Alteration of internal stresses in SiO2/Cu/TiN thin films by X-ray and synchrotron radiation due to heat treatment

A break of wiring by stress-migration becomes a problem with an integrated circuit such as LSI. The present study investigates residual stress in SiO₂/Cu/TiN film deposited on glass substrates. A TiN layer, as an undercoat, was first deposited on the substrate by arc ion plating and then Cu and SiO₂ layers were deposited by plasma coating. The crystal structure and the residual stress in the deposited multi-layer film were investigated using in-lab. X-ray equipment and a synchrotron radiation device that emits ultra-high-intensity X-rays. It was found that the SiO₂ film was amorphous and both the Cu and TiN films had a strong {1 1 1} orientation. The Cu and TiN layers in the multi thick (Cu and TiN:1.0 μm)-layer film and multi thin (0.1 μm)-layer film exhibited tensile residual stresses. Both tensile residual stresses in the multi thin-layer film are larger than the multi thick-layer film. After annealing at 400 °C, these tensile residual stresses in both the films increased with increasing the annealing temperature. Surface swelling formations, such as bubbles were observed in the multi thick-layer film. However, in the case of the multi thin-layer films, there was no change in the surface morphology following heat-treatment.     

Dependence of self-heating effects on operation conditions and device structures for polycrystalline silicon TFTs

Self-heating, a degradation mechanism of n-channel poly-Si thin-film transistors (TFTs) due to bias stress, has been investigated. The aim of this work is to study this effect in depth to be able to propose a device structure designed to reduce it. The variation of the threshold voltage (V/sub t/) shift with the stress-pulsewidth is related to the temperature rise due to the self-heating effect that depends on the stress-pulsewidth. Electron trapping in the oxide caused by the bias stress is considered to be enhanced by the TFT temperature rise owing to the self-heating. We show that copper-film-based TFTs, which have a substrate made of an extremely thin glass layer and a copper film exhibit much reduced self-heating and thus a decrease of V/sub t/ shift caused by the bias stress. These observations are interpreted using numerical simulations to estimate the temperature rise in the poly-Si channel region due to Joule heating.     

Role of number of consecutive voltage zero-crossings in propagation of water trees in polyethylene

Effects of superposition of a low-frequency (0.1 to 50 Hz) voltage and a high-frequency 2 kHz voltage on the growth of water trees in polyethylene are examined. It has become clear that both the number of total voltage zero-crossings during the whole voltage application period and the number of consecutive voltage zero-crossings in the instant of the polarity reversal of the low-frequency voltage play important roles in the length and shape of water trees. Namely, the water tree length becomes longer as the number of total zero-crossings increases. Furthermore, among the voltages with the same number of total zero-crossings, the length becomes even longer with a prolonged shape in the direction of electric field as the number of consecutive zero-crossings increases. Effects of superposition of a high-frequency voltage onto a dc voltage are also examined. In this case, the dc voltage seems not to have any influence to the tree growth. By assuming the presence of space charge around the water-tree tip, the effective zero-crossings become only sensitive to the high-frequency component. Therefore, this result also indicates that the number of voltage reversals at the tree tip plays a crucial role in the growth of water trees.     

Mass recovery adsorption refrigeration cycle—improving cooling capacity

The study investigates the performance of two-bed, silica gel-water adsorption refrigeration cycle with mass recovery process. The cycle with mass recovery can be driven by the relatively low temperature heat source. In an adsorption refrigeration cycle, the pressures in adsorber and desorber are different. The chiller with mass recovery process utilizes the pressure difference to enhance the refrigerant mass circulation. Cooling capacity and coefficient of performance (COP) were calculated by cycle simulation computer program to analyze the influences of operating conditions. The mass recovery cycle was compared with conventional cycle such as the single stage adsorption cycle in terms of cooling capacity and COP. The results show that the cooling capacity of mass recovery cycle is superior to that of conventional cycle and the mass recovery process is more effective for low regenerating temperature.     

Frequency characteristics of stiffness and damping effect of ferro fluid bearing

Damping characteristics and frequency characteristics of ferro fluid bearing (FFB) spindles were measured using a high-frequency vibration base driven by a piezo actuator. Using the high-frequency vibration base, high-frequency excitation was added to ferro fluid bearing spindles mounted on the vibration base, and it was proved that ferro fluid bearing spindles have effective damping. And the damping effect became larger with higher spindle rotational speed. Also we have measured spindle runout of a ferro fluid bearing spindle using a lock-in amplifier to increase S/N ratio and succeeded to measure nano meter order displacements.     

Phase transformation and interface segregation behavior in Si3N4 ceramics sintered with La2O3–Lu2O3 mixed additive

Microstructure and mechanical property of silicon nitride (Si₃N₄) ceramic are strongly dependent on the selection of sintering additives. When rare‐earth (RE) oxide is used as the sintering additive, segregation of RE ions at interface between Si₃N₄ grain and intergranular glassy film (IGF) is believed to play a critical role. Although the ionic radius of RE ion is known to be an empirical parameter to modify the mechanical property, the correlation between the segregated ions and their ionic radii is still under controversy. In order to address this issue, (i) rate of α‐β phase transformation and (ii) segregation behavior at the interface were studied for Si₃N₄ ceramics sintered using mixture of La₂O₃ and Lu₂O₃ as additives in this study. Specimens of Lu content 30% and higher exhibited lower activation energies for the α‐β phase transformation as compared with those of Lu content 20% and lower. In terms of the segregation behavior, La was preferably segregated at one site and Lu at the other site along β‐Si₃N₄/IGF interface in the specimens of Lu content 30% and higher. It is understood from these results that Lu segregation site should be more closely related with grain growth.     

Towards the improvement of thermal efficiency in lignite‐fired power generation: Concerning the utilization of Polish lignite deposits in state‐of‐the‐art IGCC technology

Integrated coal Gasification Combined Cycle (IGCC) is the most advanced technology for coal‐fired power generation. The two‐stage entrained flow gasification process allows for the use of a wide range of coal, as long as the gasification temperature is above the ash melting point of a used fuel. In this gasification technology, lignite, which often has a low ash melting point, can be preferably utilized. However, ash fluidity is also another importance, because the behaviour of molten slag can diminish a stable ash discharge from a gasifier. As the eligibility of coal ash properties is a considerable factor, water physically and chemically kept in lignite (30 – 60% in mass) attributes to deteriorating gasification efficiency, because it causes significant heat loss and increasing oxygen consumption. Developing a thermal evaporative lignite drying method will be a necessary attempt to apply lignite to the coal gasification process. For those preceded objectives, coal and ash properties and drying characteristics of several grades of Polish lignite, extracted from Belchatow and Turow deposits, have been experimentally investigated in a preliminary study evaluating the applicability and consideration for its utilization in state‐of‐the‐art clean coal technology, IGCC. This paper particularly discusses the eligibility of Polish lignite from the perspective of the fusibility and fluidity of ash melts and the fundamental drying kinetics of lignite in superheated steam in the light of water removal. The viscosity of ash melts is measured at high temperature up to 1700 °C. In the drying tests, the significant influence of structural issues, because of the provenance and origin of lignite on the drying characteristics, was found by applying the method of sensitivity analysis of physical propensity. This paper concludes that the investigated Polish lignite has characteristics favourable for utilization in IGCC technology, once the precautions related to its high moisture have been carefully addressed. Copyright © 2016 John Wiley & Sons, Ltd.