Monolithic integration of microlensed resonant photodetectors andvertical cavity lasers

Monolithic integration of high performance microlensed resonant photodetectors and vertical cavity lasers (VCLs) from a single epitaxial growth is presented. The VCLs have sub-200 μA threshold currents. Adjacent detectors have the same operating wavelength and responsivities of ~0.4 A/W with ~6 nm optical bandwidths     

Gate oxide reliabilities in MOS (metal-oxide-semiconductor) structures with Ti-polycide gates

We have investigated the thermal degradation of gate oxide in metal-oxide-semiconductor (MOS) structures with Ti-polycide gates. We found that the Ti-diffusion into the underlying polysilicon and consequently to the gate oxide occurs upon thermal cycling processes, which results in the dielectric breakdown of the gate oxide. We also found that the Ti-diffusion is suppressed by the employment of the thin (about 5 nm) titanium nitride (TiN) diffusion barrier layer, which consequently improved the reliability characterisitics of gate oxide significantly.     

On algorithms for digital signal processing of sequences

In this work, we analyze the algebraic structure of fast algorithms for computing one- and two-dimensional convolutions of sequences defined over the fields of rational and complex rational numbers. The algorithms are based on factorization properties of polynomials and the direct sum property of modulo computation over such fields. Algorithms are described for cyclic as well as acyclic convolution. It is shown that under certain nonrestrictive conditions, all the previously defined algorithms over the fields of rational and complex rational numbers are also valid over the rings of finite integers. Examples are presented to illustrate the results.     

Polarity control of GaN epilayers grown on ZnO templates

We report the successful growth of Ga-polar GaN epilayers on O-polar ZnO templates pre-deposited on c-sapphire. Prior to GaN growth, NH₃ is exposed onto the ZnO template. The polarity of the GaN layers is confirmed by etching of the surface and by conversion beam electron diffraction (CBED), while the O-polar ZnO is confirmed by CBED. It is suggested that the NH₃ pre-exposure helps form a Zn₃N₂ layer, which possesses inversion symmetry and inverts the crystal from anion polar to cation polar.     

Photoactive Electro-Controlled Visual Perception Memory for Emulating Synaptic Metaplasticity and Hebbian Learning

In bionic technology, it has become an innovative process imitating the functionality and structuralism of human biological systems to exploit advanced artificial intelligent machines. Bionics plays a significant role in environmental protection, especially for its low energy loss. By fusing the concept of receptor-like sensing component and synapse-like memory, the photoactive electro-controlled optical sensory memory (PE-SM) is proposed and realized in a single device, which endows a simple methodology of reducing power consumption by photoactive electro-control. The PE-SM is the system built with the stacked atomically thick materials, in which rhenium diselenide serves as a robust photosensor, hexagonal boron nitride serves as a tunneling dielectric, and graphene serves as a charge-storage layer. With the features of the PE-SM, it performs synaptic metaplasticities under optical spikes. In addition, a simulated spiking neural network composed of 24 × 24 PE-SMs is further presented in an unsupervised machine learning environment, performing image recognition via the Hebbian rule. The PE-SM not only improves the neuromorphic computing efficiency but also simplifies the circuit-size structure. Eventually, the concept of photoactive electro-control can extend to other photosensitive 2D materials and provide a new approach of constructing either visual perception memory or photonic synaptic devices.     

Deep Q-network-based auto scaling for service in a multi-access edge computing environment

In 5G networks, it is necessary to provide services while meeting various service requirements, such as high data rates and low latency, in response to dynamic network conditions. Multi-access edge computing (MEC) is a promising concept to meet these requirements. The MEC environment enables service providers to deploy their low latency services that are composed of multiple components. However, operating a service manually and attempting to satisfy the quality of service (QoS) requirements is difficult because many factors need to be considered in an MEC scenario. In this paper, we propose an auto-scaling method using deep Q-networks (DQN), which is a reinforcement learning algorithm, to resize the number of instances assigned to service. In our evaluation, compared to other baseline methods, the proposed approach maintains the appropriate number of instances effectively in response to dynamic traffic change while satisfying QoS and minimizing the cost of operating the service in the MEC environment. The proposed method was implemented as a module running in OpenStack and published as open-source software.     

Microstructure control of copper films by the addition of molybdenum in an advanced metallization process

The effect of annealing on the resistivity, morphology, microstructure, and diffusion characteristics of Cu(Mo)/SiO₂/Si and Ti/Cu(Mo)/SiO₂/Si multilayer films has been investigated in order to deterine the role of Mo. In the case of a Cu(Mo)/SiO₂/Si multilayer, most of the Mo diffused out to the free surface to form MoO₃ at temperatures up to 500 C, and complete dissociation of Mo occurred at higher temperatures. The segregation of Mo to the external surface leads to Mo-free Cu films with extensive grain growth up to 20 times the original grain size and strong (111) texture. In the case of a Ti/Cu(Mo)/SiO₂/Si multilayer, a thin Ti film prohibits Cu agglomeration, out-diffusion of Mo, and diffusion of Cu into SiO₂ at temperatures up to 750 C. Cu(Mo) grain growth was less extensive, but (111) fiber texturing was much stronger than in the case of Cu(Mo)/SiO₂/Si. In the current study, significant changes in microstructure, such as a strong (111) texture and abnormal grain growth, have been obtained by adding Mo to Cu films when the films are annealed.     

A model for hot-electron-induced MOSFET linear-current degradationbased on mobility reduction due to interface-state generation

A simple model for the hot-electron degradation of MOSFET linear-current drive is developed on the basis of the reduction of the inversion-layer mobility due to the generation of interface states. The model can explain the observed dependence of the device hot-electron lifetime on the effective channel length and oxide thickness by taking into account both the relative nonscalability of the localized damage region and the dependence of the linear-current degradation on the effective vertical electric field E_eff. The model is verified for deep-submicrometer non-LDD n-channel MOSFETs with L_eff=0.2-1.5 μm and T_ox=3.6-21.0 nm. From the correlation between linear-current and charge-pumping degradation, the scattering coefficient α, which relates the number of generated interface states to the corresponding amount of inversion-layer mobility reduction, can be extracted and its dependence on E_eff determined. Using this linear-current degradation model, existing hot-electron lifetime prediction models are modified to account explicitly for the effects of L_eff and T _ox     

Hybrid ring coupler for W-band MMIC applications using MEMS technology

The hybrid ring coupler was designed and fabricated on a GaAs substrate using surface micromachining techniques, which adopted dielectric-supported air-gapped microstrip line (DAML) structure. The fabrication process of DAML is compatible with the standard monolithic microwave integrated circuit (MMIC) techniques, and the hybrid ring coupler can be simply integrated into a plane-structural MMIC. The fabricated hybrid ring coupler shows wideband characteristics of the coupling loss of 3.57 /spl plusmn/ 0.22dB and the transmission loss of 3.80 /spl plusmn/ 0.08dB across the measured frequency range of 85 to 105GHz. The isolation characteristics and output phase differences are -34dB and 180/spl plusmn/1/spl deg/, at 94GHz, respectively.     

Automatic Transformation of Membrane‐Type Electronic Devices into Complex 3D Structures via Extrusion Shear Printing and Thermal Relaxation of Acrylonitrile–Butadiene–Styrene Frameworks

This work demonstrates a means of automatic transformation from planar electronic devices to desirable 3D forms. The method uses a spatially designed thermoplastic framework created via extrusion shear printing of acrylonitrile–butadiene–styrene (ABS) on a stress‐free ABS film, which can be laminated to a membrane‐type electronic device layer. Thermal annealing above the glass transition temperature allows stress relaxation in the printed polymer chains, resulting in an overall shape transformation of the framework. In addition, the significant reduction in the Young's modulus and the ability of the polymer chains to reflow in the rubbery state release the stress concentration in the electronic device layer, which can be positioned outside the neutral mechanical plane. Electrical analyses and mechanical simulations of a membrane‐type Au electrode and indium gallium zinc oxide transistor arrays before and after transformation confirm the versatility of this method for developing 3D electronic devices based on planar forms.