An integrated air-gap-capacitor pressure sensor and digital readoutwith sub-100 attofarad resolution

The fabrication and characterization of an integrated air-gap-capacitor pressure sensor are presented. The capacitor fabrication process uses standard IC processing to create NMOS circuits, and an added polysilicon layer to create poly-to-n⁺ capacitors with a 0.6-μm-thick dielectric using deposited oxide. Subsequent processing is used to produce deformable, parallel-plate, air-gap capacitors on the front side alongside MOS circuits. Sensor chips are fabricated using 100-μm×100-μm, 100-fF air-gap capacitors with on-chip circuitry. The sensor chip is a part of a capacitive measurement system that uses a charge-redistribution sense technique to achieve very high capacitance resolution. The behavior of the pressure sensor chips was studied as a function of applied pressure in the 0-240-kPa (0-35-psi) range. Measurements indicate a sensitivity of 0.93 mV/kPa (6.40 mV/psi) with a deflection of 10 nm/kPa (70 nm/psi) at 0-69 kPa (0-10 psi). Standard deviations indicate a static pressure resolution of 0.54 kPa (0.078 psi), which translates to 30 attofarads at a sampling frequency of 11 kHz     

Structural properties of 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 relaxor ferroelectric thin films on SrRuO3 conducting oxides

Coating of 0.65Pb(Mg_1/3Nb_2/3)O₃–0.35PbTiO₃ (PMN–PT) relaxor ferroelectrics by a sol–gel method is followed by growth of epitaxial SrRuO₃ (SRO) metallic oxide electrodes on SrTiO₃ (STO) single-crystal substrate by pulsed laser deposition. High-quality PMN–PT films on SRO with preferred growth orientation were successfully fabricated by controlling the operation parameters. Structural properties of relaxor ferroelectric PMN–PT thin films on SRO/STO substrates have been studied by X-ray diffraction (XRD), transmission electron microscopy (TEM) and atomic force microscopy (AFM). In-plane and out-of-plane alignments of the heterostructure are confirmed and the structural twinning of the materials are also revealed.     

Study on Contamination Control for Yield Enhancement in the Manufacturing Line of Cellular Phone Modules

Practical studies on the method of contamination control for yield enhancement in the cellular phone modules production line were carried out. A contamination control method was proposed, consisting of data collection, data analysis, improvement action, verification, and implementation of control. The partition check method and the composition analysis for data collection and data analysis were respectively used in the cellular phone modules manufacturing process, and these methods were evaluated by the variation of yield loss before and after implementing the actions for improvement. In the partition check method, the critical process step was selected, and yield loss reduction through improvement actions was observed, whereas in the composition analysis, critical sources were selected, and yield loss reduction through improvement actions was investigated. From the results, it is concluded that the partition check and the composition analysis are effective solutions for contamination control in cleanroom production lines.     

Application of artificial neural networks to the analysis of two‐dimensional fluorescence spectra in recombinant E coli fermentation processes

A two‐dimensional (2D) spectrofluorometer was used to monitor various fermentation processes with recombinant E coli for the production of 5‐aminolevulinic acid (ALA). The whole fluorescence spectral data obtained during a process were analyzed using artificial neural networks, ie self‐organizing map (SOM) and feedforward backpropagation neural network (BPNN). The SOM‐based classification of the whole spectral data has made it possible to qualitatively associate some process parameters with the normalized weights and variances, and to select some useful combinations of excitation and emission wavelengths. Based on the classified fluorescence spectra a supervised BPNN algorithm was used to predict some of the process parameters. It was also shown that the BPNN models could elucidate some sections of the process's performance, eg forecasting the process's performance. Copyright © 2005 Society of Chemical Industry     

Equilibrium and crystallographic measurements of the binary tetrahydrofuran and helium clathrate hydrates

Clathrate compounds are crystalline materials formed by a physical interaction between host and relatively light guest molecules. Various types of nano-sized cages surrounded by host frameworks exist in the highly unique crystalline structures and free guest molecules are entrapped in an open host-guest network. Recently, we reported two peculiar phenomena, swapping and tuning, naturally occurring in the hydrate cages. Helium, one of the smallest light guest molecules, must be the challengeable material in the sense of physics and moreover possesses versatile applications in the field of superconductivity technology and thermonuclear industry. In this regard, we attempted for the first time to synthesize helium hydrates at moderate temperature and pressure conditions. According to inclusion phenomena, helium itself normally cannot form clathrate hydrates due to being too small molecularly without the help of hydrate former molecules (sI, sII, and sH formers). In this study, the hydrate equilibria of the binary clathrate hydrate containing tetrahydrofuran, helium, and water were determined at 2, 3, 5.56 THF mol%. Direct volumetric measurements were also carried out to confirm the exact amount of helium captured in the hydrate cages. Finally, the crystalline structure of the formed mixed hydrates was identified by powder X-ray diffraction, resulting in structure II.     

Friction and wear of Inconel 690 and Inconel 600 for steam generator tube in room temperature water

In the steam generators of nuclear power plants, the flow of cooling water can cause the tubes to vibrate, resulting in fretting wear damage due to contacts between these tubes and their supports. The tubes are made of Inconel 690 and Inconel 600 and the supports are made of STS 304. In this paper, fretting wear tests in water were performed using the materials Inconel 690 and Inconel 600 in contact with STS 304. Fretting tests using a cross-cylinder type set up were conducted under various vibrating amplitudes and applied normal loads in order to measure friction forces and wear volumes. Also, conventional sliding tests using a pin-on-disk type set up were carried out to compare these test results.In the fretting tests, friction force was found to be strongly dependent on normal load and vibrating amplitude. Coefficients of friction decreased with an increase in the normal load and a decrease in the vibrating amplitude applied. Also, the wear of Inconel 600 and Inconel 690 was predicted using a work rate model. Depending on the normal load and vibrating amplitude applied, distinctively different wear mechanisms and often drastically different wear rates occurred. It was found that the fretting wear coefficients for Inconel 600 and Inconel 690 were 9.3×10⁻¹⁵ and 16.2×10⁻¹⁵ Pa⁻¹, respectively. This study shows that Inconel 690 can result in lesser friction forces and exhibits less wear resistance than Inconel 600 in room temperature water.     

Design of thermophoretic probe for precise particle sampling

We proposed a design methodology for improved thermophoretic probes that can sample particles with high spatial resolution. A bending vibration analysis for the instantaneous motion of a probe has been done together with direct observation of the probe motion and flow disturbance for systematic study of the effect of different designs on particle sampling. Direct observation of the motion of thermophoretic sampling probes revealed that the probe with a low stiffness would result in inaccurate particle sampling. Based on these, the thermophoretic sampling probe was modified to minimize probe vibration and flow disturbance and this modified design was confirmed to sample particles with higher spatial resolution than the original one by examining transmission electron microscope (TEM) images of particles collected in a flame.     

A positive‐working photosensitive polyimide based on thermal cross‐linking and acidolytic cleavage

A novel positive‐working photosensitive polyimide (PSPI) based on a poly(hydroxyimide) (PHI), a crosslinking agent having vinyl ether groups, and a photoacid generator (PAG) was prepared. The PHI as a base resin of the three‐component PSPI was synthesized from 4,4′‐oxydiphthalic anhydride and 2,2′‐bis(3‐amino‐4‐hydroxyphenyl)hexafluoropropane through ring‐opening polymerization and subsequent thermal cyclization. 2,2′‐bis(4‐(2‐(vinyloxy)ethoxy)phenyl)propane (BPA‐DEVE) was used as a vinylether compound and diphenyliodonium 5‐hydroxynaphthalene‐1‐sulfonate was used as a PAG. The phenolic hydroxyl groups of the PHI and the vinyl ether groups of BPA‐DEVE are thermally crosslinked with acetal structures during prebake step, and the crosslinked PHI becomes completely insoluble in an aqueous basic solution. Upon exposure to UV light (365 nm) and subsequent postexposure bake (PEB), a strong acid generated from the PAG cleaves the crosslinked structures, and the exposed area is effectively solubilized in the alkaline developer. The dissolution behavior of the PSPI containing each 11.5 wt % of BPA‐DEVE and of the PAG was studied after UV exposure (365 nm) and PEB. It was found that the difference in dissolution rates between exposed and unexposed areas was enough to get high resolution. A fine positive pattern with a resolution of 5 μm in a 3.7‐μm‐thick film was obtained from the three‐component PSPI. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci, 2008     

Microstructural investigation of long-term degradation mechanisms in GFRP dowel bars for jointed concrete pavement

Steel dowel bar is used to transfer loads in concrete pavement slab. However, once the steel dowel bar corrodes, it may cause faults, such as joint freezing in concrete pavement, level differences resulting from spalling or decreased efficiency of load transfer, etc., which are the same problems experienced by typical reinforcing steel. This study evaluated the applicability of glass fiber-reinforced polymer (GFRP) dowel bar as a substitute for steel dowel bar. A microstructural analysis was conducted to examine the decrease in durability of GFRP dowel bar exposed to deterioration environments. To analyze the deterioration mechanism of GFRP dowel bar, scanning electron microscopy was employed and the porosity was measured by the gas absorption method. It was concluded that the longer the GFRP dowel bar was exposed to deterioration environments, the more the interlaminar shear stress decreased. This result was validated by the microstructural analysis. © 2008 Wiley Periodicals, Inc. J Appl Polym Sci, 2008