Economic analysis and optimization of tool portfolio in semiconductor manufacturing

The tool portfolio of a plant refers to the makeup, in quantity and type, of processing machines in the plant. It is determined by taking into consideration the future trends of process and machine technologies and the forecasts of product evolution and product demands. Portfolio planning is also a multicriteria decision-making task involving tradeoffs among, investment cost, throughput, cycle time, and risk. Tool portfolio planning is a complex task that has strong bearing on manufacturing efficiency. In the first part of this paper, a multicriteria economic decision model is presented for optimal configuration. of the portfolio and to determine the optimal factory loading. The second and third parts of the paper contain applications of the model. If plants are closely located or have a twin-plant design, portfolio planning at multiple plants can be integrated to enhance the overall effectiveness of portfolios. In the second part, a novel methodology for arbitrating capacity backup between plants is described. Because the economic model is constructed upon a valuation of both cycle time and throughput, it is a suitable method for the evaluation of cycle time reduction projects. The application procedure is outlined in the third part.     

STUDY ON RESIDUES OF ~（14）C－FENITROTHION IN MODEL RICE－FISH ECOSYSTEM AND FIELD RICE－FISH ECOSYSTEM

ＳＴＵＤＹＯＮＲＥＳＩＤＵＥＳＯＦ~（１４）Ｃ－ＦＥＮＩＴＲＯＴＨＩＯＮＩＮＭＯＤＥＬＲＩＣＥ－ＦＩＳＨＥＣＯＳＹＳＴＥＭＡＮＤＦＩＥＬＤＲＩＣＥ－ＦＩＳＨＥＣＯＳＹＳＴＥＭＺｈａｎｇＺｈｏｎｇｌｉａｎｇ（张仲良）；ＷａｎｇＨｕａｘｉｎ（王化新）；Ｇ?..     

用于重离子核反应实验测量的纵向电场气体电离室

本文报道了一种新型的大动态范围，多叠层探测器系统组件之一的纵向电场气体电离室的构造，性能和在中能得离子核反应实验中的应用。     

~（60）Co辐照对聚四氟乙烯表面润湿性的影响

研究了具有低表面能的氟聚合物聚四氟乙烯（ＰＴＦＥ），经６０Ｃｏγ射线辐照后表面状态的变化，以及其对液体介质蒸馏水的润湿性。较详细地论述了辐照后表面粗糙度、结晶度以及表面化学基因等不同因素对ＰＴＦＥ表面润湿性的影响。通过对ＰＴＦＥ及其表面的红外、Ｘ光衍射，表面粗糙度的分析，弄清了辐照后ＰＴＦＥ表面化学基团的改变对有机氟聚合物表加的润湿性影响很大，而粗糙度和结晶度的变化对润湿性影响较小。     

Enhancement of oxide break-up by implantation of fluorine inpoly-Si emitter contacted p+-n shallow junctionformation

In this study, it is demonstrated that the incorporation of fluorine can enhance poly-Si/Si interfacial oxide break-up in the poly-Si emitter contacted p⁺-n shallow junction formation. The annealing temperature for breaking up the poly-Si/Si interfacial oxide has been found to be as low as 900°C. As a result, the junction depth of the BF₂-implanted device is much larger than that of the boron-implanted device     

6M32(51)氮氢气压缩机系统的技术改造

1 机组简介 6M32(51)-190/320-BX型氮氢气压缩机的基础件采用德国博尔格公司的专有技术,具体参数如下: 压缩介质:氮氢气,压缩级数:6级;转速:375rpm;行程:320mm,轴功率:2920kW,容积流量:190m~3/min;气量调节:回路调节,冷却填料润滑油:1.95 kg/h;重量:主机69.45t,     

10Gbit/S以太网,RPR和MPLS协同工作:城域网的未来

随着数据业务的发展,目前在城域网领域出现了3种很有希望的新技术:MPLS(多协议标记交换)、10 Gbit/s以太网和弹性分组环(RPR).这三种技术都各自有着自己的特点和优点,然而仅仅采用某一项技术并不能解决网络中的全部问题,将这三种技术综合应用就成为一种必要,本文将简要分析这几种技术,及其它们综合起来协同工作的必要性和现实意义.     

Comparisons of PWM and one-cycle control for power amplifier with multilevel converter

Based on the concepts of cascade multilevel converters and one-cycle technique, comparisons are conducted to characterize the distortion of the pulsewidth modulation (PWM) and one-cycle control methods that were applied to converters. Simulation results for the different control schemes are obtained in PSIM software initially to see the effect of one-cycle control different from that of PWM control. Through the comparisons, the advantages and disadvantages are identified for each method. The one-cycle scheme is better than PWM control in reducing undesirable harmonics and tracing dynamic waveforms. Simulation and experimental results are also provided to verify the conclusions.