Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

Analysis of Electromagnetic Scattering from an Eccentric Multilayered Sphere

An exact analytic solution of a plane electromagnetic (EM) wave scattered by an eccentric multilayered sphere (EMS) is obtained. It is assumed that the layers are perfect dielectrics and that the innermost core is a perfectly conducting sphere. Each center of a layer is translated along the incident axis. All fields are expanded in terms of the spherical vector wave functions with unknown expansion coefficients. The addition theorem for spherical wave functions is used prior to applying the boundary conditions. The unknown coefficients are determined by solving a system of linear equations derived from the boundary conditions. Numerical results of the scattering cross sections are presented on the plane of φ=0 degrees and φ=90 degrees. The convergence of modal solutions and the characteristics of patterns are examined with various geometries and permittivity distributions     

Multiresolution segmentation of respiratory electromyographicsignals

Analysis of respiratory electromyographic (EMG) signals in the study of respiratory control requires the detection of burst activity from background (signal segmentation), and focuses upon the determination of onset and cessation points of the burst activity (boundary estimation). The authors describe a new automated multiresolution technique for signal segmentation and boundary estimation. During signal segmentation, a new transitional segment is defined which contains the boundary between background a burst activity. Boundary estimation is then performed within this transitional segment. Boundary candidates are selected and a probability is attributed to each candidate, using an artificial neural network. The final boundary for a given transitional segment is the boundary estimate with the maximum a posteriori probability. This new method has proved accurate when compared to boundaries chosen by two investigators     

Ultra-wideband (from DC to 110 GHz) CPW to CPS transition

A new ultra-wideband, low-loss and small-size coplanar waveguide (CPW) to coplanar strip (CPS) transition which can be used from DC to 110 GHz is presented. The proposed transition connects CPW with CPS by the reformed air-bridge. Two ground planes of CPW are tied at their ends by a line and the centre of the line is connected to the ground strip of CPS by another line. Owing to the symmetry of the proposed structure, the currents of two ground planes of CPW are combined with the same phase and transferred to the ground strip of CPS. With height of 3 μm, the signal line of CPW passes over two connecting lines and is connected to the signal strip of CPS. For the back-to-back transition structure, insertion loss <1 dB and return loss >15 dB are obtained from 0.5 to 110 GHz     

Strength,toughness and R-curve behaviour of SiC whisker-reinforced composite Si3N4 with reference to monolithic Si3N4

The flexural strength and fracture toughness of 30 vol% SiC whisker-reinforced Si₃N₄ material were determined as a function of temperature from 25 to 1400°C in an air environment. It was found that both strength and toughness of the composite material were almost the same as those of the monolithic counterpart. The room-temperature strength was retained up to 1100°C; however, appreciable strength degradation started at 1200°C and reached a maximum at 1400°C due to stable crack growth. In contrast, the fracture toughness of the two materials was independent of temperature with an average value of 5.66 MPam^1/2. It was also observed that the composite material exhibited no rising R-curve behaviour at room temperature, as was the case for the monolithic material. These results indicate that SiC whisker addition to the Si₃N₄ matrix did not provide any favourable effects on strength, toughness and R-curve behaviour.     

Non-linear properties of polymer cellular materials with a negative Poisson's ratio

Negative Poisson's ratio polymeric cellular solids (re-entrant foams) were studied to ascertain the optimal processing procedures which give rise to the smallest value of Poisson's ratio. The non-linear stress-strain relationship was determined for both conventional and re-entrant foams; it depended upon the permanent volumetric compression achieved during the processing procedure. Poisson's ratio of re-entrant foam measured as a function of strain was found to have a relative minimum at small strains. The toughness of re-entrant foam increased with permanent volumetric compression, and hence with density.     

Control of circulating current in two parallel three-phase boost rectifiers

One unique feature in parallel three-phase converters is a potential zero-sequence circulating current. To avoid the circulating current, most present technology uses an isolation approach, such as transformers or separate power supplies. This paper proposes a parallel system where individual converters connect both AC and DC sides directly without additional passive components to reduce size and cost of the overall parallel system. In this case, the control of the circulating current becomes an important objective in the converter design. This paper: (1) develops an averaged model of the parallel converters based on a phase-leg averaging technique; (2) a zero-sequence model is then developed to predict the dynamics of the zero-sequence current; (3) based on the zero-sequence model, this paper introduces a new control variable, which is associated with space-vector modulation; (4) a strong zero-sequence current control loop is designed to suppress the circulating current; and (5) simulation and experimental results validate the developed model and the proposed control scheme.     

Design aspects of planar and conventional SMPS transformer: a cost benefit analysis

The intent of this paper is to design a high-frequency transformer that is to be incorporated into the DC/DC pulsewidth-modulated switch-mode power supplies by two different technical approaches: a conventional wound-coil magnetic using copper wires, and a planar magnetic with layered copper tracks on laminated printed circuit board. Comparisons will be made between the two approaches in terms of profile: mounting height and surface area, and performance: power losses and efficiency. Other indicators like temperature rise and leakage inductance that causes electromagnetic interference, and cost, materials, and process fluency are also to be looked into. A sandwiched configuration for primary and secondary windings is proposed for the planar type. Issues arising and typical phenomena encountered will be discussed in detail. Primarily, the dominating factor in performance, cost effectiveness, or circuit compactness that restrains the choice of a particular type is to be evaluated.     

Possibility of sewage and combined sewer overflow reuse with biological aerated filters.

The secondary effluent from municipal plants in Korea generally represents higher BOD with lower SS. Therefore, more soluble forms of organics and NH4-N need to be removed to improve its effluent for reuse. In this study reuse possibility of secondary effluent and CSO (combined sewer overflow) using BAF (biological aerated filter) was evaluated. The tertiary application with 1.2 h EBCT, SS, BOD and COD showed stable concentrations less than 1.3, 1.3 and 6.2 mg/L, respectively. Nitrogen could be nitrified even at 7 degrees suggesting BAF can be used for a water reuse method as well as an effective add-on facility in cold regions. However, BAF was not stable with CSO application at increased flow rates suggesting CSO must be equalised prior to application. Disinfection was necessary even during normal weather conditions.     

A simple method for measuring the cell gap of a reflective twisted nematic LCD

A simple method is demonstrated for measuring the cell gap of reflective twisted nematic (RTN) liquid crystal (LC) cells. This method utilizes a single laser beam and crossed polarizer configuration such that Fabry-Perot effect and surface reflection are eliminated. Experimental results agree well with theory.