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Abstract RF magnetron sputtered Pb(Zrx, Ti1-x)O3 [PZT] films were prepared on IrO2/SiO2/Si and Pt/IrO2/SiO2/Si substrates using the ceramic PZT target with Pb1.1(Zr0.52Ti0.48)O3 composition. In order to obtain single perovskite phase, PZT film was sputtered at room temperature under Ar plasma and followed by high temperature annealing under oxygen atmosphere. In case of Pt/PZT/IrO2 capacitor, Δ P (=P*-P∧) was decreased with oxygen annealing temperature. However, it was increased in Pt/PZT/Pt/IrO2 capacitor. Leakage current density of Pt/PZT/Pt/IrO2 capacitor, which was used for improving leakage characteristics, was about 10-2A/cm?2 order lower than that of Pt/PZT/IrO2 capacitor. Leakage current density of Pt/PZT/Pt/IrO2 capacitor annealed at 700°C was 6.6x10-6A/cm2. From the fatigue test, Pt/PZT/IrO2 capacitor annealed at 650°C and Pt/PZT/Pt/IrO2 capacitor annealed at 700°C showed 3% and 12% degradation of Δ P after 5×1010 fatigue cycles, respectively. 相似文献
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Tseng B.H.J. You M.D. Hsin S.C. 《Device and Materials Reliability, IEEE Transactions on》2005,5(4):623-630
Advanced process technologies have been introducing many unseen problems on process yield and device reliability. Microcontamination, which enables defects causing electric faults, has also been hard to understand, detect, and control. In this paper, the requirements and methodologies for contamination control in advanced technologies such as at the 90-nm processing technology node and immersion lithography using 300-mm wafer processing were addressed. Combining techniques of vapor phase decomposition (VPD) and wafer outgassing system (WOS) for characterizing the very low levels of surface metallic and organic contaminants on 300-mm wafers makes a front-end process capable of realizing and deploying the necessary controls. Applying liquid chromatography-mass spectrometry (LC-MS) in the identification of contaminants of immersion fluids is a new experience for 193-nm lithography technology. Furthermore, the wafer-environment contamination controls, such as airborne molecular contaminants (AMCs), process critical material assurance and point-of-use quality are reviewed in the paper. This paper concludes by discussing the challenges for characterization and control of microcontamination in future manufacturing technologies. 相似文献
995.
Wei Zhang Q.M. Jonathan Wu Guanghui Wang Xinge You Yongfang Wang 《Journal of Visual Communication and Image Representation》2010,21(4):271-282
Affine-invariant region detection is the basic technique for visual matching and has been widely applied in many areas. In this paper, we propose a simple yet effective method to detect the affine-invariant regions from gray image, which is called enclosed region. The enclosed region is detected based on the observation that one physical object is enclosed by the same region before and after affine transformation. The proposed method is a three-step method. Firstly, we segment the initial regions by using thresholds on the image. Secondly, external enclosing region (EER) and internal enclosed region (IER) are defined for each initial region, and we select the enclosed regions from the initial regions through applying histogram constraints on EER and IER. Thirdly, the largely overlapping regions are removed. Experiments on typical images exhibit the robustness of the proposed enclosed region detector. Extensively quantitative evaluation and comparison demonstrate that the proposed method outperforms state-of-the-art methods. 相似文献
996.
鉴于大容量三相交流异步电机在进行变频-工频切换瞬间存在较大的电网冲击电流,提出一种基于电网电压矢量定向的同步切换控制策略,并采用电力电子开关与交流接触器并联的电路拓扑实现电机变频-工频的同步切换。该控制策略在电网电压同步坐标系下检测到变频器输出线电压空间矢量的相位为30°电角度时触发电力电子开关和交流接触器进行同步切换。实验结果表明该控制策略可精确捕获电机同步切换的最佳时刻实现零相位误差切换,电力电子开关可大幅缩短切换时间,提高了切换控制精度和系统对不同电机及负载的适应性。 相似文献
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Shih‐Jen Cheng Huang‐Jen Chiu Yu‐Kang Lo Shu‐Wei Kuo Kuo‐Kuang Jen Kuo‐Sheng Fu Gwo‐Huei You Kun‐Feng Chen Chien‐Min Kao 《International Journal of Circuit Theory and Applications》2014,42(6):584-604
In this paper, a contact‐less power charger for robot applications is studied and developed. Contact‐less charging can be achieved by a separable transformer design. The transformer primary core is in the charger unit, and the secondary core is in the robots. The transformer air‐gap is equal to the distance between these two parts. By theoretical analysis, software simulations, and circuit implementation, the relationship among the transformer's coupling coefficient, the core geometry, and gap are formulated. In addition, a high‐efficiency circuit topology for the studied contact‐less charger is fulfilled. It is anticipated that the research results of this paper can contribute to the development of the contact‐less charging techniques for robot systems. Copyright © 2012 John Wiley & Sons, Ltd. 相似文献