Investigation of RF sputtered PSG films for MEMS and semiconductor devices

In this work, we report the preparation of phospho-silicate-glass (PSG) films using RF magnetron sputtering process and its application as a sacrificial layer in surface micromachining technology. For this purpose, a 76 mm diameter target of phosphorus-doped silicon dioxide was prepared by conventional solid-state reaction route using P₂O₅ and SiO₂ powders. The PSG films were deposited in a RF (13.56 MHz) magnetron sputtering system at 200-300 W RF power, 10-20 mTorr pressure and 45 mm target-to-substrate spacing without external substrate heating. To confirm the presence of phosphorus in the deposited films, hot-probe test and sheet resistance measurements were performed on silicon wafers following deposition of PSG film and a drive-in step. As a final confirmatory test, a p-n diode was fabricated in a p-type Si wafer using the deposited film as a source of phosphorus diffusion. The phosphorus concentration in the target and the deposited film were analyzed using energy dispersive X-rays (EDAX) tool. The etch rate of the PSG film in buffered HF was measured to be about 30 times higher as compared to that of thermally grown SiO₂ films. The application of RF sputtered PSG film as sacrificial layer in surface micromachining technology has been explored. To demonstrate the compatibility with MEMS process, micro-cantilevers and micro-bridges of silicon nitride were fabricated using RF sputtered PSG as a sacrificial layer in surface micromachining. It is envisaged that the lower deposition temperature in RF sputtering (<150 °C) compared to CVD process for PSG film preparation is advantageous, particularly for making MEMS on temperature sensitive substrates.     

Context-Aware Holographic Communication Based on Semantic Knowledge Extraction

Augmented, mixed and virtual reality are changing the way people interact and communicate. Five dimensional communications and services, integrating information from all human senses are expected to emerge, together with holographic communications (HC), providing a truly immersive experience. HC presents a lot of challenges in terms of data gathering and transmission, demanding Artificial Intelligence empowered communication technologies such as 5G. The goal of the paper is to present a model of a context-aware holographic architecture for real time communication based on semantic knowledge extraction. This architecture will require analyzing, combining and developing methods and algorithms for: 3D human body model acquisition; semantic knowledge extraction with deep neural networks to predict human behaviour; analysis of biometric modalities; context-aware optimization of network resource allocation for the purpose of creating a multi-party, from-capturing-to-rendering HC framework. We illustrate its practical deployment in a scenario that can open new opportunities in user experience and business model innovation.

     

Transient-enhanced diffusion in shallow-junction formation

Shallow junctions are formed in crystalline Si by low-energy ion implantation of B⁺, P⁺, or As⁺ species accompanied by electrical activation of dopants by rapid thermal annealing and the special case of spike annealing. Diffusion depths were determined by secondary ion-mass spectroscopy (SIMS). Electrical activation was characterized by sheet resistance, Hall coefficient, and reverse-bias diode-leakage measurements. The B⁺ and P⁺ species exhibit transient-enhanced diffusion (TED) caused by transient excess populations of Si interstitials. The electrically activated fraction of implanted dopants depends mainly on the temperature for B⁺ species, while for P⁺ species, it depends on both temperature and P⁺ dose. The relatively small amount of diffusion associated with As⁺ implants is favorable for shallow-junction formation with spike annealing.     

High-power 1320-nm wafer-bonded VCSELs with tunnel junctions

A new long-wavelength vertical-cavity surface-emitting laser structure is described that utilizes AlGaAs-GaAs mirrors bonded to AlInGaAs-InP quantum wells with an intracavity buried tunnel junction. This structure offers complete wavelength flexibility in the 1250-1650 nm fiber communication bands and reduces the high free-carrier losses and bonded junction voltage drops in previous devices. The intracavity contacts electrically bypass the bonded junctions to reduce threshold voltage. N-type current spreading layers and undoped AlGaAs mirrors minimize optical losses. This has enabled 134/spl deg/C maximum continuous-wave lasing temperature, 2-mW room-temperature continuous-wave single-mode power, and 1-mW single-mode power at 80/spl deg/C, in various devices in the 1310-1340 nm wavelength range.     

A Bluetooth Based Sensor Network for Civil Infrastructure Health Monitoring

Communicating with sensors has long been limited either to wired connections or to proprietary wireless communication protocols. Using a ubiquitous and inexpensive wireless communication technology to create Sensor Area Networks (SANs) will accelerate the extensive deployment of sensor technology. Bluetooth, an emerging, worldwide standard for inexpensive, local wireless communication is a viable choice for SANs because of its inherent support for some of the important requirements – low power, small form factor, low cost and sufficient communication range. In this paper we outline an approach, centered on the Bluetooth technology, to support a sensor network composed of fixed wireless sensors for health monitoring of highways, bridges and other civil infrastructures. We present a topology formation scheme that not only takes into account the traffic generated by different sensors but also the associated link strengths, buffer capacities and energy availability. The algorithm makes no particular assumptions as to the placement of nodes, and not all nodes need to be in radio proximity of each other. The output is a tree shaped scatternet rooted at the sensor hub (data logger) that is balanced in terms of traffic carried on each of the links. We also analyze the scheduling, routing and healing aspects of the resulting sensor-net topology.     

Curvelet Transform Based Watermarking for Telemedicine

Now a days telemedicine is a proactive research area and gaining more engrossment. Digital transmission of medical imaging, remote evaluation and diagnosis together are termed as Telemedcine and it has increasingly gained prominence in the recent times. Remote specialist reckons intemperately on scan images or medicinal images and data of patient for devising diagnostic conclusion. While imparting a scan image (clinical picture) to remote authority, the significant part (ROI) in it may be altered by interlopers. The remote authority must recover the ROI in a clinical picture on the off chance that it has been altered. This paper presents a novel robust watermarking method founded on Curvelet Transform to recover the ROI in medical image in case it is altered. The proposed method hides ROI information inside diagnostically insignificant part in medical image through Curvelet Transform. Experiments carried out using this novel technique have proven that the ROI in medical image is restored to its original state.

     

Temperature dependence of the relaxation resonance frequency of long-wavelength vertical-cavity lasers

The temperature dependence of the differential gain in AlInGaAs 1310-nm vertical-cavity lasers is investigated. The variations in differential gain and in relaxation resonance frequency are shown to depend on the room-temperature offset between the gain peak wavelength and the wavelength of the lasing mode. The tradeoff between high modulation bandwidth and good high-temperature performance for vertical-cavity lasers is analyzed. A cavity mode that is red-shifted about 25 nm from the gain peak is shown to minimize the variation in modulation bandwidth with temperature, and simultaneously allow for satisfactory high-temperature operation. Experimental results are presented and compared to calculated results with excellent agreement. Because of the change in gain-mode offset with internal temperature, the measured modulation current efficiency changed from about 2 to 4.8 GHz/mA/sup 1/2/ for an increase in drive current from 2 to 10 mA.     

Distributed Dynamic Backhauling in Aerial Heterogeneous Networks

Wireless Personal Communications - A Wireless Mesh Network (WMN) is a multi-hop network that gains the benefits of low deployment cost, fast access speed, expanded service coverage and large...     

Integrated Routing Algorithms for Provisioning “Sub-Wavelength” Connections in IP-Over-WDM Networks

This work focuses on developing and implementing comprehensive unified constraint-based routing algorithms within the generalized multi-protocol label switching framework (GMPLS) to provision sub-wavelength circuits (low-rate traffic streams). Constraint-based routing is further augmented in this work by dynamically routing both an active and another alternate link/node-disjoint backup path at the same time in order to provision a given connection request. This new integrated approach combines both IP routing and optical resource allocation to setup end-to-end connections.     

SOAR: Simple Opportunistic Adaptive Routing Protocol for Wireless Mesh Networks

Multihop wireless mesh networks are becoming a new attractive communication paradigm owing to their low cost and ease of deployment. Routing protocols are critical to the performance and reliability of wireless mesh networks. Traditional routing protocols send traffic along predetermined paths and face difficulties in coping with unreliable and unpredictable wireless medium. In this paper, we propose a Simple Opportunistic Adaptive Routing protocol (SOAR) to explicitly support multiple simultaneous flows in wireless mesh networks. SOAR incorporates the following four major components to achieve high throughput and fairness: 1) adaptive forwarding path selection to leverage path diversity while minimizing duplicate transmissions, 2) priority timer-based forwarding to let only the best forwarding node forward the packet, 3) local loss recovery to efficiently detect and retransmit lost packets, and 4) adaptive rate control to determine an appropriate sending rate according to the current network conditions. We implement SOAR in both NS-2 simulation and an 18-node wireless mesh testbed. Our extensive evaluation shows that SOAR significantly outperforms traditional routing and a seminal opportunistic routing protocol, ExOR, under a wide range of scenarios.