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31.
Out-of-plane microlenses and microoptical fiber holder are two of the most important components for building an integrated
microoptic system with a precise alignment accuracy. In this paper, a simple and convenient method to fabricate these components
from SU-8 by using inclined UV lithography in water is proposed. It consists of two perpendicular exposures in SU-8 at ±45°.
DI water possesses a low absorption coefficient and a moderate and stable value of refractive index in near UV. Using water,
the exposure angle in SU-8 can be increased to 50° from 35° in air necessary to pattern the desired 45° slope of the sidewalls.
The principle of the proposed technique and the detailed fabrication process of the microoptic components will be presented.
The integratability of the fabricated components was demonstrated by the fabrication of the microoptical fiber holder with
a pre-aligned out-of-plane microlens. 相似文献
32.
荫罩的热变形使电子束产生着屏偏移 ,进而导致了色纯变坏。本文采用大型软件ANSYS对 1 5英寸荫罩进行了热变形的有限元仿真 ,从而得到了电子束的着屏偏移。建立了包括阴极射线管 (CRT)里所有部件的完整的有限元模型。荫罩被建为无孔连续薄壳的模型 ,对它的表面导热系数和表面弹性模量作了等效的计算。考虑了弹簧片的预应力以及弹簧片和销钉的连接。这样可使我们的分析模型更接近真实情况。本文给出了 50 0、1 0 0 0、1 0 0 0 0s时的热变形和电子束着屏偏移。分析表明 :电子束着屏偏移的最大值发生在 50 0s左右。利用这种分析方法及研究结果可指导新型荫罩的设计和研制。 相似文献
33.
基体温度对磁控溅射沉积ZAO薄膜性能的影响 总被引:8,自引:2,他引:6
利用中频交流磁控溅射方法 ,采用氧化锌铝陶瓷靶材 [w(ZnO) =98%、w(Al2 O3 ) =2 % ]制备了ZAO(ZnO∶Al)薄膜 ,观察了基体温度对ZAO薄膜的晶体结构、电学和光学性能的影响 ,采用X射线衍射仪对薄膜的结构进行了分析 ,采用光学分度计和电阻测试仪测量了薄膜的光学、电学特性 ,采用霍尔测试仪测量了薄膜的载流子浓度和霍尔迁移率。结果表明 :沉积薄膜时的基体温度对薄膜的结构、结晶状况、可见光透射率以及导电性有较大的影响。当基体温度为 2 5 0℃ ,Ar分压为 0 8Pa时 ,薄膜的最低电阻率为 4 6× 10 -4Ω·cm ,方块电阻为 35Ω时 ,可见光 (λ =5 5 0nm)透射率高达 92 0 %。 相似文献
34.
Ring‐opening polymerization of D,L ‐lactide (LA) has been successfully carried out by using rare earth 2,6‐dimethylaryloxide (Ln(ODMP)3) as single component catalyst or initiator for the first time. The effects of different rare earth elements, solvents, monomers and catalyst concentration as well as polymerization temperature and time on the polymerization were investigated. The results show that La(ODMP)3 exhibits higher activity to prepare poly(D,L ‐lactide) (PLA) with a viscosity molecular weight of 4.5 × 104 g mol?1 and the conversion of 97 % at 100 °C in 45 min. The catalytic activity of Ln(ODMP)3 has following sequence: La > Nd > Sm > Gd > Er > Y. A kinetic study has indicated that the polymerization is first order with respect to both monomer and catalyst concentration. The apparent activation energy of the polymerization of LA with La(ODMP)3 is 69.6 kJ mol?1. The analyses of polymer ends indicate that the LA polymerization proceeds according to ‘coordination–insertion’ mechanism with selective cleavage of the acyl–oxygen bond of the monomer. Copyright © 2004 Society of Chemical Industry 相似文献
35.
负温度系数(NTC)传感器是一种阻值随温度升高而降低的热敏电阻,广泛应用于家用电器的测控系统中.鉴于不同NTC元件的温度-电阻特性一致性较差,给批量家用电器产品的调试带来不便.因此,NTC特性的自动测量和筛选是十分重要的.文中介绍了一种新型的NTC热敏电阻特性检测系统,阐述了该系统的检测原理和硬件组成,给出了系统的硬件框图和软件流程.该系统实现了NTC传感器温度特性的自动测量和筛选,方便了整机装配前对使用的NTC传感器温度特性的检测,降低了后道工序的调整难度,节省了工时. 相似文献
36.
37.
应用比较几何的方法研究了完备非紧且具有特定曲率条件的黎曼流形,证明了在一定Pinching条件限制下,流形具有有限拓扑型或者微分同胚于R^n。 相似文献
38.
39.
Yi‐Hung Chen Ching‐Yuan Chang Wei‐Ling Su Chun‐Yu Chiu Yue‐Hwa Yu Pen‐Chi Chiang Chiung‐Fen Chang Je‐Lueng Shie Chyow‐San Chiou Sally IM Chiang 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》2005,80(1):68-75
This study investigates the ozonation of CI Reactive Black 5 (RB5) by using the rotating packed bed (RPB) and completely stirred tank reactor (CSTR) as ozone contactors. The RPB, which provides high gravitational force by adjusting the rotational speed, was employed as a novel ozone contactor. The same ozone dosage was separately introduced into either the RPB or the CSTR for the investigation, while the experimental solution was continuously circulated within the apparatus consisting of the RPB and CSTR. The decolorization and mineralization efficiencies of RB5 in the course of ozonation are compared for these two methods. Moreover, the dissolved and off‐gas ozone concentrations were simultaneously monitored for the further analysis. As a result, the ozone mass transfer rate per unit volume of the RPB was significantly higher because of its higher mass transfer coefficient and gas–liquid concentration driving force. Furthermore, ozonation kinetics was found to be independent of the gravitational magnitude of an ozone gas–liquid contactor. Therefore, the results suggest employing RPBs as ozone‐contacting devices with the advantage of volume reduction. The experimental results, which can be used for further modeling of the ozonation process in the RPB, also show the requirement of correct design for the RPB. Consequently, the present study is useful for the understanding of practical application of RPBs. Copyright © 2004 Society of Chemical Industry 相似文献
40.
The use of a multileaf collimator in the dynamic mode to perform intensity modulated radiotherapy became a reality at our institution in 1995. Unlike treatment with static fields using a multileaf collimator, there are significant dosimetric issues which must be assessed before dynamic therapy can be implemented. We have performed a series of calculations and measurements to quantify head scatter for small fields, collimator transmission, and the transmission through rounded leaf ends. If not accounted for, these factors affect the delivered dose to the prostate by 5%-20% for a typical plan. Data obtained with ion chambers and radiographic film are presented for both 6 and 15 MV x-ray beams. The impact on the delivered dose of the mechanical accuracy of the multileaf collimator, achieved during leaf position calibration and maintained during dose delivery, is also discussed. 相似文献