft X-ray yield, pinhole size, camera chamber length and X-ray filters. The system can simply be modified for table-top soft X-ray microscopy of thin biological samples.     

Wireless sensor networks: a survey on recent developments and potential synergies

Wireless sensor network (WSN) has emerged as one of the most promising technologies for the future. This has been enabled by advances in technology and availability of small, inexpensive, and smart sensors resulting in cost effective and easily deployable WSNs. However, researchers must address a variety of challenges to facilitate the widespread deployment of WSN technology in real-world domains. In this survey, we give an overview of wireless sensor networks and their application domains including the challenges that should be addressed in order to push the technology further. Then we review the recent technologies and testbeds for WSNs. Finally, we identify several open research issues that need to be investigated in future. Our survey is different from existing surveys in that we focus on recent developments in wireless sensor network technologies. We review the leading research projects, standards and technologies, and platforms. Moreover, we highlight a recent phenomenon in WSN research that is to explore synergy between sensor networks and other technologies and explain how this can help sensor networks achieve their full potential. This paper intends to help new researchers entering the domain of WSNs by providing a comprehensive survey on recent developments.     

Grafting onto wool. XXVIII. Effects of acids on gamma-radiation induced graft copolymerization of ethylmethacrylate onto wool fiber

Graft copolymerization of ethylmethacrylate (EMA) onto Himachali wool fiber has been investigated in aqueous medium by mutual gamma irradiation from a Co⁶⁰ source in air and in nitrogen atmosphere. Percentage of grafting has been evaluated as a function of (i) total dose, (ii) concentration of monomer, and (iii) effect of concentration of different acids such as hydrochloric acid, sulfuric acid, nitric acid, perchloric acid, and acetic acid. Maximum percentage of grafting has been obtained in the presence of sulfuric acid. Following reactivity order of different acids towards grafting has been observed: H₂SO₄ > HCI > HNO₃ > HCIO₄ > CH₃COOH. A plausible mechanism to explain the effect of acids on percentage of grafting of EMA has been suggested.     

Use of initial rise method to analyze a general-order kinetic thermoluminescence glow curve

The application of the initial rise method, in the case of the general-order kinetics of thermoluminescence, has so far been limited to finding the thermal activation energy. However, the order of kinetics and pre-exponential factors could not be evaluated using this method so one has to resort to other methods of glow curve analysis. In the present paper, a novel method is suggested to calculate the kinetic order and the pre-exponential factor from the Arrhenius plots of the initial rise part of the thermoluminescence glow curve. The method uses the intercept values on the thermoluminescence intensity axis of the Arrhenius plots at two or more known doses to evaluate the value of kinetic order.     

Convergence analysis of a continuous-time nonlinear LMS-type algorithm using stochastic calculus

In several applications least mean square (LMS) has served as a good tool for estimating the parameters of linear models but the success of continuous-time in nonlinear models has not reached its height. In this paper, we have developed a nonlinear continuous-time LMS type algorithm that estimates parameters of nonlinear systems considering the noisy input–output relationship. The nonlinear system has been assumed to be memoryless and an additive Gaussian noise component to the system has been assumed. The mean squared error between the true system output and the estimated output, when the estimated output is modeled using the same form of the nonlinear function as the original system but with the parameters unknown, is minimized using the gradient scheme with the expectation removed. The result is a least mean square algorithm for nonlinear systems. In particular, we have performed a convergence analysis of the continuous-time nonlinear LMS algorithm applied to nonlinear systems when the time step goes to zero. The resulting algorithm then behaves as a stochastic differential equation, and the standard methods of Itô calculus and Fokker–Planck theory are applied to obtain statistical properties of the mean and covariance evolution of the parameter estimates. Computer simulations corroborate the theoretical results.     

A Survey of Localization Systems in Internet of Things

Mobile Networks and Applications - With the rapid development in wireless technologies and the Internet, the Internet of Things (IoT) is envisioned to be an integral part of our daily lives....     

Investigations for the optimal combination of zinc oxide nanoparticle-diesel fuel with optimal compression ratio for improving performance and reducing the emission features of variable compression ratio diesel engine

Clean Technologies and Environmental Policy - The continual hike in environmental pollution from diesel engines has raised the concern of researchers to identify certain clean fuels. For this...