Kinetics of copper drift in PECVD dielectrics

We quantified the drift of Cu ions into various PECVD dielectrics by measuring shifts in capacitance-voltage behavior after subjecting Cu-gate MOS capacitors to bias-temperature stress. At a field of 1.0 MV/cm and temperature of 100°C, Cu ions drift readily into PECVD oxide with a projected accumulation of 2.7×10¹³ ions/cm ² after 10 years. However, in PECVD oxynitride, the projected accumulation under the same conditions is only 2.3×10¹⁰ ions/cm². These findings demonstrate the necessity of integrating drift barriers, such as PECVD oxynitride layers, in Cu interconnection systems to ensure threshold stability of parasitic field n-MOS devices     

Electronic step down (220/110 V) transformer using a new quantumseries resonant converter

A novel quantum series resonant converter (QSRC) topology for a pure sinewave 60 Hz AC chopper is proposed. It has three bidirectional switches and operates at high switching frequency with low switching loss. Bidirectional power flow is possible, and the switches can operate in either zero current switching (ZCS) mode or zero voltage switching (ZVS) mode by slight modification. The QSRC is thought to be suitable for such a system with fixed voltage conversion ratio. The proposed converter is applied to an electronic 220/110 V transformer. Detailed analyses and experimental results for 1 kVA are presented     

The current injection method for AC plasma display panel (PDP) sustainer

A new concept of energy recovery for a plasma display panel (PDP) is proposed. Different from conventional LC resonant sustaining drivers, the current built up before inverting the polarity of the panel electrodes is utilized to change the panel polarity together with energy previously charged in panel capacitance. This operation provides zero-voltage switching of switches and reduction of electromagnetic interference by rejecting the surge current when the sustain switches are turned on. The buildup current helps to reduce the transition time of the panel polarity and may produce more stable light waveforms. This method is suitable for a PDP sustaining driver requiring stable light emission characteristic while it maintains low circuit loss like the series-resonant-type energy recovery circuit which is known to be a very effective method.     

Comparison of sequentially combined carbon with sole carbon in denitrification and biological phosphorus removal.

The sequentially combined carbon (SCC) of methanol and acetic acid was used for the biological nutrient removal (BNR). Its BNR performance was compared with methanol or acetic acid as a sole carbon substrate. Compared to the sole carbon substrate, the use of SCC demonstrated the highest overall TIN removal of 98.3% at a COD ratio of 30 mg COD/l of methanol/50 mg CDO/l of acetic acid. Furthermore, denitrification was more enhanced when methanol was used as one of the SCC, rather than as a sole carbon source. Complete phosphorus removal was accomplished with a non-detectable o-P concentration when SCC was added. This research also showed that aerobic denitrifiers appear to prefer acetic acid to methanol, and the amount of poly-beta-hydroxybutyrate (PHB) stored by P accumulating organisms (PAOs) using acetic acid in the anoxic zone could be another important factor in improving the aerobic denitrification. The SCC was a very favorable carbon source for the aerobic denitrification since acetic acid was utilized more efficiently for P-release in accordance with increase of PHB stored in the cell of PAOs by removing nitrogen first using methanol.     

An integratable dual metal gate CMOS process using an ultrathin aluminum nitride buffer layer

We propose and demonstrate a novel approach for dual metal gate CMOS process integration through the use of a very thin aluminum nitride (AlN/sub x/) buffer layer between metal and gate oxide. This buffer layer prevents the gate oxide from being exposed to a metal etching process which potentially causes oxide thinning and damage. Subsequent annealing consumes the very thin AlN/sub x/ layer and converts it into a new metal alloy film by reacting with gate metals, resulting in no increase in EOT due to this buffer layer. The work function of the original gate metal is also modified as a result of its reaction with AlN/sub x/, making this approach extremely attractive for engineering the work function for dual metal gate CMOS applications.     

Antimicrobial activity of 4-hydroxybenzoic acid and trans 4-hydroxycinnamic acid isolated and identified from rice hull

Two antimicrobial substances in rice hull were isolated and identified as 4-hydroxybenzoic acid and trans 4-hydroxycinnamic acid by LC-MS, and 1H- and 13C-NMR. An evaluation of 50% inhibition of growth (IC50) revealed that the two substances had different inhibition profiles against various microorganisms. Most of the gram-positive and some gram-negative bacteria were sensitive to trans 4-hydroxycinnamic acid and 4-hydroxybenzoic acid at IC50 concentrations of 100-170 and 160 micrograms/ml, respectively.     

Comparison of two methods of assisted fertilization in cynomolgus monkeys (Macaca fascicularis): intracytoplasmic sperm injection and partial zona dissection followed by insemination

Intracytoplasmic sperm injection (ICSI) and partial zona dissection followed by insemination (PZD-I) were used to establish a microinjection system in cynomolgus monkeys (Macaca fascicularis), which are potential models for human reproduction. Two experimental systems were studied, in which either hamster oocytes or cynomolgus monkey oocytes were used as the vehicle. When hamster oocytes were used, 66 out of 81 ICSI-treated oocytes (82%) showed sperm head swelling or pronucleus formation. Following PZD-I of hamster oocytes the rates of spermatozoa penetration (85/114; 75%) and fertilization (71/114; 62%) were relatively high. When cynomolgus monkey oocytes were used, 19 out of 31 (61%) were fertilized by ICSI with cynomolgus monkey spermatozoa and, subsequently, two embryos (7%) developed to the morula stage. In total, 94% (15/16) of the PZD-I treated oocytes were penetrated by spermatozoa and 63% (10/16) were fertilized. These results demonstrate that both micromanipulation techniques can be used in assisted fertilization with cynomolgus monkeys.     

Manufacturing technology in Korea

This article describes a general overview of industry development, present status and future perspectives of manufacturing technology in Korea. The Advanced Manufacturing System project, which is one of the national R&D projects in manufacturing technology, is introduced. The problems for the future development of manufacturing technology in Korea is discussed.     

Influence of Pr 2 O 3 and Nd 2 O 3 on Ferroelectric and Pyroelectric Properties of Tungsten Bronze Structured BSNN Ceramics

Present communication describes the preparation and the influence of Pr 2 O 3 and Nd 2 O 3 on structure, ferroelectric, dielectric, pyroelectric and resistivity properties of (Ba 1-x Sr x ) 2 NaNb 5 O 15 [BSNN] compositions at and around x = 0.6, MPB region. Substitution of Pr 2 O 3 /Nd 2 O 3 decrease the cell volume and Curie temperature and enhance the room temperature dielectric constant. The room temperature pyroelectric coefficients are observed to be in the order of 10-9 C/cm 2 °C. Higher figure of merit FM RV , FM RN and FM RI values of the order 10-14 CM/J, 10-12 CM/J and 10-11 CM/J respectively are observed in both Pr/Nd:BSNN compositions. Resistivity studies revealed a PTCR behavior.