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11.
A jet-printed digital-lithographic method, in place of conventional photolithography, was used to fabricate 64 /spl times/ 64 pixel (300 /spl mu/m pitch) matrix addressing thin-film transistor (TFT) arrays. The average hydrogenated amorphous silicon TFT device within an array had a threshold voltage of /spl sim/3.5 V, carrier mobility of 0.7 cm/sup 2//V/spl middot/s, subthreshold slope of 0.76 V/decade, and an on/off ratio of 10/sup 8/. 相似文献
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4G mobile communications: toward open wireless architecture 总被引:2,自引:0,他引:2
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Zhen-Qiu Lu Yan-Yun Zhang 《IEEE transactions on ultrasonics, ferroelectrics, and frequency control》1996,43(2):296-302
Reconstruction algorithms and their numerical examples of acoustical tomography based on the second-order Born transform perturbation approximation are presented. The reconstruction algorithms in the second-order Born approximation are similar in form to those in the first-order Born approximation. Replacing the angular spectrum of the scattered wave in the first-order case by the result of applying a first-order operator to the angular spectrum of the scattered wave or applying a second-order operator to the angular spectrum of the incident wave leads to the second-order reconstruction algorithms. Also, comparisons of reconstruction algorithms of the first- and second-order Born approximations are given, and they show that the second-order Born approximation algorithms have a distinct advantage over the first-order approximations in many cases 相似文献
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The effect of the atomic mobility on a film surface has been studied by using a three-dimensional atomistic thin-film deposition model which simulates three-dimensional thin-film images, surface profiles and cross-sectional area pictures. In addition, quantitative results of surface RMS roughness, average film thickness, atomic coordination number and its distribution, and solid fraction of the deposited thin films, were obtained from the simulations. When the film surface mobility increased from 0.3 to 3.0, RMS roughness decreased from 6.5 to 1.1, solid fraction increased from 0.27 to 0.56 and average film thickness decreased from 40 to 28, due to the reduction of the voids within the film. The full-width half magnitude of the atomic coordination distribution became narrower indicating the increased degree of crystallization. With increase in surface mobility crossing the boundary to 1.5, the film evolved from a porous or loose columnar structure with voids, to a densely packed fibrous grain structure which can be categorized by the zone structure models. 相似文献
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Lada E.K. Jye-Chyi Lu Wilson J.R. 《Semiconductor Manufacturing, IEEE Transactions on》2002,15(1):79-90
To detect faults in a time-dependent process, we apply a discrete wavelet transform (DWT) to several independently replicated data sets generated by that process. The DWT can capture irregular data patterns such as sharp "jumps" better than the Fourier transform and standard statistical procedures without adding much computational complexity. Our wavelet coefficient selection method effectively balances model parsimony against data reconstruction error. The few selected wavelet coefficients serve as the "reduced-size" data set to facilitate an efficient decision-making method in situations with potentially large-volume data sets. We develop a general procedure to detect process faults based on differences between the reduced-size data sets obtained from the nominal (in-control) process and from a new instance of the target process that must be tested for an out-of-control condition. The distribution of the test statistic is constructed first using normal distribution theory and then with a new resampling procedure called "reversed jackknifing" that does not require any restrictive distributional assumptions. A Monte Carlo study demonstrates the effectiveness of these procedures. Our methods successfully detect process faults for quadrupole mass spectrometry samples collected from a rapid thermal chemical vapor deposition process 相似文献