Wet etch rates at 25°C for Zn0.9Mg0.1O grown on sapphire substrates by pulsed laser deposition (PLD) were in the range 300–1100 nm · min−1 with HCl/H2O (5×10−3−2×10−2 M) and 120–300 nm · min−1 with H3PO4/H2O (5×10−3−2×10−2 M). Both of these dilute mixtures exhibited diffusion-limited etching, with thermal activation energies of 2–3 kCal · mol−1. By sharp contrast, the etch rates for ZnO also grown on sapphire by PLD were much slower in similar solutions, with rates
of 1.2–50 nm · min−1 in HCl/H2O (0.01–1.2 M) and 12–54 nm · min−1 in H3PO4/H2O (0.02–0.15 M). The etching was reaction limited over the temperature range 25–75°C, with activation energies close to 6
kCal · mol−1. The resulting selectivity of Zn0.9Mg0.1O over ZnO can be a high as ∼400 with HCl and ∼30 with H3PO4. 相似文献
Coating of 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 (PMN–PT) relaxor ferroelectrics by a sol–gel method is followed by growth of epitaxial SrRuO3 (SRO) metallic oxide electrodes on SrTiO3 (STO) single-crystal substrate by pulsed laser deposition. High-quality PMN–PT films on SRO with preferred growth orientation were successfully fabricated by controlling the operation parameters. Structural properties of relaxor ferroelectric PMN–PT thin films on SRO/STO substrates have been studied by X-ray diffraction (XRD), transmission electron microscopy (TEM) and atomic force microscopy (AFM). In-plane and out-of-plane alignments of the heterostructure are confirmed and the structural twinning of the materials are also revealed. 相似文献
Uncertainty in water quality model predictions is inevitably high due to natural stochasticity, model uncertainty, and parameter uncertainty. An integrated modelling system (modified-BASINS) under uncertainty is described and demonstrated for use in receiving-water quality prediction and watershed management. A Monte Carlo simulation was used to investigate the effect of various uncertainty types on output prediction. Without pollution control measures in the watershed, the concentrations of total nitrogen (T-N) and total phosphorus (T-P) in the Hwaong Reservoir, considering three uncertainty types, would be less than about 4.4 and 0.23 mg L(-1), respectively, in 2012, with 90% confidence. The effects of two watershed management practices, wastewater treatment plants (WWTP) and constructed wetlands (WETLAND), were evaluated. The combined scenario (WWTP + WETLAND) was the most effective at improving reservoir water quality, bringing concentrations of T-N and T-P in the Hwaong Reservoir to less than 3.4 and 0.14 mg L(-1), 24 and 41% improvements, respectively, with 90% confidence. Overall, the Monte Carlo simulation in the integrated modelling system was practical for estimating uncertainty and reliable in water quality prediction. The approach described here may allow decisions to be made based on the probability and level of risk, and its application is recommended. 相似文献
Achieving high processing quality for chemical mechanical planarization (CMP) in semiconductor manufacturing is difficult due to the distinct process variations associated with this method, such as drift and shift. Run-to-run control aims to maintain the targeted process quality by reducing the effect of process variations. The goal of controller learning is to infer an underlying output–input reverse mapping based on input–output samples considering the process variations. Existing controllers learn reverse mapping by minimizing the total mapping error for sample data. However, this approach often fails to generate inputs for unseen target outputs because conditional input distributions on target outputs are not captured in the learning. In this study, we propose a controller based on a least squares generative adversarial network (LSGAN) that can capture the input distributions. GANs are deep-learning architectures composed of two neural nets: a generator and a discriminator. In the proposed model, the generator attempts to produce fake input distributions that are similar to the real input distributions considering the process variation features extracted using convolutional layers, while the discriminator attempts to detect the fake distributions. Competition in this game drives both networks to improve their performance until the generated input distributions are indistinguishable from the real distributions. An experiment using the data obtained from a work-site CMP tool verified that the proposed model outperformed the comparison models in terms of control accuracy and computation time.
Due to the advancement of wireless internet and mobile positioning technology, the application of location-based services (LBSs) has become popular for mobile users. Since users have to send their exact locations to obtain the service, it may lead to several privacy threats. To solve this problem, a cloaking method has been proposed to blur users’ exact locations into a cloaked spatial region with a required privacy threshold (k). With the cloaked region, an LBS server can carry out a k-nearest neighbor (k-NN) search algorithm. Some recent studies have proposed methods to search k-nearest POIs while protecting a user’s privacy. However, they have at least one major problem, such as inefficiency on query processing or low precision of retrieved result. To resolve these problems, in this paper, we propose a novel k-NN query processing algorithm for a cloaking region to satisfy both requirements of fast query processing time and high precision of the retrieved result. To achieve fast query processing time, we propose a new pruning technique based on a 2D-coodinate scheme. In addition, we make use of a Voronoi diagram for retrieving the nearest POIs efficiently. To satisfy the requirement of high precision of the retrieved result, we guarantee that our k-NN query processing algorithm always contains the exact set of k nearest neighbors. Our performance analysis shows that our algorithm achieves better performance in terms of query processing time and the number of candidate POIs compared with other algorithms. 相似文献
The upper and lower limits of the electrostrictive constants, dielectric permittivities, spontaneous polarizations, and piezoelectric coefficients were calculated for ceramic PbTiO(3) from theoretical single-crystal constants. Experimental ceramic data fall between these upper and lower limits. The large piezoelectric anisotropy d(33)/d(31) of ceramic PbTiO(3 ) was shown to be related to the single-crystal PbTiO(3) electrostrictive anisotropies Q(11)/Q(12 ) and Q(44)/Q(12). The possibility of a change in sign of the ceramic d(31) coefficient due to a slight variation in the single-crystal electrostrictive anisotropies was discussed. The single-crystal and predicted ceramic hydrostatic electrostrictive constants were found to be equal. Using this result the ceramic hydrostatic g(h ) coefficient is always smaller than the single-crystal g (h), but the ceramic hydrostatic d(h) coefficient can be either larger or smaller than the single-crystal d(h) depending on the dielectric anisotropy (epsilon (11)/epsilon(33)) of the single-crystal. 相似文献