Fabrication of piezoelectric multilayer thin-film actuators

In this study, we fabricated multilayer ceramics (MLCs) composed of multilayered Pb(Zr,Ti)O₃ (PZT) piezoelectric thin films with internal electrodes and evaluated their dielectric and piezoelectric properties. The stack of PZT ferroelectric layers (550 nm) and SrRuO₃ (SRO, 80 nm) electrodes were alternatively deposited on Pt/Ti-coated silicon-on-insulator substrates by radio-frequency magnetron sputtering. The MLCs composed of one, three, and five PZT layers were fabricated by the alternate sputtering deposition of PZT ferroelectric layers and SRO electrodes through the movable shadow mask. The capacitances of MLCs were proportionally increased with the number of PZT layers, while their relative dielectric constants were almost same among the each MLC. The MLCs exhibited symmetric and saturated P–E hysteresis loops similar to the conventional PZT thin films. We estimated that the piezoelectric properties of MLCs by FEM simulation, and confirmed that the effective transverse piezoelectric coefficients (d _31,eff ) increased with the number of PZT layers. The piezoelectric coefficients calculated to be d _31,eff  = ?2964 pC/N at 25 PZT layers, which is much higher than those of conventional single-layer piezoelectric thin films.     

Logic circuit synthesis using Prolog

This paper briefly reviews the current use of CAD in logic design, and then describes an expert system used to synthesize logic circuits. Specialized knowledge dealing with standard TTL ICs is written in Prolog and AGE, and the results are compared.     

MOSAIC for multiple-reward environments

Reinforcement learning (RL) can provide a basic framework for autonomous robots to learn to control and maximize future cumulative rewards in complex environments. To achieve high performance, RL controllers must consider the complex external dynamics for movements and task (reward function) and optimize control commands. For example, a robot playing tennis and squash needs to cope with the different dynamics of a tennis or squash racket and such dynamic environmental factors as the wind. In addition, this robot has to tailor its tactics simultaneously under the rules of either game. This double complexity of the external dynamics and reward function sometimes becomes more complex when both the multiple dynamics and multiple reward functions switch implicitly, as in the situation of a real (multi-agent) game of tennis where one player cannot observe the intention of her opponents or her partner. The robot must consider its opponent's and its partner's unobservable behavioral goals (reward function). In this article, we address how an RL agent should be designed to handle such double complexity of dynamics and reward. We have previously proposed modular selection and identification for control (MOSAIC) to cope with nonstationary dynamics where appropriate controllers are selected and learned among many candidates based on the error of its paired dynamics predictor: the forward model. Here we extend this framework for RL and propose MOSAIC-MR architecture. It resembles MOSAIC in spirit and selects and learns an appropriate RL controller based on the RL controller's TD error using the errors of the dynamics (the forward model) and the reward predictors. Furthermore, unlike other MOSAIC variants for RL, RL controllers are not a priori paired with the fixed predictors of dynamics and rewards. The simulation results demonstrate that MOSAIC-MR outperforms other counterparts because of this flexible association ability among RL controllers, forward models, and reward predictors.     

Helium gas permeability of montmorillonite/epoxy nanocomposites

Helium gas permeability of silicate clay (montmorillonite) particles/epoxy nanocomposites was examined. The incorporation of increasing amounts of montmorillonite particles reduced the helium gas permeability. Based on Fick’s law, gas permeation behavior of the nanocomposite was evaluated. With the increase of montmorillonite loading, gas diffusivity decreased, while gas solubility increased. Helium diffusion behavior is in agreement to the numerical results based on the Hatta–Taya–Eshelby theory. It has been revealed that dispersion of nanoscale platelets in polymer is effective in improving gas barrier property.     

Grain refinement and superplasticity in a magnesium alloy processed by equal-channel angular pressing

The extrusion/equal channel angular pressing (EX-ECAP) processing procedure, in which magnesium-based alloys are subjected to extrusion followed by ECAP, was applied to a Mg-7.5 pct Al-0.2 pct Zr alloy prepared by casting. Microstructural inspection showed the EX-ECAP process was effective in reducing the grain size from ∼21 μm after extrusion to an as-pressed grain size of ∼0.8 μm. It is shown through static annealing that these ultrafine grains are reasonably stable up to 473 K, but grain growth occurs at higher temperatures. Tensile specimens were cut from the billets prepared by EX-ECAP and testing showed these specimens exhibited superplasticity at relatively low temperatures with maximum elongations up to >700 pct. By processing through EX-ECAP to a higher imposed strain and thereby increasing the area fraction of high-angle boundaries, it is demonstrated that there is a potential for achieving high-strain-rate superplasticity. This article is based on a presentation made at the Symposium entitled “Phase Transformations and Deformation in Magnesium Alloys,” which occurred during the Spring TMS meeting, March 14–18, 2004, in Charlotte, NC, under the auspices of the ASM-MSCTS Phase Transformations Committee.     

Achieving enhanced ductility in a dilute magnesium alloy through severe plastic deformation

Experiments were conducted to evaluate the utility of a new processing procedure developed for Mg-based alloys in which samples are subjected to a two-step processing route of extrusion followed by equal-channel angular pressing (designated as EX-ECAP). The experiments were conducted using a Mg-0.6 wt pct Zr alloy and, for comparison purposes, samples of pure Mg. It is shown that the potential for successfully using ECAP increases in both materials when adopting the EX-ECAP procedure. For the Mg-Zr alloy, the use of EX-ECAP produces a grain size of ∼1.4 μm when the pressing is undertaken at 573 K. By contrast, using EX-ECAP with pure Mg at 573 K produces a grain size of ∼26 μm. Tensile testing of the Mg-Zr alloy at 523 and 573 K after processing by EX-ECAP revealed the occurrence of significantly enhanced ductilities with maximum elongations of ∼300 to 400 pct.     

Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching

Nanoimprint lithography has two basic steps. The first is the imprint step in which a mold with nanostructures on its surface is pressed into a resin film on a substrate, followed by removal of the mold. The second step is the residual layer removal by a reactive ion etching (RIE). There is no report whether the properties of the imprinted structure after RIE change or not. In this work, the authors evaluated the Young’s modulus of the imprinted pillar after residual layer removal by RIE. In this experiment, hydrogen silsesquioxane (HSQ), a type of spin-on-glass, was used as an imprint material. The residual layer was etched by RIE using CHF₃ gas. The Young’s modulus of imprinted pillar after RIE was measured via cantilever method. The Young’s modulus of HSQ pillar after RIE was twice as much as that of HSQ pillar before RIE. From the Fourier transform infrared measurement, it was founds the chemical structure of HSQ was changed by forming network structure due to heating by RIE plasma energy. These results indicate that the mechanical property of imprinted structure was changed in the residual layer removal step by using RIE.