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21.
Cr-Si-Ni-N电阻薄膜的晶化与氧化特性 总被引:1,自引:0,他引:1
在PN2/PAr2分压比分别为0%,2.5%,5%,10%的溅射气氧化中制备了不同氮含量的Cr-Si-Ni-N薄膜,并研究了薄膜在热处理过程中的晶化,氧化行为以及电性能变化。结果表明,非晶Cr-Si-Ni-N薄膜在加热过程中,将析出晶化相CrSi2,随薄膜中氮含量增加,晶化相的形核与长大减缓,然而,薄膜的抗氧化能力得到提高。与低氮含量Cr-Si-Ni-N薄膜相比,高氮含量Cr-Si-Ni-N薄膜的电阻值在热处理过程中变化较小,欲获得较小电阻温度系数(TCR)需要更高的退火温度。 相似文献
22.
Two MosSiB2 (T2)-based alloys with nominal compositions of Mo-12.5Si-25B and Mo-14Si-28B (molar fraction, %) were prepared in an arc-melting furnace, and their oxidation kinetics from 1 000 to 1 300 ℃ were studied. The microstructures of the alloys were characterized by X-ray diffractometry(XRD) and scanning electron microscopy(SEM) with energy dispersive spectroscopy (EDS). The oxide scales of both alloys oxidized at 1 200 ℃ for l0 min, 2 h and 100 h were investigated by surface XRD and cross-sectional SEM-EDS. The results show that the matrix of both alloys consists of T2. The dispersions of Mo-12.5Si-25B alloy are Mo and Mo3Si, and the dispersions of Mo-14Si-28B alloy are MosSi3 (T1) and MoB. The cyclic oxidation kinetics data exhibit initial rapid mass loss followed by slow mass loss. The mass loss of Mo-12.5Si-25B alloy is much faster than that of Mo-14Si-28B alloy at 1 200 and 1 300 ~C. For l0 min exposure, both alloys form irregular and porous thin scale. For 2 h exposure, Mo-12.5Si-25B alloy forms irregular thin scale and the scale contains large cracks, and Mo-14Si-28B alloy forms sound and continuous scale. For 100 h exposure, Mo-12.5Si-25B and Mo-14Si-28B alloys form sound and continuous scale about 50-75 μm and 40-45 μm in thickness, respectively. The better oxidation resistance of Mo-14Si-28B alloy is due to a sound and continuous B-SiO2 layer formation in the early stage of oxidation. 相似文献
23.
利用磁控溅射在室温条件下沉积ITO薄膜和ITO:Zr薄膜,对比研究在空气中退火处理对ITO和ITO:Zr薄膜性能的影响。结果表明,Zr的掺杂促进了(400)晶面的取向,随着退火温度的升高,薄膜表面颗粒增大,表面粗糙度有所降低。室温下Zr的掺杂显著改善了薄膜的光电性能,随着退火温度的升高,ITO和ITO:Zr薄膜的方阻都表现为先降后升的趋势,ITO:Zr薄膜在较低的退火温度下可见光透过率就可达到80%以上,直接跃迁模型确定的光学禁带宽度Eg呈现了先升后降的变化。ITO:Zr薄膜比ITO薄膜显示了更高的效益指数,揭示了ITO:Zr薄膜具有更好的光电性能。 相似文献
24.
采用SEM、TEM及高温蠕变测试等实验方法,研究了某电厂锅炉四级过热器出口用T122管材服役前和在585~610℃服役56000 h后的组织和力学性能。结果表明:经过长时间高温服役后,T122管材的板条马氏体组织索氏体化严重,析出相聚集、长大明显,力学性能也出现较大程度下降,高温蠕变曲线及Larson-Miller参数预示服役后的管材寿命急剧缩短;考虑到T122管材服役过程中组织劣化严重,剩余服役寿命的预测并不能完全依赖于有限时间内的高温蠕变试验。 相似文献