Study of etch rate characteristics of SF6/He plasmas byresponse-surface methodology: effects of interelectrode spacing

The characteristics of SF₆/He plasmas which are used to etch Si₃N₄ have been examined with experimental design and modeled empirically by response-surface methodology using a Lam Research Autoetch 480 single-wafer system. The effects of variations of process gas flow rate (20-380 sccm), reactor pressure (300-900 mtorr). RF power (50-450 W at 13.56 MHz), and interelectrode spacing (8-25 mm) on the etch rates of LPCVD (low-pressure chemical vapor deposition) Si₃N₄, thermal SiO₂, and photoresist were examined at 22±2°C. Whereas the etch rate of photoresist increases with interelectrode spacing between 8 and 19 mm and then declines between 19 and 25 mm, the etch rate of Si₃N ₄ increases smoothly from 8 to 25 mm, while the etch rate of thermal SiO₂ shows no dependence on spacing between 8 and 25 mm. The etch rates of all three films decrease with increasing reactor pressure. Contour plots of the response surfaces for etch rate and etch uniformity of Si₃N₄ as a function of spacing and flow rate at constant RF power (250 W) display complex behavior at fixed reactor pressures. A satisfactory balance of etch rate and etch uniformity for Si₃N₄ is predicted at low reactor pressure (~300 mtorr), large electrode spacing (12-25 mm), and moderate process gas flow rates (20-250 sccm)     

Construction of a concrete containment model

This paper discusses the features and construction of a reinforced-concrete containment model that has been built at Sandia National Laboratories in Albuquerque, New Mexico. The model Light-Water-Reactor (LWR) containment building was designed and built to the American Society of Mechanical Engineers (ASME) code by United Engineers and Constructors, Inc. The containment model will be tested to failure to determine its response to static internal overpressurization. The results from testing the heavily instrumented containment will be used to assess the capability of analytical methods for predicting the performance of containments subject to severe accident loads as part of the US Nuclear Regulatory Commission's program on containment integrity.The scaled dimensions of the cylindrical wall and hemispherical dome are typical of a full-size containment. Features representative of a prototypical containment and included in the heavily reinforced model are equipment hatches, personnel airlocks, several small piping penetrations, and a thin steel liner attached to the concrete by headed studs.     

Software Licensing Models: What's Out There?

As software and hardware evolve, licensing choices are becoming more complex. Understanding licensing trends and the latest models is one way to achieve the greatest return on software investment.     

United States Nuclear Regulatory Commission Research Program on molten core debris interactions in the reactor cavity

The NRC's Research Program on Core-Debris/Cavity Interactions comprises two principal elements: (1) an analytical effort focused primarily on development of computer codes needed to predict the potential consequences of risk-significant severe-accident scenarios; and (2) an experimental component to provide insights into the relevant phenomenological processes and to develop the experimental data base necessary for validation of the codes. The analytical activities at Sandia National Laboratories (SNL) focus primarily on refinement and validation of the CORCON and VANESA codes. Two major experimental activities are also based at SNL: (1) the large-scale SURC tests address the thermal-hydraulic phenomena in the cavity as well as aerosol release associated with prototypical core-melt materials in various types of concrete crucibles, while (2) the WITCH and GHOST experiments are concerned with aerosol generation and radionuclide release phenomena. A program of small-scale special-effects tests at Brookhaven National Laboratory (BNL) is coupled to a concomitant model-development and code-validation activity. In addition, measurements are being made at Battelle Columbus Laboratory (BCL) to augment the thermochemical data base needed in the VANESA code to permit refined radiological source-term predictions. The current scope and status of this research is reviewed.     

Effects of Sc2O3 and MgO passivation layerson the output power of AlGaN/GaN HEMTs

The low temperature (100°C) deposition of Sc₂O₃ or MgO layers is found to significantly increase the output power of AlGaN/GaN HEMTs. At 4 GHz, there was a better than 3 dB increase in output power of 0.5×100 μm² HEMTs for both types of oxide passivation layers. Both Sc₂ O₃ and MgO produced larger output power increases at 4 GHz than conventional plasma-enhanced chemical vapor deposited (PECVD) SiN_x passivation which typically showed ⩽2 dB increase on the same types of devices. The HEMT gain also in general remained linear over a wider input power range with the Sc₂O₃ or MgO passivation. These films appear promising for reducing the effects of surface states on the DC and RF performance of AlGaN/GaN HEMTs     

A low-power, linear, permanent-magnet generator/energy storagesystem

This paper describes the design, analysis and characterization of a linear permanent magnet generator and capacitive energy storage system for generating electrical power from a single stroke of a salient-pole armature. It is suitable for applications that require relatively low levels of electrical power, such as remote electronic locks. An electromagnetic analysis of the generator is described, and a design optimization methodology for the system is presented. Finally, the performance of a prototype is validated against measurements     

Nothing venture... [venture capital]

Many engineers dream of starting their own company. Venture capital's status as an important source of finance for technology start-up companies is enhanced during periods of economic downturn. The author outlines the role of the venture capitalist in helping to turn the aspiration into a commercially successful reality     

Modal convection and its effect on the stability of EDM wires

Recently, it has been shown that EDM wires undergo thermal buckling at low axial transport speeds and a series of transport instabilities at high axial transport speeds. Hence, only intermediate speeds ensure the straight wire configuration, which is needed for high-accuracy cutting. These conclusions are based on the assumption that the convective heat transfer coefficient remains piecewise constant along the length of the wire. However, a recent study on convection from a vibrating, flexible body shows that the convection coefficient becomes modal. The present study re-examines the wire stability problem with this modal effect in mind. It is shown that at low axial transport speeds, the straight wire configuration may be stable. Its stability hinges on vibration—large amplitude motion implies increased convection and increased stability from thermal buckling. At high transport speeds, the system still undergoes the reported transport instabilities. This work shows that the well-defined intermediate speed range is not so well-defined in the presence of wire vibrations.     

UPEC 2002 Preview

Exposure to pollutants in the air over a long period of time slowly degrades aluminum stranded conductors steel reinforced (ACSR) of overhead transmission lines. Presently, a large number of ACSR conductors have exceeded their forecast useful life. Therefore, it is required to assess the condition of most conductors to determine an economic maintenance schedule. This paper describes a method for evaluating the current condition of aged conductors based on dominant factors such as years in service, environment index, and conductor configuration. The paper presents a diagnostic tool with a fuzzy inference system (FIS) to predict the deterioration degree corresponding to the lifetime of aged conductors based on experts' knowledge. This system can be used as an effective guide to perform nondestructive diagnosis and maintenance of old ACSR conductors.