电化学电容-电压法表征等离子体掺杂超浅结

采用电化学电容-电压(ECV)法对等离子体掺杂制备的Si超浅p n结进行了电学表征.通过对超浅p n结样品ECV测试和二次离子质谱(SIMS)测试及比较,发现用ECV测试获得的p 层杂质浓度分布及结深与SIMS测试结果具有良好的一致性,但ECV测试下层轻掺杂n型衬底杂质浓度受上层高浓度掺杂影响很大.ECV测试具有良好的可控性与重复性.对不同退火方法等离子体掺杂形成的超浅结样品的ECV系列测试结果表明,ECV能可靠地表征结深达10nm,杂质浓度达1021cm-3量级的Si超浅结样品,其深度分辨率可达纳米量级,它有望在亚65nm节点CMOS器件的超浅结表征中获得应用.     

我校电工学课程教学改革的探讨与实践

介绍了在电工学教学实践中逐步形成的一系列关于教学内容、实验内容、考试方法改革等方面的体会和做法。     

三种传递对准延时误差补偿方法的比较研究

以一种典型的速度加姿态匹配传递对准模型为例,系统地分析和介绍3种延时误差补偿方法：外推―滤波法、滤波―更新法和建模补偿法。为验证和比较这3种方法的补偿效果,采用S行飞行轨迹进行计算机仿真。仿真结果表明,在该种飞行条件下,3种方法都能够有效地减小传递对准延时误差,其中滤波―更新法对延时误差的补偿最为彻底。     

一种基于GA-BP 算法的PIDNN 控制策略

为改善常规PID控制器对非线性对象的控制性能,提出一种基于GA-BP算法的PID神经网络（PID NeuralNetwork,PIDNN）控制策略。将PID控制规律融入神经网络,构成一种PIDNN控制器,并利用GA-BP算法来对其进行参数优化。采用所设计的PIDNN控制器对一种非线性系统进行仿真研究,仿真结果表明：GA-BP算法收敛速度快,所设计的PIDNN控制器与常规PID控制器相比,其控制稳定性和快速性等性能都得到了很大改善。     

地基雷达部署对探测临近空间高超声速目标影响研究

针对不同地基雷达(GBR)部署方式对探测临近空间高超声速目标的性能影响问题,该文建立临近空间高超声速目标模型和GBR探测模型,依据目标雷达截面积(RCS)、探测距离和观测角随时间的变化情况,提出检测概率、跟踪系数和资源冗余率3种雷达探测性能评估指标,仿真分析GBR前沿部署、接力部署和要地部署方式对临近空间高超声速目标探测性能的影响。结果表明,前沿部署和接力部署相结合的探测效果好,前沿部署首次发现目标距离远,能提供的预警时间长,要地部署跟踪时间短,资源冗余率高。研究结果具有一定现实意义和工程实践性,能为临近空间预警系统中GBR部署提供理论依据和技术支撑。     

Light-Fueled Nonequilibrium and Adaptable Hydrogels for Highly Tunable Autonomous Self-Oscillating Functions

Nonequilibrium oscillation fueled by dissipating chemical energy is ubiquitous in living systems for realizing a broad range of complex functions. The design of synthetic materials that can mimic their biological counterparts in the production of dissipative structures and autonomous oscillations is of great interest but remains challenging. Here, a series of environmentally adaptable hydrogels functionalized with photoswitchable spiropyran derivatives that display a tunable equilibrium-shifting capability, thus endowing those hydrogels with a high degree of freedom and flexibility is reported. Such nonequilibrium hydrogels are able to responsively adapt their shapes under constant light illumination due to asymmetric deswelling, which in turn generates self-shadowing and consequently creates autonomous self-oscillating behaviors through a negative feedback process. Diverse oscillation modes including bending, twisting, and snap-through buckling with tunable frequency and amplitude are widely observed in three different molecular systems. Density functional theory calculations and finite element simulations further demonstrated the robustness of such a photoadaptable self-oscillation mechanism. This study provides a useful molecular design strategy for construction of highly adaptable hydrogels with potential applications in self-sustained soft robots and autonomous devices.     

SDN中基于KMOBPSO的高可靠性控制器部署算法

针对SDN中控制器系统的单节点故障问题,兼顾系统成本和系统时延,应用N+1冗余备份模型来提高SDN控制器部署的可靠性,并将其抽象为多目标优化问题.同时,提出了一种融合K-means聚类算法和遗传算子的多目标二进制粒子群算法——KMOBPSO算法,以求解SDN控制器高可靠性部署问题的解.仿真结果表明,所提算法具有求解精度高、分布均匀、沿Pareto前沿面覆盖广的特点,能够显著提高SDN中控制器部署的可靠性.     

Full Field Temperature Measurement of Specular Wafers During Rapid Thermal Processing

Many of the processes involved in the creation of semiconductor devices involve high-temperature processing of silicon wafers. The benefits of reduced thermal budget and faster cycle time make rapid thermal processing (RTP) a possible key technology for semiconductor manufacturing. However, the problem of nonuniform wafer temperature has prevented it from further spread among the industry. The first step in developing controls to maintain a uniform wafer temperature is accurate temperature measurement during processing. In this paper, a system was developed to exploit the specular reflectivity of silicon wafers and obtain a measurement of the wafer temperature profile. The spectral reflectivity is determined by measuring the intensity of an incident beam and the beam reflected from the wafer surface. With this measured reflectivity value the spectral-directional wafer emissivity was determined using Kirchhoff's law. The obtained emissivity then was used to calculate the wafer temperature profile from an image obtained with an infrared camera. An experimental study of the transmittance of an undoped silicon calibration wafer at an elevated temperature is also discussed     

液晶显示用 a-Si TFT 有源矩阵制作技术

本文通过对液晶显示用α-Si TFT 的工作原理、工作特性分析,讨论了α-Si TFT 有源矩阵结构设计和汇线电阻、电容对α-Si TFT-LCD 的影响。介绍了α-Si TFT 有源矩阵的制作工艺。     

三偏振系统用于高精度可调衰减器的实验研究

用三只高消光比的冰洲石偏光棱镜组成的高精度可调光学衰减系统,具有使用波带宽(0.3～3μm),可调范围大(约50 dB),读数精(相对误差小于5％)的优点。