Electrical linewidth test structures fabricated in monocrystallinefilms for reference-material applications

The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features     

Scientific and artistic investigation of multi-dimensional fractals on the AT & T pixel machine

The pipelined architecture and parallel organization of the AT&T Pixel Machine image computer are described and demonstrated with applications for the visualization of multidimensional fractals, particularly linear fractals and quaternion/ stacked Julia sets. Techniques for pushing the Pixel Machine to its peak abilities are described and apply to more recent parallel image computers as well.     

Error in the UNITY substitution rule for subscripted operators

UNITY, introduced by Chandy and Misra [ChM88], is a programming logic intended to reason about temporal properties of distributed programs. Despite the fact that UNITY does not have the full power of, for example, linear temporal logic, it enjoys popularity due to its simplicity.There was however a serious problem with the Substitution Rule. The logic is incomplete without the rule, and with the rule it is inconsistent.     

The performance of cache-based error recovery in multiprocessors

Several variations of cache-based checkpointing for rollback error recovery from transient errors in shared-memory multiprocessors have been recently developed. By modifying the cache replacement policy, these techniques use the inherent redundancy in the memory hierarchy to periodically checkpoint the computation state. Three schemes, different in the manner in which they avoid rollback propagation, are evaluated in this paper. By simulation with address traces from parallel applications running on an Encore Multimax shared-memory multiprocessor, we evaluate the performance effect of integrating the recovery schemes in the cache coherence protocol. Our results indicate that the cache-based schemes can provide checkpointing capability with low performance overhead, but with uncontrollable high variability in the checkpoint interval     

An object-oriented query evaluation scheme for logical databases inmassively parallel environment

Taking advantage of the structure of logical representations, we report an algorithm that evaluates conjunctive queries in a massively parallel environment under an object-based representation for deductive databases. By distributing objects in a database, we show that parallel evaluation of a query can be achieved in a cooperative way so that the conventional tuple-by-tuple, operation-by-operation evaluation strategy can be replaced by a global, parallel matching approach. With the proposed scheme, all conjuncts of a given query can be examined at the same time, which enables us to eliminate the need of any temporary relation. On the other hand, compared with the interpretive method, we show that any data dependency imposed by shared variables is no longer a major problem in achieving AND-parallelism by the proposed scheme     

The design, fabrication, and testing of corrugated silicon nitridediaphragms

Silicon nitride corrugated diaphragms of 2 mm×2 mm×1 μm have been fabricated with 8 circular corrugations, having depths of 4, 10, or 14 μm. The diaphragms with 4-μm-deep corrugations show a measured mechanical sensitivity (increase in the deflection over the increase in the applied pressure) which is 25 times larger than the mechanical sensitivity of flat diaphragms of equal size and thickness. Since this gain in sensitivity is due to reduction of the initial stress, the sensitivity can only increase in the case of diaphragms with initial stress. A simple analytical model has been proposed that takes the influence of initial tensile stress into account. The model predicts that the presence of corrugations increases the sensitivity of the diaphragms, because the initial diaphragm stress is reduced. The model also predicts that for corrugations with a larger depth the sensitivity decreases, because the bending stiffness of the corrugations then becomes dominant. These predictions have been confirmed by experiments. The application of corrugated diaphragms offers the possibility to control the sensitivity of thin diaphragms by geometrical parameters, thus eliminating the effect of variations in the initial stress, due to variations in the diaphragm deposition process and/or the influence of temperature changes and packaging stress     

Flexible, dry-released process for aluminum electrostatic actuators

We present an all-aluminum MEMS process (Al-MEMS) for the fabrication of large-gap electrostatic actuators with process steps that are compatible with the future use of underlying, pre-fabricated CMOS control circuitry. The process is purely additive above the substrate as opposed to processes that depend on etching pits into the silicon, and thereby permits a high degree of design freedom. Multilayer aluminum metallization is used with organic sacrificial layers to build up the actuator structures. Oxygen-based dry etching is used to remove the sacrificial layers. While this approach has been previously used by other investigators to fabricate optical modulators and displays, the specific process presented herein has been optimized for driving mechanical actuators with relatively large travels. The process is also intended to provide flexibility for design and future enhancements. For example, the gap height between the actuator and the underlying electrode(s) can be set using an adjustable polyimide sacrificial layer and aluminum “post” deposition step. Several Al-MEMS electrostatic structures designed for use as mechanical actuators are presented as well as some measured actuation characteristics     

Comments on “Editorial: fuzzy models-what are they andwhy?”

In the editorial by J.C. Bezdek (ibid., p.1), an example is presented to demonstrate differences between fuzzy membership and probability. The authors argue that probability can be used in a way much more closely analogous to this use of fuzzy membership, weakening the argument for the latter     

A generalized fuzzy Petri net model

The paper proposes a new model of Petri nets based on the use of logic based neurons. In contrast to the existing generalizations, this approach is aimed at neural-type modeling of the entire concept with a full exploitation of the learning capabilities of the processing units being used there. The places and transitions of the net are represented by OR and AND-type and DOMINANCE neurons, respectively. A correspondence between this model and the previous two-valued counterpart is also revealed. The learning aspects associated with the nets are investigated     

A semantic modeling approach for image retrieval by content

We introduce a semantic data model to capture the hierarchical, spatial, temporal, and evolutionary semantics of images in pictorial databases. This model mimics the user's conceptual view of the image content, providing the framework and guidelines for preprocessing to extract image features. Based on the model constructs, a spatial evolutionary query language (SEQL), which provides direct image object manipulation capabilities, is presented. With semantic information captured in the model, spatial evolutionary queries are answered efficiently. Using an object-oriented platform, a prototype medical-image management system was implemented at UCLA to demonstrate the feasibility of the proposed approach.