A microscope-coherent optical processor is used for the measurement of the registration errors on integrated-circuit wafers. The measurements are obtained from the optical correlation of wafers with reference wafer patterns by use of matched spatial filters. Previously, the intricate pattern of the active circuit area of wafers has been used in the correlation process, and a new matched spatial filter had to be created for each different integrated circuit. Here, the results of using comparatively plain fiducial markers on a wafer for the registration-error measurement are presented, and these show that the measurements can be made independent of the design of the integrated circuit while maintaining the advantages and accuracy of the optical correlation technique. 相似文献
MXene materials emerge as promising candidates for energy harvesting and storage application. In this study, the effect of the surface chemistry on the work function of MXenes, which determines the performance of MXene-based triboelectric nanogenerator (TENG), is elucidated. First-principles calculations reveal that the surface functional group greatly influences MXene work function: OH termination reduces the work function with respect to that of bare surface, while F and Cl increase it. Then, work functions are experimentally determined by Kelvin probe force microscopy. The MXene prepared by gentle etching at 40 °C for 48 h (GE40/48) has the largest work function. Furthermore, an electron-cloud potential-well model is established to explain the mechanism of electron emission-dominated charge transfer and assemble a triboelectric device to verify experimentally its conclusions. It is found that GE40/48 has the best performance with a 281 V open-circuit voltage, 9.7 µA short-current current, and storing 1.019 µC of charge, which is consistent with the model. Last, a patterned TENG is demonstrated for self-powered human–machine interaction application. This finding enhances the understanding of the inherent mechanism between the surface structure and the output performance of MXene-based TENG, which can be applied to other TENG based on 2D materials. 相似文献
Engineering with Computers - Aerated flow characterized by complex mass transfer processes with multiple hydraulic properties is a common enviro-hydraulics phenomenon, which have a variety of... 相似文献
The purpose is to study the applicability of digital and intelligent real-time Image Processing (IP) in fitness motion detection under the environment of the Internet of Things (IoT). Given the absence of real-time training standards and possible workout injury problems during fitness activities, an intelligent fitness real-time IP system based on Deep Learning (DL) is implemented. Specifically, the keyframes of the real-time images are collected from the fitness monitoring video, and the DL algorithm is introduced to analyze the fitness motions. Afterward, the performance of the proposed system is evaluated through simulation. Subsequently, the Noise Reduction (NR) performance of the proposed algorithm is evaluated from the Peak Signal-to-Noise Ratio (PSNR), which remains above 20 dB for seriously noisy images (with a noise density reaching up to 90%). By comparison, the PSNR of the Standard Median Filter (SMF) and Ranked-order Based Adaptive Median Filter (RAMF) algorithms are not higher than 10 dB. Meanwhile, the proposed algorithm outperforms other DL algorithms by over 2.24% with a detection accuracy of 97.80%; the proposed system can adaptively detect the fitness motion, with a transmission delay no larger than 1 s given a maximum of 750 keyframes. Therefore, the proposed DL-based intelligent fitness real-time IP algorithm has strong robustness, high detection accuracy, and excellent real-time image diagnosis and processing effect, thus providing an experimental reference for sports digitalization and intellectualization.
Applied Intelligence - Infrared target tracking plays an important role in both civil and military fields. The main challenges in designing a robust and high-precision tracker for infrared... 相似文献
Applied Intelligence - A robot control system is a multivariable, nonlinear automatic control system, as well as a dynamic coupling system. To address the difficult problem of data prediction under... 相似文献