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991.
A method to estimate the local partial pressures and temperature during low pressure chemical vapor deposition (LPCVD) proceses using film profile data is demonstrated using the chemistry of blanket tungsten deposition by the hydrogen reduction of tungsten hexafluoride. EVREST, the computer program which performs the estimates, uses EVOLVE, a physically based process simulator for ballistic transport and heterogeneous reactions in features on patterned wafers, to compute film profiles for a given set of deposition conditions. In order to validate the estimation method and to demonstrate EVREST, test calculations are performed using film profiles generated by EVOLVE instead of experimental scanning electron microscopy cross-sections. Calculated films profiles are compared with the generated film profiles (the data) and the simulated deposition conditions are adjusted using an algorithm based on Marquardt's method to minimize the sum of squared differences between points on the calculated and generated profiles. Test calculations confirm that film profiles in more than one feature can be used to improve the reliability of the partial pressure and temperature estimates. 相似文献
992.
Molybdenum black solar selective coatings have been produced on cobalt by immersion in a solution of ammonium paramolybdate
and nickel sulphate. The cobalt was electroplated on nickel-plated copper prior to immersion in the paramolybdate solution.
The maximum solar absorptance of the resulting molybdenum black coating was about 0.91. The minimum emittance was about 0.1
for coatings on cobalt deposited with an addition agent and about 0.23 for coatings on cobalt deposited without addition agent
in the 60 °C plating solution. These differences have been related to the coating morphology determined by scanning electron
microscopy. The emittance of coatings on cobalt deposited without addition agent decreases (or remains unchanged) during short-term
heat treatment while that of coatings deposited on cobalt plated with addition agent increases somewhat. Reduction of the
cobalt plating bath temperature to 45 °C can also lead to good initial coating properties but without the requirement for
an addition agent in the cobalt plating bath. XPS studies show that the oxidation state of molybdenum in the coatings is approximately
+ 5 corresponding to Mo4O11. This reduces to + 4 after argon ion bombardment. Some cobalt may be present in the coatings in the form of CoO. 相似文献
993.
The results of an investigation of new materials sensitive to air pressure in a given pressure range are reported. Examples of their application to wind tunnels are given.Central Aero-Hydrodynamics Institute, Moscow. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 63, No. 2, pp. 183–187, August, 1992. 相似文献
994.
Flory–Huggins interaction parameters, λ, were determined for a series of probes in an amine cured epoxy resin matrix (433–493 K) and its precursors (324–363 K) by inverse gas chromatography (IGC). Hildebrand–Scatchard theory was combined with Flory–Huggins theory in order to estimate infinte dilution solubility parameters (δ2) for the matrix and its precursors at 298 K. It was shown that the value of the solubility parameter for the cured resin matrix lies between those of its precursors. Compared to the majority of published work, an unusual aspect of this application of IGC is that solubility parameters have been determined when the stationery phases are (i) small molecules and (ii) a highly crosslinked polymer. Moreover, all possible attempts have been made to ensure equilibrium conditions between probe and stationary phase, and compensation for asymmetry of peak profile has been applied in determining δ2. The solubility parameters estimated by IGC are in good agreement with those calculated by other methods. 相似文献
995.
For pt.I see ibid., vol.17, no.1, p.95-101 (2002). This paper proposes a method for lateral stabilization of the levitated linear induction motor and also gives the analysis for calculating the stabilizing force in detail. The calculated force has been experimentally verified using the laboratory prototype described previously 相似文献
996.
UTD multiple-edge transition zone diffraction 总被引:3,自引:0,他引:3
The uniform theory of diffraction (UTD) is applied to multiple absorbing screens, which are in the transition zones near shadow boundaries. The theory includes the application of slope diffraction, which is a first-order effect in transition zone diffraction. By choosing length parameters independently for amplitude and slope diffraction, it is ensured that the solution has continuity of amplitude and slope at each point. The solution is compared with known solutions with good results except when two screens are very near each other. The study is of particular interest to radio propagation over terrain in mobile radio systems 相似文献
997.
998.
All terrain vehicles (ATVs) have been associated with death and serious injury since their introduction into the marketplace. Fifteen cases of ATV-related brain and spinal cord injury reported to the Louisiana Central Nervous System Registry during 1995 were evaluated for severity, etiology, and outcome. Eleven (73%) of these injuries were sustained by persons under 18 years of age. Despite US Consumer Product Safety Commission and ATV manufacturer recommendations for age restrictions, ATVs continue to be popular recreational devices for children. 相似文献
999.
M Flores-Díaz A Alape-Girón B Persson P Pollesello M Moos C von Eichel-Streiber M Thelestam I Florin 《Canadian Metallurgical Quarterly》1997,272(38):23784-23791
We previously isolated a mutant cell that is the only mammalian cell reported to have a persistently low level of UDP-glucose. In this work we obtained a spontaneous revertant whose UDP-glucose level lies between those found in the wild type and the mutant cell. The activity of UDP-glucose pyrophosphorylase (UDPG:PP), the enzyme that catalyzes the formation of UDP-glucose, was in the mutant 4% and in the revertant 56% of the activity found in the wild type cell. Sequence analysis of UDPG: PP cDNAs from the mutant cell showed one missense mutation, which changes amino acid residue 115 from glycine to aspartic acid. The substituted glycine is located within the largest stretch of strictly conserved residues among eukaryotic UDPG:PPs. The analysis of the cDNAs from the revertant cell indicated the presence of an equimolar mixture of the wild type and the mutated mRNAs, suggesting that the mutation has reverted in only one of the alleles. In summary, we demonstrate that the G115D substitution in the Chinese hamster UDPG:PP dramatically impairs its enzymatic activity, thereby causing cellular UDP-glucose deficiency. 相似文献
1000.