Application of an electron backscatter diffraction pattern to Cu damascene-fabricated interconnections filled by a high-pressure anneal process

The microstructure of Cu interconnections fabricated by high-pressure annealing was evaluated using a field emission scanning electron microscope/electron backscatter diffraction pattern (FE-SEM/EBSP) technique, and the results are compared with as-deposited and normally annealed Cu films. The results show some grains extending from the bulk field to the via regions in the case of the high-pressure annealed Cu films. The existence of via holes was also observed, in which all grains were (111) oriented. This indicates that the high-pressure annealing process enables the Cu that in-fills the via holes to develop into favorable microstructures, i.e., single-crystal and with (111) orientation.     

Probabilistic fault grading based on activation checking and observability analysis

A simplified probabilistic fault grading method is described. The concept of propagation probability is introduced in place of the sensitization probability of STAFAN, and the empirical parameters of STAFAN are eliminated. The division of input vectors into subsets is monitored by the activation or toggle rate. The accuracy of the method is examined for fault coverage estimation and for predicting the undetected faults.     

High-Density Frenkel Defects as Origin of N-Type Thermoelectric Performance and Low Thermal Conductivity in Mg3Sb2-Based Materials

Mg₃Sb₂-based intermetallic compounds with exceptionally high thermoelectric performance exhibit unconventional n-type dopability and anomalously low thermal conductivity, attracting much attention to the underlying mechanisms. To date, investigations have been limited to first-principle calculations and thermodynamic analysis of defect formation, and detailed experimental analysis on crystal structure and phonon modes has not been achieved. Here, a synchrotron X-ray diffraction study clarifies that, against a previous view of a simple crystal structure with a small unit cell, Mg₃Sb₂ is inherently a heavily disordered material with Frenkel defects, charge-neutral defect complexes of cation vacancies and interstitials. Ionic charge neutrality preserved in Mg₃Sb₂ is responsible for exotic n-type dopability, which is unachievable for other Zintl phase materials. The thermal conductivity of Mg₃Sb₂ exhibits deviation from the standard T⁻¹ temperature dependency with strongly limited phonon transport due to a strain field. Inelastic X-ray scattering measurement reveals enhanced phonon scattering induced by disorder. The results will draw renewed attention to crystal defects and disorder as means to explore new high-performance thermoelectric materials.     

In situ high-resolution transmission electron microscopy of photocatalytic reactions by excited electrons in ionic liquid

A transmission electron microscope (TEM) sample for observing photocatalysis in a liquid was prepared by using N,N,N-trimetyl-N-propylammonium-bis(trifluoromethanesulfonyl)imide. The ionic liquid (IL) was used as a reaction solvent. Tetrachloroauric acid was dissolved in the IL as gold ion species. Rutile particles were added in the solution as a photocatalyst. The low vapor pressure of the IL enables a diffusing system in high vacuum of TEM. Rutile particles were UV irradiated in that liquid phase. After 3 h UV irradiation, a gold particle of 8 nm diameter was grown on the TiO2 surface. Photonucleation of Au/TiO2 system was discussed from the high-resolution TEM images.     

Colored Fluorescent Silk Made by Transgenic Silkworms

Silk is a protein fiber used to weave fabrics and as a biomaterial in medical applications. Recently, genetically modified silks have been produced from transgenic silkworms. In the present study, transgenic silkworms for the mass production of three colors of fluorescent silks, (green, red, and orange) are generated using a vector originating from the fibroin H chain gene and a classical breeding method. The suitability of the recombinant silks for making fabrics is investigated by harvesting large amounts of the cocoons, obtained from rearing over 20 thousand silkworms. The application of low temperature and a weakly alkaline solution for cooking and reeling enables the production of silk fiber without loss of color. The maximum strain tolerated and Young's modulus of the fluorescent silks are similar to those of ordinary silk, although the maximum stress value of the recombinant silk is slightly lower than that of the control. Fabrics with fluorescent color are demonstrated using the recombinant silk, with the color persisting for over two years. The results indicate that large amounts of genetically modified silk can be made by transgenic silkworms, and the silk is applicable as functional silk fiber for making fabrics and for use in medical applications.     

Characteristics of ions impacting grid surfaces in an ion engine

Numerical evaluations of grid erosions in ion engines are required to estimate the lifetimes of long-term space missions. In this study, to investigate the characteristics of ions colliding with neutrals and impacting the accel grid surface, including ions that collide with neutrals more than once, three-dimensional particle analyses using a full-PIC (Particle in Cell) code were performed. The distributions of erosion by charge-exchanged ions show periodic patterns. The multiple-collided ion constitutes 7 and 8% of the accel grid current to the inner and downstream surfaces, respectively. The energy of the multiple-collided ion impacting the downstream surface has a broader distribution than that of the charge-exchanged ion. These results suggest the importance of investigating multiple-collided ions in high-accuracy quantitative evaluations of grid erosion.     

Novel functional polymers: Poly(dimethylsiloxane)–polyamide multiblock copolymer. III. Synthesis and surface properties of disiloxane–aromatic polyamide multiblock copolymer

Disiloxane–aromatic polyamide(aramid) multiblock copolymers(2SiPASs) were synthesized using 1,3-bis(3-aminopropyl)-1,1,3,3-tetramethyldisiloxane(BATS) as an analog of aramidsilicone resin consisting of aromatic polyamide and poly(dimethylsiloxane) (PDMS). 2SiPASs afford a transparent and toughened plastic film. The surface properties of 2SiPAS were investigated by X-ray photoelectron spectroscopy (xps) and static contact angle measurement. The results of surface analysis suggested that BATS content of the 2SiPAS surface increased with increasing BATS content in bulk. The interaction between the platelets and the 2SiPAS surface was found to be very weak when the BATS content reached 26 wt % in bulk. © 1996 John Wiley & Sons, Inc.     

Selective permeation of sour gases through polymeric membranes modified by sulfolanes. I. Study of selective permeation of CO2 through modified polymeric membranes determined on different systems

Several sulfolanes such as 3-methylsulfolane, sulfolane, and 3-sulfolene were tested as modifiers in poly(trimethylsilyl methyl methacrylate) (PTMSMMA) and poly(trimethylsilyl propyne) (PMSP) to improve the selectivity of CO₂. The gas permeabilities for the PTMSMMA-blend membranes containing high 3-methylsulfolane content were determined on a nonvacuum system in which the membranes started to be measured at their steady states at 30°C; those for all the other membranes were determined in a vacuum system in which those membranes were measured after they reached their unsteady states at 30°C. The PTMSMMA-blend membrane containing 40% 3-methylsulfolane was found to give the best separation of CO₂ under the conditions in this study compared to all the PTMSMMA-blend membranes and the others prepared in our work; its ideal separation factors for CO₂ over N₂ were above 40 and its permeability coefficients of CO₂ increased to above 250 Barrer. The modifications of PMSP membranes by impregnating with sulfolane and blending with sulfolene were found to be effective in improving the selectivity for CO₂ over N₂ for the PMSP membrane. The ideal separation factors for CO₂ over N₂ for the modified PMSP membranes impregnated with 30% sulfolane and blended with 25% 3-sulfolene were improved to above 10 and 13, respectively. © 1996 John Wiley & Sons, Inc.     

Water permeation properties of SiO2-RSiO3/2 (R = methyl,vinyl, phenyl) thin films prepared by the sol-gel method on nylon-6 substrate

Nylon-6 substrates were coated with SiO₂-RSiO_3/2 (R = methyl, vinyl, phenyl) thin films by the sol-gel method, and their water permeability was evaluated Tetraethoxysilane (TEOS) and trifunctional alkoxides such as methyltriethoxysilane (MTES), vinyltriethoxysilane (VTES), and phenyltriethoxysilane (PhTES) were used as starting materials. Water permeability coefficients of the nylon-6 substrates coated with these SiO₂-RSiO_3/2 thin films were increased with an increase in the content of these trialkoxysilanes in the films. The water permeability coefficients of these coated nylon-6 substrates were smaller in the order of the systems TEOS-PhTES < TEOS-VTES < TEOS-MTES in the relatively low content of the trialkoxysilanes. © 1996 John Wiley & Sons, Inc.     

Structural and Functional Change in Albino Rat Retina Induced by Various Visible Light Wavelengths

The effects of visible light, from short to long wavelengths, on the retina were investigated functionally and histologically. The left eyes of Sprague–Dawley albino rats (6-weeks old, n = 6 for each wavelength) were exposed to seven narrow-band wavelengths (central wavelengths, 421, 441, 459, 501, 541, 581, and 615 nm) with bandwidths of 16 to 29 nm (half bandwidth, ±8–14.5 nm) using a xenon lamp source with bandpass filters at the retinal radiant exposures of 340 and 680 J/cm². The right unexposed eyes served as controls. Seven days after exposure, flash electroretinograms (ERGs) were recorded, and the outer nuclear layer (ONL) thickness was measured. Compared to the unexposed eyes, significant reductions in the a- and b-wave ERG amplitudes were seen in eyes exposed to 460-nm or shorter wavelengths of light. The ONL thickness near the optic nerve head also tended to decrease with exposure to shorter wavelengths. The decreased ERG amplitudes and ONL thicknesses were most prominent in eyes exposed to 420-nm light at both radiant exposures. When the wavelengths were the same, the higher the amount of radiant exposure and the stronger the damage. Compared to the unexposed eyes, the a- and b-waves did not decrease significantly in eyes exposed to 500-nm or longer wavelength light. The results indicate that the retinal damage induced by visible light observed in albino rats depends on the wavelength and energy level of the exposed light.