Evaluation of Stress and Crystal Quality in Si During Shallow Trench Isolation by UV-Raman Spectroscopy

Defects and stress gradually accumulate throughout various Si large-scale integration fabrication processes. It is essential to monitor defects and stress carefully to suppress their unintentional introduction. In this study, we measured the stress and crystal quality in shallow trench isolation (STI) samples by ultraviolet (UV)-Raman spectroscopy with an extremely high-resolution wavenumber to evaluate the effect of post-annealing on the recovery of Si crystals. The variations of crystal quality in 200-mm wafers with STI structures gradually decreased after post-annealing for 4 h, 6 h, and 8 h; however, there was no substantial difference in the values of full-width at half-maximum of the Raman spectra. Precise measurements of variations of stress and crystal quality were successfully performed by UV-Raman spectroscopy with a high-resolution wavenumber, which enabled us to evaluate the STI process accurately.     

Small-signal analysis of semiconductor lasers modulated atfrequencies on the order of the beat frequency

A small-signal analysis of direct modulation of laser diodes is presented. The analysis is valid over a wide frequency range, up to the frequency corresponding to the round trip time of the active region. This theory is best for laser diodes with small active regions but with large and complicated optical cavities. Optical resonances may occur in this range, resulting in a large response to direct modulation as a result of interaction of the lasing mode with the optical resonance. This theory can predict the linear response of the laser to direct modulation throughout this frequency range. It also predicts the lower frequency relaxation oscillation effect, thus unifying these different effects with a single treatment. The form of the modulation response is found to be the same as the standard relaxation oscillation formula, modified by a factor the form of which depends on the optics of the laser cavity alone     

Determination of power reflectivity of quasi-graded distributedBragg reflectors using stopband width

The authors examine the reflectivity of the quasi-graded distributed Bragg reflector using the stopband width. The stopband width of about 1000 Å for a reflectivity of about 99% is able to be measured with an accuracy of ± 1 Å. Thus, the reflectivity is determined with high accuracy from the stopband width. It is found that the quasi-graded distributed Bragg reflector is a high-quality reflector with high reflectivity and low resistance     

Relationship between dipole parameter estimation errors andmeasurement conditions in magnetoencephalography

In this study, a model in a computer simulation uses a single current dipole in a spherical homogeneous medium. Dipole parameters are estimated using a moving dipole procedure. Signal-to-noise ratio (SNR) is defined as the square-root of the ratio of the average signal power to the average noise power over all measurement points. At SNR>20, accurate estimation can be carried out independently of dipole depth and coil size. At SNR<20, dipole depth influences estimation error. When the dipole is located near the center of the sphere, the measurement region should include both extrema of the magnetic field to minimize estimation error. However, when the dipole is not so deep, the position of the measurement region does not influence estimation error. When SNR<4, estimation error increases as coil size increases. Coil size minimizing estimation error is determined by the ratio of environmental magnetic field noise to electrical noise. For a constant size of measurement region, increasing the number of measurement points decreases estimation error to a certain level. This error level depends on SNR     

Quantitative source identification of dioxin-like PCBs in Yokohama, Japan, by temperature dependence of their atmospheric concentrations

The source and environmental behavior of dioxin-like polychlorinated biphenyls (PCBs) together with other PCBs and polychlorinated dibenzo-p-dioxins and dibenzofurans (PCDDs/PCDFs) were evaluated based on analysis of variations in their atmospheric concentrations in Yokohama, Japan. Potential factors responsible for variations in the atmospheric concentrations of the congeners were investigated by principal component analysis and multiple regression analysis of the data. Two major variations were seen: one had strong temperature dependence, while the other had no significant temperature dependence. A possible explanation for this difference is that the former is related to congeners released by volatilization (e.g., volatilization from commercial PCB products and past polluted environments), while the latter is related to congeners emitted from thermal processes. The relative contributions of dioxin-like PCBs released by volatilization and those emitted from thermal processes were estimated based on the temperature dependence of the atmospheric concentrations. The results suggest that both dioxin-like PCBs emitted from thermal processes and those released by volatilization are significant sources of air pollution in this area in terms of the toxic equivalent (TEQ) for dioxin-like PCBs. We demonstrated that the present approach based on variations in atmospheric concentrations can be useful in providing a qualitative as well as quantitative understanding of source information.     

Passivation effects of deuterium exposure on boron-doped CVD homoepitaxial diamond

The deuterium (hydrogen) passivation effect on acceptors in boron-doped CVD homoepitaxial diamond was studied by electrical (Hall-effect) and secondary ion mass spectroscopy (SIMS) measurements. Deuterium was incorporated into the samples using microwave (MW) deuterium plasma at 673 K for 2–24 h. We observed the progress of acceptor passivation with p-type conduction, which finally resulted in a highly resistive state.     

Fabrication and Pore Size Control of Large-Pore Mesoporous Silica Particles through a Solvent Evaporation Process

Large-pore mesoporous silica particles were synthesized through a solvent evaporation process using hydrophobic fumed silica particles and tetraethyl orthosilicate (TEOS) as silica sources. The solvent evaporation of an ethanol solution of fumed silica particles, TEOS, HCl and triblock copolymer (F127) resulted in mesoporous silica particles with pores with sizes of about 7 nm. In addition, the interplanar spacing of the mesoporous silica particles can be controlled by changing the solvent evaporation temperatures.     

EXPERIMENTAL STUDIES ON A NOVEL CHEMICAL HEAT PUMP DRYER USING A GAS-SOLID REACTION

The authors have been studying Chemical Heat Pumps (CHP) from the viewpoints of energy saving and environmental impact. The CHP can store thermal energy in the form of chemical energy by an endothermic reaction, and release it at various temperature levels during heat demand periods by exo/endothermic reactions. The authors have proposed in an earlier study a novel chemical heat pump (CHP) system for environmentally-friendly effective utilization of thermal energy in drying as a chemical heat pump dryer (CHPD). In this exploratory study, we test the effectiveness of operating the proposed CHPDs experimentally. Basic experiments on the CHPDs such as hot dry air production for convective drying are performed on lab-scale CHPD apparatuses using gas-solid reactions in calcium oxide/calcium hydroxide reactant beds. The proposed CHPDs are found to produce hot air by CHP operation for drying. The temperature levels of the produced hot air and the reaction rates/conversions are as good as in the case of hot water supply system using basically same CHP operation. The cold heat for air dehumidification is also found to be generated/recovered by the same CHPD system. The generated heat amounts can be increased by changing the operating conditions although the heat recovery must be enhanced for practical application of CHPDs.     

Thermal Decomposition of Titanium Alkoxide and Silicate Ester in Organic Solvent: A New Method for Synthesizing Large-Surface-Area, Silica-Modified Titanium(IV) Oxide of High Thermal Stability

Silica-modified titanium oxide (S-TiO₂) powders that have an anatase structure were synthesized via the thermal decomposition of mixtures of titanium(IV) isopropoxide (TIP) and tetramethyl orthosilicate (TMOS) in toluene at 300°C. These S-TiO₂ materials had high rutile-transformation temperatures and maintained large surface areas at elevated temperatures (550°–1000°C). For example, the product that was prepared from a 9:1 TIP:TMOS mixture transformed to rutile at ∼1100°C and possessed a surface area of 160 m²/g, even after calcination at 800°C for 1 h.     

Surface-collection efficiency of Nuclepore filters for nanoparticles

The flat surface of Nuclepore filters is suitable for observing collected particles with a scanning electron microscope (SEM). However, experimental data on surface-collection efficiency are limited because surface-collection efficiencies cannot be measured directly using aerosol measuring instruments. In this study, the surface-collection efficiencies of Nuclepore filters were determined by establishing the ratio of the number of particles deposited on the surface of the filter visually counted with an SEM to the number of inflow particles counted by a condensation particle counter, using monodispersed polystyrene latex particles (30–800 nm) and silver particles (15–30 nm). Because Nuclepore filters with smaller pore sizes would be expected to produce higher minimum surface-collection efficiency and a higher pressure-drop, 0.08 and 0.2 µm Nuclepore filters were chosen as the test filters in view of both collection efficiency and pressure drop. The results showed that the minimum surface-collection efficiencies of the 0.08 µm pores at face velocities of 1.9 and 8.4 cm·s^?1 were approximately 0.6 and 0.7, respectively, and those of the 0.2 µm pores at face velocities of 1.5 and 8.6 cm·s^?1 were approximately 0.8 and 0.6, respectively. Because the pressure drop of the 0.2 µm pore filter was lower than that of the 0.08 µm pore filter under the same flow-rate conditions, the 0.2 µm pore filter would be more suitable considering the pressure drop and collection efficiency. The obtained surface collection efficiencies were quantitatively inconsistent with theoretical surface-collection efficiencies calculated using conventional theoretical models developed to determine the collection efficiency of filters with larger pores.

© 2016 American Association for Aerosol Research