Low-resistance polysilicon process in contact application for high density devices

For the lowest resistance, it is required to have the epitaxial silicon contact between the silicon plug and the substrate and good step coverage at the high aspect-ratio contact holes, simultaneously. In this work, a double polysilicon (DPS) deposition technique was proposed for the requirements. The first, thin silicon layer is deposited in a single-wafer process chamber with an in-situ H₂-RTP (rapid thermal process) treatment for the epitaxial contact, and the second silicon layer is formed in a batch-type furnace for good step coverage. From chain resistance, Kelvin R_c, and current-voltage (I–V) measurement, the DPS process meets both low resistance and good uniformity, so that it suggests a breakthrough in the small-sized, semiconductor device application.     

Grain growth in a low-loss cold-rolled motor-lamination steel

This article attempts to determine the mechanisms governing the grain growth process that occurs during lamination annealing of a cold-rolled, motor-lamination (CRML) steel. A new simulation approach linking a Monte Carlo model with electron backscatter diffraction (EBSD) scans used as input has been employed to incorporate the effects of crystallographic texture on the simulated grain growth process. The results from the texture analysis and the computer simulation of the grain growth process indicate that both stored energy driven grain growth and anisotropic grain boundary growth influence the overall grain growth occurring during lamination annealing.     

Groups of algebraic integers used for coding QAM signals

Linear block codes over Gaussian integers and Eisenstein integers were used for coding over two-dimensional signal space. A group of Gaussian integers with 2²ⁿ elements was constructed to code quadrature amplitude modulation (QAM) signals such that a differentially coherent method can be applied to demodulate the QAM signals. This paper shows that one subgroup of the multiplicative group of units in the algebraic integer ring of any quadratic number field with unique factorization, modulo the ideal (Pⁿ), can be used to obtain a QAM signal space of 2p^2n-2 points, where p is any given odd prime number. Furthermore, one subgroup of the multiplicative group of units in the quotient ring Z[ω]/(pⁿ) can be used to obtain a QAM signal space of 6p^2n-2 points; one subgroup of the multiplicative group of units in the quotient ring Z[i](pⁿ) can be used to obtain a QAM signal space of 4p^2n-2 points which is symmetrical over the quadrants of the complex plane and useful for differentially coherent detection of QAM signals; the multiplicative group of units in the quotient ring Z[ω]/(2ⁿ) can be used to obtain a QAM signal space of 3·2^2n-2 points, where i=√-1, ω=(-1+√-3)/2=(-1+i√3)/2, p is any given odd prime number, Z[i] and Z[ω] are, respectively, the Gaussian integer ring and the Eisenstein integer ring. These multiplicative groups can also be used to construct block codes over Gaussian integers or Eisenstein integers which are able to correct some error patterns     

Variants of chromosome 9 in phenotypically normal individuals

The human chromosome 9 displays the highest degree of structural variability. Four different types of variants are described including pericentric inversion, extra G-positive band in the q arm, additional G-positive band in the p arm and duplication of band 9q21-q22. It is important to demonstrate inheritance from a phenotypically normal individual in order to differentiate between a variant chromosome and an abnormal chromosome.     

Estimation of zone effective-volume using tracer-gas techniques

The concentration-decay and pulse-injection tracer-gas techniques were used to evaluate the effective volume of a zone. Measurements of airflow rates were carried out in an environmental chamber using SF₆ as the tracer gas. Results showed that the flow rate estimated from the concentration-decay technique is about 4·5–14·3% higher than actual flow rate if the effective volume of the chamber is assumed to be equal to the physical volume. The effective volume, estimated from tracer-gas measurements, was found to be about 1·5–2·7% higher than the physical volume of the chamber.     

Statistical analysis of decision threshold for parallel acquisitionwith reference filtering in Rician fading channel

Statistical analysis of the decision threshold for parallel PN code acquisition in a Rician fading channel is presented. It is shown that in the performance analysis of the acquisition system with reference filtering, the statistical evaluation of the decision threshold seems more appropriate than the approximation of the decision threshold     

Electrokinetically driven concentration of particles and cells by dielectrophoresis with DC-offset AC electric field

Insulator-based dielectrophoresis (iDEP) has been successfully used for on-chip manipulations of biological samples. Despite its effectiveness, iDEP typically requires high DC voltages to achieve sufficient electric field; this is mainly due to the coupled phenomena among linear electrokinetics: electroosmosis (EO) and electrophoresis (EP) and nonlinear electrokinetics: dielectrophoresis (DEP). This paper presents a microfluidic technique using DC-offset AC electric field for electrokinetic concentration of particles and cells by repulsive iDEP. This technique introduces AC electric field for producing iDEP which is decoupled from electroosmosis (EO) and electrophoresis (EP). The repulsive iDEP is generated in a PDMS tapered contraction channel that induces non-uniform electric field. The benefits of introducing AC electric field component are threefold: (i) it contributes to DEP force acting on particles, (ii) it suppresses EO flow and (iii) it does not cause any EP motion. As a result, the required DC field component that is mainly used to transport particles on the basis of EO and EP can be significantly reduced. Experimental results supported by numerical simulations showed that the total DC-offset AC electric field strength required to concentrate 15-μm particles is significantly reduced up to 85.9% as compared to using sole DC electric field. Parametric experimental studies showed that the higher buffer concentration, larger particle size and higher ratio of AC-to-DC electric field are favorable for particle concentration. In addition, the proposed technique was demonstrated for concentration of yeast cells.     

Modeling of the copolymerization,with depropagation,of α‐methyl styrene and methyl methacrylate at an elevated temperature

We propose a dynamic model for the copolymerization of α‐methyl styrene (α‐MS) and methyl methacrylate (MMA) in a batch reactor. The parameters are based on data from the literature and our own laboratories over the full conversion range. A two‐parameter model with constant reactivity ratios shows the most reasonable results. The dynamic model depicts the reaction kinetics and reactor behavior more clearly. Termination occurs mainly by the cross reaction of unlike radicals, and its rate increases with the molar ratio of α‐MS to MMA. The model enables us to predict the instantaneous and cumulative properties of the copolymer and also provides us with a basic tool for the optimization and control of industrial reactors. © 2004 Wiley Periodicals, Inc. J Appl Polym Sci 93: 261–270, 2004