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The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features  相似文献   
66.
A new commercially available diode model is described. This unified model is capable of simulating the widest range of diode technologies of any presently available. The emphasis of this paper is on describing the model's extensive features and flexibility in the different domains of operation and is of particular interest in power applications  相似文献   
67.
A preliminary report presenting the results of fibular strut grafting in the severely resorbed mandibular and maxillary region is presented. Thirteen patients were treated due to severe resorption of alveolar and basilar bone of 49 segments of the mandible and the maxilla. Two patients additionally had pathological fractures of the mandible. In 10 cases the strut graft was harvested by means of a new minimally invasive technique. After modelling the fibular bone it was fixed to the recipient site by miniscrews or implants. After a mean follow-up period of 20 months (max. 31, min. 11 months) a retrospective analysis of clinical and radiological findings was carried out. It showed that a mean augmentation of 16 mm was achieved. Compared to other studies the fibular strut graft was resorbed less, and due to the primary stability it could be used for the treatment of fractures of the mandible. No more than natural resorption was observed when the patients received their prostheses fixed to dental implants.  相似文献   
68.
Uses a Markov process to model a real-time expert system architecture characterized by message passing and event-driven scheduling. The model is applied to the performance evaluation of rule grouping for real-time expert systems running on this architecture. An optimizing algorithm based on Kernighan-Lin heuristic graph partitioning for the real-time architecture is developed and a demonstration system based on the model and algorithm has been developed and tested on a portion of the advanced GPS receiver (AGR) and manned manoeuvring unit (MMU) knowledge bases  相似文献   
69.
Efficient algorithms for processing large volumes of data are very important both for relational and new object-oriented database systems. Many query-processing operations can be implemented using sort- or hash-based algorithms, e.g. intersections, joins, and duplicate elimination. In the early relational database systems, only sort-based algorithms were employed. In the last decade, hash-based algorithms have gained acceptance and popularity, and are often considered generally superior to sort-based algorithms such as merge-join. In this article, we compare the concepts behind sort- and hash-based query-processing algorithms and conclude that (1) many dualities exist between the two types of algorithms, (2) their costs differ mostly by percentages rather than by factors, (3) several special cases exist that favor one or the other choice, and (4) there is a strong reason why both hash- and sort-based algorithms should be available in a query-processing system. Our conclusions are supported by experiments performed using the Volcano query execution engine  相似文献   
70.
Presents protocols for determining processor membership in asynchronous distributed systems that are subject to processor and communication faults. These protocols depend on the placement of a total order on broadcast messages. The types of systems for which each of these protocols is applicable are characterized by the properties of the communication mechanisms and by the availability of stable storage. In the absence of stable storage or of a mechanism for distinguishing promptly delivered messages, the authors show that no membership protocol can exist. They also discuss their experience in implementing these membership protocols  相似文献   
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