Systematic characterization of Cl2 reactive ion etchingfor improved ohmics in AlGaN/GaN HEMTs

Pre-metal-deposition reactive ion etching (RIE) was performed on an Al_0.3Ga_0.7N/AlN/GaN heterostructure in order to improve the metal-to-semiconductor contact resistance. An optimum AlGaN thickness for minimizing contact resistance was determined. An initial decrease in contact resistance with etching time was explained in terms of removal of an oxide surface layer and/or by an increase in tunnelling current with the decrease of the AlGaN thickness. The presence of a dissimilar surface layer was confirmed by an initial nonuniform etch depth rate. An increase in contact resistance for deeper etches was experienced. The increase was related to depletion of the two-dimensional (2-D) electron gas (2-DEG) under the ohmics. Etch depths were measured by atomic force microscopy (AFM). The contact resistance decreased from about 0.45 Ωmm for unetched ohmics to a minimum of 0.27 Ωmm for 70 Å etched ohmics. The initial thickness of the AlGaN layer was 250 Å. The decrease in contact resistance, without excessive complications on device processing, supports RIE etching as a viable solution to improve ohmic contact resistance in AlGaN/GaN HEMTs     

Measurement of the delayed-neutron yields in the fission of233U,236U,237Np,240Pu,and241Pu by neutrons from the spectrum of a fast reactor

Translated from Atomnaya Énergiya, Vol. 66, No. 2, pp. 100–103, February, 1989.     

Dosimetric characteristic of VVR-M reactor with respect to tritium

Translated from Atomnaya Énergiya, Vol. 67, No. 2, pp. 111–113, August, 1989.     

Some Regularities of Heat and Mass Transfer in the Case of Fire Within a Building

Results of a numerical investigation of heat and mass transfer at the initial stage of fire within a building in combustion of kerosene, carried out with the use of a three-dimensional mathematical field model, are presented. A comparison of the distribution of the averaged temperatures and velocities along the vertical axis of the convective column and of the mass rates of gas flows through an open opening with the experimental data has been made. Substantial three-dimensional inhomogeneities of the velocities and the temperatures in the near-ceiling layer have been revealed. It has been established that near the opening there is a critical separation zone which influences significantly the parameters of natural gas transfer.     

Adaptive Optimal Nonlinear Filtration and Certain Related Topics. II

The properties of the solutions of optimal parametric filtration equations and an adaptive variant of the problem with regard for time-drift of the unknown parameters of the system are studied. Along with the Kalman interpretation of the optimal adaptive nonlinear filter, the Bayes approach to applying the respective a posteriori densities is also studied.