A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

Achieving high processing quality for chemical mechanical planarization (CMP) in semiconductor manufacturing is difficult due to the distinct process variations associated with this method, such as drift and shift. Run-to-run control aims to maintain the targeted process quality by reducing the effect of process variations. The goal of controller learning is to infer an underlying output–input reverse mapping based on input–output samples considering the process variations. Existing controllers learn reverse mapping by minimizing the total mapping error for sample data. However, this approach often fails to generate inputs for unseen target outputs because conditional input distributions on target outputs are not captured in the learning. In this study, we propose a controller based on a least squares generative adversarial network (LSGAN) that can capture the input distributions. GANs are deep-learning architectures composed of two neural nets: a generator and a discriminator. In the proposed model, the generator attempts to produce fake input distributions that are similar to the real input distributions considering the process variation features extracted using convolutional layers, while the discriminator attempts to detect the fake distributions. Competition in this game drives both networks to improve their performance until the generated input distributions are indistinguishable from the real distributions. An experiment using the data obtained from a work-site CMP tool verified that the proposed model outperformed the comparison models in terms of control accuracy and computation time.

     

The implementation of technical practices and human factors of the toyota production system in different industries

The Toyota Production System (TPS) can result in huge benefits for companies and has been widely implemented around the world. Nevertheless, most adopters emphasize only the technical practices of the TPS, but neglect the critical role of human factors in the implementation of the TPS. Therefore, this study aims at developing an integrated TPS model that fully integrates the technical elements and human elements of the TPS with Total Quality Management (TQM) practices. An empirical study was conducted to confirm the causal relationships among these constructs. In the empirical study, questionnaires were mailed and e‐mailed to 620 companies that had implemented the TPS, and 151 of the completed questionnaires were valid. These 151 respondents were divided into eight categories. The results revealed that the implementation level of each construct was significantly different in each industry. The automobile and motorcycle industries have put a great deal of effort into the application of Humanity, Human Resource Management (HRM), and TQM practices and obtained good results. Other industries, however, ignored the implementation of HRM practices. The results also revealed that the early adopters enjoyed significant benefits from the implementation of the TPS, which led high‐tech companies to start adopting TPS practices and become lean enterprises. © 2011 Wiley Periodicals, Inc.     

k-Nearest neighbor query processing algorithm for cloaking regions towards user privacy protection in location-based services

Due to the advancement of wireless internet and mobile positioning technology, the application of location-based services (LBSs) has become popular for mobile users. Since users have to send their exact locations to obtain the service, it may lead to several privacy threats. To solve this problem, a cloaking method has been proposed to blur users’ exact locations into a cloaked spatial region with a required privacy threshold (k). With the cloaked region, an LBS server can carry out a k-nearest neighbor (k-NN) search algorithm. Some recent studies have proposed methods to search k-nearest POIs while protecting a user’s privacy. However, they have at least one major problem, such as inefficiency on query processing or low precision of retrieved result. To resolve these problems, in this paper, we propose a novel k-NN query processing algorithm for a cloaking region to satisfy both requirements of fast query processing time and high precision of the retrieved result. To achieve fast query processing time, we propose a new pruning technique based on a 2D-coodinate scheme. In addition, we make use of a Voronoi diagram for retrieving the nearest POIs efficiently. To satisfy the requirement of high precision of the retrieved result, we guarantee that our k-NN query processing algorithm always contains the exact set of k nearest neighbors. Our performance analysis shows that our algorithm achieves better performance in terms of query processing time and the number of candidate POIs compared with other algorithms.     

Modeling of the electrostrictive, dielectric, and piezoelectric properties of ceramic PbTiO(3)

The upper and lower limits of the electrostrictive constants, dielectric permittivities, spontaneous polarizations, and piezoelectric coefficients were calculated for ceramic PbTiO(3) from theoretical single-crystal constants. Experimental ceramic data fall between these upper and lower limits. The large piezoelectric anisotropy d(33)/d(31) of ceramic PbTiO(3 ) was shown to be related to the single-crystal PbTiO(3) electrostrictive anisotropies Q(11)/Q(12 ) and Q(44)/Q(12). The possibility of a change in sign of the ceramic d(31) coefficient due to a slight variation in the single-crystal electrostrictive anisotropies was discussed. The single-crystal and predicted ceramic hydrostatic electrostrictive constants were found to be equal. Using this result the ceramic hydrostatic g(h ) coefficient is always smaller than the single-crystal g (h), but the ceramic hydrostatic d(h) coefficient can be either larger or smaller than the single-crystal d(h) depending on the dielectric anisotropy (epsilon (11)/epsilon(33)) of the single-crystal.     

降低玻璃钢产品的收缩及变形的实验研究

本文介绍了如何通过控制原材料的选用、玻璃钢产品的成型工艺、加入填料、模具结构设计来最大限度的减少铁路客车用玻璃钢(FRP)产品的收缩及变形。     

Effect of an hourglass-shaped sleeve on the performance of the fluid dynamic bearings of a HDD spindle motor

This research investigated the characteristics of fluid dynamic bearings (FDBs) in a HDD spindle motor with an hourglass-shaped sleeve. We demonstrated experimentally that the hourglass-shaped sleeve generated through the ball-sizing process is a major source of large repeatable runout and non-repeatable runout in a HDD spindle system. We also numerically proved the effect of hourglass-shaped sleeves on pressure, friction torque, stiffness and damping coefficients, critical mass, and shock response. Finally, we proposed a robust design for FDBs with hourglass-shaped groove depths to compensate for the decrease in the static and dynamic performance of FDBs with hourglass-shaped sleeves. The proposed hourglass-shaped groove depth improves the performance of FDBs with both straight and hourglass-shaped sleeves.     

An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixer

We develop a miniaturized batch-type screw mixer (BSM) for uniform mixing of polymer resin and nanoparticles, based on the stretching of material elements. This stretching is induced by the combination of recirculating cross-sectional flows in deep channels of the screw and high shear stress developed at flight regions. The BSM is used to produce a polymer nano-composite composed of multi-walled carbon nanotubes and polydimethylsiloxane resin. The mixing performance of the BSM is characterized quantitatively by estimating two different types of mixing efficiencies (i.e., dispersive mixing and distributive mixing) via transmitted light microscope images. The developed BSM highly improves the mixing performance rather than that of a conventional ultrasonic mixing device.     

Pathline glyphs

Visualization of pathlines is common and highly relevant for the analysis of unsteady flow. However, pathlines can intersect, leading to visual clutter and perceptual issues. This makes it intrinsically difficult to provide expressive visualizations of the entire domain by an arrangement of multiple pathlines, in contrast to well‐established streamline placement techniques. We present an approach to reduce these problems. It is inspired by glyph‐based visualization and small multiples: we partition the domain into cells, each corresponding to a downscaled version of the entire domain. Inside these cells, a single downscaled pathline is drawn. On the overview scale, our pathline glyphs lead to emergent visual patterns that provide insight into time‐dependent flow behavior. Zooming‐in allows us to analyze individual pathlines in detail and compare neighboring lines. The overall approach is complemented with a context‐preserving zoom lens and interactive pathline‐based exploration. While we primarily target the visualization of 2D flow, we also address the extension to 3D. Our evaluation includes several examples, comparison to other flow visualization techniques, and a user study with domain experts.     

Conceptual and basic designs of the Mobile Harbor crane based on topology and shape optimization

The Mobile Harbor (MH) has been recently proposed as a novel maritime cargo transfer system that can move to a container ship anchored in the deep sea and handle containers directly at sea with the aid of a stabilized MH crane. Because this system operates under at-sea conditions, the MH crane must be designed to support an inertia load and wind force, as well as its self-weight. The wave-induced motions of the MH, e.g. rolling, pitching, and heaving, generate a significant amount of inertia load, which has not been considered in the design of conventional quayside cranes installed on stable ground. Wind force is also a critical design factor due to the higher wind velocity in the open sea. In addition to the aforementioned structural rigidity, mass minimization is also important in the structural design of MH cranes because it reduces the overturning moment and therefore enhances ship stability. In this paper, the sensitivities of the design-dependent loads (i.e. self-weight, inertia load, and wind force) are derived with respect to the design variables, and then a topology optimization is conducted with the derived sensitivities in order to obtain a conceptual design. Then, the conceptual design is elaborated into a three-dimensional basic design through shape optimization with design regulations for offshore cranes. Through the integrated design process with the topology and shape optimizations, a conceptual and basic design is successfully obtained for the MH crane.     

Cure kinetics of high performance epoxy resin systems

Summary Isothermal cure kinetics ofEPON HPT 1071/DDS system have been performed by means of differential scanning calorimetry. The maximum cure rate and the extent of conversion at various DDS concentrations were studied as a function of cure temperature. Maximum cure rate increases with increasing cure temperature and DDS concentration. At various DDS concentrations, the maximum cure rate occured between 19–22% conversion. In order to evaluate the kinetic parameters, numerical calculations by means of a Newton-Raphson technique and experimental results obtained from the peak of reaction rate curve were undertaken.