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It has already been found that the round shape of holes can be changed into hexagonal shape during plasma etching processes.This work aims to understand the mechanism behind such a shape change using particle simulation method.The distribution of electric field produced by electrons was calculated for different heights from the mask surface.It is found that the field strength reaches its maximum around a hole edge and becomes the weakest between two holes. The field strength is weakened as moving away from the surface.The spatial distribution of this electric field shows obvious hexagonal shape around a hole edge at some distances from the surface. This charging distribution then affects the trajectories of ions that fall on a mask surface so that the round hole edge is etched to become a hexagonal hole edge.The changing of this hole shape will again alter the spatial distribution of electric field to enhance the charging effect dynamically. 相似文献
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The Eu3+/Ag co-doped rare earth disilicate Y2Si2O7 microcrystal was synthesized by sol-gel method. Through controlling the thermal treatment process of Y2Si2O7:Eu3+/Ag precursor, various phases(amorphous, α, β, γ, δ) were prepared. White light emission was observed under UV light excitation in the samples heavily doped with Ag. The white light was realized by combining the intense red emission of Eu3+, the green emission attributed to the very small molecule-like, non-plasmonic Ag particles(ML-Ag-particles), and the blue emission due to Ag ions. Results demonstrated that Eu3+/Ag co-doped Y2Si2O7 microcrystal could be potentially applied as white light emission phosphors for UV LED chips. 相似文献
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在用Monte Carlo方法模拟电子与物质相互作用过程时,常用Mott截面描述电子与原子的弹性碰撞,而用介电函数理论描述电子的非弹性散射。Penn利用光学能量损失函数Im{-1/ε(q=0,ω)}外推法获得了描述动量转移不为零的能量损失函数Im{-1/ε(q,ω)}。该介电函数主要描述由于体激发而引起的能量损失,但当入射电子能量降低,或电子掠入、出射时,电子在表面区域会引起较强的表面电子激发模式,在电子能量损失谱中对应特征的能量损失,如表面等离子体激元峰,故常用的光学能量损失函数不适于描述电子的表面激发行为。 相似文献
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扫描电子显微学中二次电子发射过程的蒙特卡洛模拟 总被引:8,自引:7,他引:1
利用蒙特卡洛模拟固体中电子散射轨迹的计算方法,系统地研究了扫描电镜中二次电子信号的发射过程。该模拟电子与固体相互作用的蒙特卡洛模型包含了级联二次电子产生的过程,并且采用光学介电函数方法描述电子的能量损失和相伴的二次电子激发。由于模拟计算可以给出背散射电子和二次电子的绝对产额,以及它们随加速电压和样品的原子序数的变化关系,因此可以用于模拟元素衬度和形貌衬度像。还计算得到了关于二次电子产生和发射的其它分布,并与实验结果作了比较。 相似文献
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蒙特卡洛树搜索(MCTS)是一种针对决策类博弈游戏,运用蒙特卡洛模拟方法进行评估博弈策略的启发式搜索算法。但是,在面对计算机围棋这种复杂的决策过程时,简单的蒙特卡洛树搜索过程往往由于计算量大,收敛速度非常慢。 由于双人博弈游戏中的蒙特卡洛树搜索不能收敛于双人博弈的最佳决策策略,因此提出蒙特卡洛树搜索结合极大极小值算法的改进算法,使得搜索结果不会因为蒙特卡洛方法的随机性而失真。为了进一步提高复杂双人博弈游戏中搜索算法的计算效率,还结合了几种常见的剪枝策略。实验结果说明,所提算法显著改进了蒙特卡洛树搜索的准确性和效率。 相似文献