Suppression of boron penetration in p+ polysilicon gateP-MOSFETs using low-temperature gate-oxide N2O anneal

It has been reported that high-temperature (~1100°C) N₂ O-annealed oxide can block boron penetration from poly-Si gates to the silicon substrate. However, this high-temperature step may be inappropriate for the low thermal budgets required of deep-submicron ULSI MOSFETs. Low-temperature (900~950°C) N₂O-annealed gate oxide is also a good barrier to boron penetration. For the first time, the change in channel doping profile due to compensation of arsenic and boron ionized impurities was resolved using MOS C-V measurement techniques. It was found that the higher the nitrogen concentration incorporated at Si/SiO₂ interface, the more effective is the suppression of boron penetration. The experimental results also suggest that, for 60~110 Å gate oxides, a certain amount of nitrogen (~2.2%) incorporated near the Si/SiO₂ interface is essential to effectively prevent boron diffusing into the underlying silicon substrate     

基于CAN总线的多点温湿度检测系统

本文介绍了基于CAN总线的多点温湿度检测系统的整体设计,详细介绍了各部分的组成.经过现场应用表明,设计合理,可靠性高.     

姬塬油田某井区油层特征分析及解释方法

G19井区为姬塬油田主力产建区域,其低阻油层成因复杂,类型多,近几年解释困难较多,解释符合率偏低。本文从该区低阻油层特征分析入手,总结出该区油藏特征规律,并归纳出适合该区的几种有效实用的测井解释方法。     

可编程控制器在捆扎机自动控制中的应用

介绍了一种用可编程控制器（PLC）实现捆扎机自动控制的设计方案，详细地介绍了设计过程，给出了完整的程序流程图和部分控制程序。     

Phase Transition VO2 Thin Films for Optical Switches

This paper presents a method to make vanadium dioxide (VO₂) crystallites on silicon substrates by reactive ion beam sputtering. The thickness of the thin film is about 100nm. The phase transition temperature of VO₂ is 65°C. The transmittance of the semiconducting phase VO₂ is about 50% and it is reduced to as low as 3% in metal phase at the infrared wavelenghth spectrum. The extinction ratio of the optical switches is 12dB. and the insertion loss is of 1-2dB. The switching time is about 1ms.     

钨钼活化烧结机理

主要介绍了添加少量Ｎｉ－Ｃｏ时钨，钼的低温烧结特性，对比了纯钨，Ｗ－Ｃｏ，Ｗ－Ｎｉ，Ｗ－Ｎｉ－Ｃｏ，纯钼，Ｍｏ－Ｃｏ，Ｍｏ－Ｎｉ，Ｍｏ－Ｎｉ－Ｃｏ烧结体系，测算了这些体系的烧结活化能，研究了其低温烧结机理，发现Ｎｉ－Ｃｏ对钨，钼的烧结具有最好的活化效果，说明镍与钴的共同加入对钨，钼的烧结具有协同活化作用。     

分流液压转向牵引计算的展开图及其应用

本文论及分流液压转向牵引计算的概念,方法及其展开图,并且提供了计算机绘制的展开图和应用实例。     

核医学成像技术中计算机的应用

由于计算机和核医学的结合,各种成像方法的计算机化医学图像层析技术正在迅速发展,并开始广泛应用。本文介绍各类成像技术中计算机的应用,特别评述其最近进展,并提出了今后的展望。