Evaluation of a copper metallization process and the electricalcharacteristics of copper-interconnected quarter-micron CMOS

Copper metallization was applied to quarter-micron CMOS circuits using copper chemical vapor deposition (CVD) and chemical mechanical polishing (CMP). Both the metallization process and the electrical characteristics of CMOS devices/circuits were evaluated. Process-induced metal contamination on both sides of the wafer were quantitatively evaluated and reduced to about of 10¹¹ atoms/cm² by using an optimized cleaning sequence. The ability of borophosphosilicate-glass (BPSG) to act as a copper diffusion barrier was discovered and the ability of TiN to do so was also confirmed. Electrical characteristics of n and p MOSFET's with copper interconnections were stable even after annealing at 550°C. The leakage current of the pn junction, capacitance-voltage characteristics and time-dependent dielectric breakdown characteristics of the MOS diode indicate that the copper metallization process did not deteriorate the pn junction and the gate oxide. Normal operation of a 53-stage quarter-micron CMOS inverter ring oscillator with copper metallization was successfully achieved     

MBE-Grown II–VI and Related Nanostructures

Nanostructures of II–VI semiconductor materials could potentially offer novel and superior physical (in particular, optoelectronic) properties with respect to their bulk counterparts. Herein, we present our most recent research on several II–VI and related nanostructures grown by molecular beam epitaxy (MBE) technique. These include a ZnSe nanograting. This nanograting structure was realized at the surface of Fe/ZnSe bilayers grown on GaAs(001) substrates by thermal annealing. A model based on an Ewald construction is presented to explain its unusual reflection high-energy electron diffraction (RHEED) patterns. The formation mechanism of this one-dimensional (1D) nanostructure is possibly related to surface energy minimization, together with an Fe–Se exchange interaction and Fe-induced decomposition of several top ZnSe atomic layers during thermal annealing. Another nanostructure investigated was the ZnS Schottky barrier embedded with Fe quantum dots (QDs). Here, a Au/ZnS/Fe-QDs/ZnS/n ⁺-GaAs(100) Schottky barrier structure containing five layers of spherical Fe quantum dots with a diameter of ~3 nm was fabricated. Its I–V characteristic measured from 5 K to 295 K displays negative differential resistance (NDR) for temperature ≤50 K. Staircase-like I–V characteristics were also observed at low temperature in some devices fabricated from this structure. Possible mechanisms that can account for the observed unusual I-V characteristic in this structure are presented. Finally, laterally grown Fe nanowires (NWs) on a ZnS surface were prepared. Under high growth/annealing temperature, two types of Fe NWs with specific orientations can be grown on the ZnS(100) surface. We propose a mean-field model that the torque exerted by type A Fe NWs could effectively turn the two components of type B Fe NWs slightly toward the ZnS [110] direction, leading to the observed misalignment of type B Fe NWs.     

Fabrication and lithium intercalation properties of epitaxial Li2RuO3 thin films

Lithium intercalation in a lithium excess layered material Li₂RuO₃ was investigated using two-dimensional model electrodes with a restricted reaction plane of (002). Li₂RuO₃ films were synthesized on Al₂O₃(0001) substrate by a pulsed laser deposition, and X-ray diffraction measurements confirmed epitaxial growth of Li₂RuO₃(002). Electrochemical characterization using cyclic voltammetry and charge/discharge measurements indicated electrochemical reactions with a discharge capacity of 200 mAh g^− 1 for the film deposited at 400 °C followed by post-annealing at 550 °C. The electrochemical activity on the (002) plane indicated three-dimensional lithium diffusion in the two-dimensional layered rocksalt structure through the lithium sites in the transition metal layer.     

Study of contact resistance of high-mobility organic transistors through comparisons

Realization of high-frequency low-cost organic electronics requires high-mobility organic field-effect transistors (OFETs) with short channels, where influence of contact resistance becomes more serious than either lower mobility or longer channel devices. To reduce the contact resistance, we systematically and quantitatively investigate the influence of the lowest unoccupied molecular orbital (LUMO) level of an electron acceptor layer, the active layer thickness, and the side chain of active layer itself on contact resistance of top-contact high-mobility OFETs through a series of comparative analysis. We find that the acceptor of 1,3,4,5,7,8-hexafluoro tetracyano naphtha quinodimethane (F₆TNAP) with a deeper LUMO level is efficient for carrier injection and that the bulk resistance plays an important role in such devices. By optimizing the parameters, we get the lowest contact resistance of only 110 Ω cm, and thus recorded effective mobility of 8.0 cm²/V s is attained for polycrystalline thin film transistors and still kept as high as 6 cm²/V s at shorter channel lengths.     

Cryogenic SiGe ASICs for readout and multiplexing of superconducting detector arrays

This paper presents an ultra low noise instrumentation based on cryogenic electronic integrated circuits (ASICs: Application Specific Integrated Circuits). We have designed successively two ASICs in standard BiCMOS SiGe 0.35 μm technology that have proved to be operating at cryogenic temperatures. The main functions of these circuits are the readout and the multiplexing of TES/SQUID arrays. We report the cryogenic operation of a first ASIC version dedicated to the readout of a 2 × 4 pixel demonstrator array. We particularly emphasize on the development and the test phases of an ultra low white noise (0.2 nV/sqrtHz) cryogenic amplifier designed with two multiplexed inputs. The cryogenic SiGe amplifier coupled to a SQUID in a FLL operating at 4.2 K is also presented. We finally report on the development of a second version of this circuit to readout a 3 × 8 detectors array with improved noise performances and upgraded functionalities.     

Physical and functional association between thymic shared antigen-1/stem cell antigen-2 and the T cell receptor complex

Thymic shared antigen-1 (TSA-1)/stem cell Ag-2 (Sca-2) is a glycosylphosphatidylinositol (GPI)-anchored antigen expressed on lymphocytes. We have previously demonstrated that a signal via TSA-1/Sca-2 inhibits T cell receptor (TCR)-mediated T cell activation and apoptosis. To elucidate a molecular mechanism for TSA-1-mediated modulation of the TCR-signaling pathway, we examined whether TSA-1 is physically coupled to the TCR in the present study. TSA-1 was clearly associated with CD3zeta chains in T cell hybridomas, activated T cells, and COS-7 cells transfected with TSA-1 and CD3zeta cDNA. The physical association was confirmed on the surface of T cells in immunoprecipitation and confocal microscopy. The analysis using stable and transient transfectants expressing a transmembrane form of TSA-1 revealed that the association of CD3zeta did not require the GPI anchor of TSA-1. Finally, tyrosine phosphorylation of CD3zeta chains was induced after stimulation with anti-TSA-1, suggesting that a functional association between these two molecules also exists. These results imply that the physical association to CD3zeta underlies a regulatory role of TSA-1/Sca-2 in the TCR-signaling pathway.     

Factors influencing mental workload indexes

Several findings of the author's own mental workload research are reviewed. Especially, factors, except task demand, influencing mental workload indexes are discussed. First, an experiment using the National Aeronautics and Space Administration Task Load Index (NASA TLX) is reviewed and the effects of a prior task load on a subsequent subjective workload are described. In a physiological measures section, the low reliability of the heart rate variability (HRV) parameters when the subjects' respiration pattern are highly irregular, and the existence of low sweat respondent, although perspiration seems to be sensitive to the workload, are indicated. Furthermore, results of the task specific physiological responses and of a HRV parameter affected by the individual characteristics, like type A behavior pattern, are shown. Discrepancy between autonomic nervous system activity measures may be solvable by introducing a new concept of autonomic space (synergism of sympathetic and parasympathetic nervous system). Finally, the need for strategies of data management concerning the individual differences is emphasized.     

A quantitative assessment of serum chylomicron by light scattering intensity: application to the intestinal fat absorption test

We cloned the canine interleukin-12 (IL-12) subunit cDNA. Canine IL-12 exhibited sequence homology to the known sequences of human, mouse, and bovine genes at nucleotide and amino acid levels. Cotransfection of the p35 and p40 subunits of canine IL-12 cDNA clones into COS-1 cells resulted in the secretion of IL-12, which supported proliferation of the stimulated canine lymphocytes, promoted induction of canine interferon-gamma (IFN-gamma) from canine lymphocytes, and showed antitumor effect in vitro. The cloned canine IL-12 will be useful for canine therapeutic applications.     

TAS-301, an inhibitor of smooth muscle cell migration and proliferation, inhibits intimal thickening after balloon injury to rat carotid arteries

The purpose of this study was to determine the efficacy and the possible mechanism of action of a recently synthesized drug, TAS-301 [3-bis (4-methoxyphenyl)methylene-2-indolinone], on intimal formation in comparison with those of tranilast, the clinical efficacy of which was reported earlier. Rat carotid arteries were injured using a balloon catheter. Neointimal thickening, measured 14 days after injury, was reduced by the oral administration of TAS-301 in a dose-dependent fashion (3-100 mg/kg), and the effect of TAS-301 at a dose of 100 mg/kg was significantly greater than that of tranilast (300 mg/kg). Fewer cells were found on the intima of balloon-injured arteries of TAS-301-treated rats than on arteries of tranilast-treated rats. In an in vitro assay, TAS-301 inhibited the migration of smooth muscle cells (SMCs) stimulated by platelet-derived growth factor-BB, insulin-like growth factor-1 or heparin-binding epidermal growth factor-like growth factor. In addition, TAS-301 and tranilast reduced the proliferation of medial and intimal SMCs at 4 and 8 days, respectively, after the injury. In vitro, TAS-301 inhibited basic fibroblast growth factor-induced proliferation of SMCs dose dependently. These findings indicate that TAS-301 shows a higher inhibitory potency on intimal formation than tranilast due to inhibition of both migration of medial SMCs and proliferation of medial and intimal SMCs. Our results suggest that further evaluation of TAS-301 as an inhibitor of postangioplasty intimal thickening is warranted.     

Interleukin 6 and its relationship to clinical parameters in patients with malignant pleural mesothelioma

We explored the potential therapeutic benefit of introducing GM-CSF, IFN-gamma or a combination of both factors into CT26 tumor cells. CT26 cells secreting either GM-CSF or IFN-gamma exhibited delayed tumorigenicity; however, cells expressing both GM-CSF and IFN-gamma did not form tumors. Even when wild type CT26 cells were introduced into a distant site of mice that had been inoculated with CT26/GM-CSF/IFN-gamma cells, no tumors were generated. Furthermore, when we injected GM-CSF + IFN-gamma cells into animals bearing established tumors, the tumors were either rejected or their development was delayed, suggesting that synergistic effects were induced against these tumors via a systemic immune response. Histopathological examination of the tumors injected with cells expressing GM-CSF and IFN-gamma combined showed necrosis and few signs of malignancy. The growth of tumors from mice treated with CT26/GM-CSF/IFN-gamma cells exhibited a delay in tumor formation and no effects were seen in athymic nude mice, which are deficient in T lymphocytes, or in splenectomized nude mice, which are deficient in natural killer (NK) cells, respectively. Our data indicate a dual role for T and NK cells in mediating the anti-tumor activity of this therapy. Our results suggest that transduction of tumor cells with both GM-CSF + IFN-gamma results in a powerful synergistic effect of the 2 cytokines that is of greater therapeutic benefit than transduction with either cytokine alone.