Development of dicing technique for thin semiconductor substrate using temporally shaped femtosecond laser

Recently, semiconductor substrates for integrated circuits (ICs) have been required to be as thin as 50 µm, because many electronic devices must be miniaturized and light in weight. Machining of such thin substrates with conventional dicing techniques is very difficult. Therefore, we have proposed processing them using femtosecond laser ablation. In this work, we investigate the influence of conditions of a double pulsed laser such as the delay time and fluence on the depth and diameter in order to develop a new dicing technique for very thin ICs. A double pulsed laser (λ = 780 nm, τ = 150 fs, f = 10 Hz, Δt = 0 to 100 ps, E₁ + E₂ = 100 µJ) was focused on the Si substrate with a plano‐convex lens having a nominal focal length of 100 mm. At a delay time of 10 ps, singularly shallow and flat‐bottomed holes were obtained. When the substrates were diced under these conditions, the bottom of the processing groove was flat and very smooth, whereas many microcracks starting from the bottom of the groove formed by the conventional method have been observed. From these results, we were able to identify femtosecond laser processing conditions that were applicable to dicing of thin Si substrates. © 2004 Wiley Periodicals, Inc. Electr Eng Jpn, 149(3): 43–48, 2004; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20028     

Fault Diagnosis by Mathematical Programming

This paper presents the problem of fault diagnosis for logically represented continuous systems that can be formulated through nonlinear mathematical programming. This problem is transformed to an integer-programming problem and solved. Possible modifications and extensions of the problem are given. Although failure tables must be prepared in ordinary fault diagnosis, they are not necessary with this mathematical programming approach. By modifying constraints in the mathematical programming problem, difficulties such as multiple faults, correlated faults, modifications of test conditions and cycles in the system, which are encountered in the ordinary failure table approach, are made tractable.     

Biological characteristics of the junctional epithelium

This review summarizes the biological properties of the junctional epithelium, focusing on its developmental aspects, wide intercellular spaces and desmosomes, dense granules, permeability barrier, phagocytotic activity, adhesive structures and nerve terminals. It also discusses the morphology and functions of long junctional epithelium and peri-implant epithelium. Junctional epithelium is derived from the reduced enamel epithelium during tooth development. Apoptosis occurs in the border between oral and reduced enamel epithelia during tooth eruption. Junctional epithelium expresses a cytokeratin-19 immunoreaction, suggesting that this protein is a consistent differentiation marker. Wide intercellular spaces, which contain neutrophils and nerve endings, are formed as there are fewer desmosomes than in the oral epithelium. Dense, membrane-bound granules in the epithelium might correspond with membrane-coating granules, as revealed by their shape, components and freeze-fracture images. Junctional epithelium with high permeability contains exogenously expressed alpha-defensins, while stratified epithelia contain endogenously expressed beta-defensins. The phagocytotic activity in this epithelium remains unclear. Integrin-alpha6beta4 and laminin-5 form a complex in the tooth surface internal basal lamina. Long junctional epithelium created experimentally attaches to the cementum surface by hemidesmosomes and basal lamina. The peri-implant epithelium differs in proliferation and in adhesive structure from the normal junctional epithelium. In conclusion, wide intercellular spaces and poorly developed desmosomes are closely correlated with a permeable nature. There is still uncertainty over the phagocytotic activity of the epithelium. Integrin-alpha6beta4 and laminin-5 form a significant complex in the internal basal lamina. Junctional epithelium receives a rich sensory nerve and has a high rate of cell turnover. Long junctional epithelium can be produced rapidly during wound healing, due to high proliferative activity. Peri-implant epithelium might be a poorly adhered and permeable epithelium.     

Production of ultra fine SiC powder from SiC bulk by arc-plasma irradiation under different atmospheres and its application to photocatalysts

The production of ultrafine SiC powder from a SiC bulk (containing 10wt% Si) was examined by the arc-plasma method under different atmospheres such as argon, argon and hydrogen, argon and helium, and argon and nitrogen. No melting of SiC bulk occurred during arcplasma irradiation, and even pure argon gas was effective for the production of the ultrafine powder. The SiC powder produced has the structure of -SiC, compared to -structure of the bulk SiC. The average particle size of the SiC powder produced decreased to one-half of the value when hydrogen or helium was added to argon. Smaller particles of SiC are formed by the arc-plasma gases with a large thermal conductivity. The present results confirm that sublimation is a major process in the production of ultrafine SiC powder. The SiC powder is found to be effective as a photocatalyst for the decomposition of water.     

Effects of Mn content and texture on fatigue properties of as-cast and extruded AZ61 magnesium alloys

Fatigue behavior of as-cast and extruded AZ61 magnesium alloys in ambient air (20 °C–55%RH) was investigated. It was found that size and distribution of cast defect influenced tensile and fatigue performance of the as-cast alloy. Fatigue limit of the as-cast alloy was significantly low compared to the extruded alloy. The casting defects served as stress concentration sites for fatigue crack nucleation. Fatigue tests were also carried out on a high Mn content alloy. All of the specimens failed from an inclusion near the specimen surface. Fatigue limit of Mg alloy with high Mn content was lower compared to that of the low Mn content alloy. Further, investigation on the effect of texture on fatigue and fatigue crack growth behavior of the extruded AZ61 magnesium alloy plate was carried out. The results showed that fatigue strength in the longitudinal direction to the extruded direction was higher compared to those in the transverse and 45° directions. Significant effect of specimen orientation on fatigue crack growth behavior for both short and long cracks was found near the threshold region. However, regardless of specimen orientation, the da/dN–ΔK_eff curves for all three kinds of specimens were in a narrow band. It is suggested that the difference in the fatigue life among the specimen orientations will be mainly due to the difference in the crack closure behavior. A transition of fracture mechanism was found for a long crack. Slip fracture mechanism was dominant above the transition point, whereas below the transition point, slip fracture mechanism was associated with cleavage fracture.     

The observation of the nucleation and growth of electrolessly plated nickel deposited from different bath pH by TEM and QCM method

The important factors for fabricating thinner and more uniform films by electroless plating were discussed. Two kinds of Ni-P films were electrolessly plated from hypophosphite baths. The number density of the grains was low in the Ni-5.3 wt%P deposits which were plated from the pH 9 bath. As deposition proceeded, the grains grew and merged to form a continuous structure. In case of the Ni-12.6 wt%P deposits, which were plated from the pH 6 bath, the number density of the grains was more than twice that of the Ni-5.3 wt%P deposits. The grains formed a continuous structure, with nucleation governed by the initial deposition. Thus, the transition thickness, i.e., the thickness at which the deposits assumed a continuous structure, was lower in the case of pH 6. The difference was caused by the different autocatalytic activity of the deposits due to the difference in phosphorus content. It was found that the thinner and more uniform nickel films could be electrolessly plated under lower autocatalytic activity.     

Suppression of Rhombohedral-Phase Appearance and Low-Temperature Sintering of Scandia-Doped Cubic-Zirconia

Inhibition of cubic-rhombohedral phase transformation and low-temperature sintering at 1000°C were achieved for 10-mol%-Sc₂O₃-doped cubic-ZrO₂ by the presence of 1 mol% Bi₂O₃. The powders of 1-mol%-Bi₂O₃–10-mol%-Sc₂O₃-doped ZrO₂ were prepared using a hydrolysis and homogeneous precipitation technique. No trace of rhombohedral-ZrO₂ phase could be detected, even after sintering at 1000°–1400°C. The average grain size of the ZrO₂ sintered at 1200°C was >2 μm because of grain growth in the presence of Bi³⁺. Cubic, stabilized Bi-Sc-doped ZrO₂ sintered at 1200°C had sufficient conductivity at 1000°C (0.33 S/cm) to be used as an electrolyte for a solid-oxide fuel cell (SOFC) and at 800°C (0.12 S/cm) for an intermediate-temperature SOFC.     

Minimal effective dose on serum cholesterol concentration and the safety evaluation of dressing containing plant sterol in Japanese subjects

We examined the minimal effective dose on serum cholesterol concentration and the safety of dressing containing plant sterol in humans. EXP.1: Sixty-eight healthy Japanese males (total cholesterol (TC) > or = 170 mg/dL) were randomly divided into four groups, and were given 0, 400, 800 or 1200 mg/day of plant sterol in 15 g dressing for 4 weeks followed by the washout period of 4 weeks. Although there were no significant differences in serum TC and low-density lipoprotein cholesterol (LDL-C) concentrations among all groups after feeding plant sterol for 4 weeks, in 36 subjects with TC > or = 220 mg/dL, serum LDL-C concentration tended to reduce when received 800 or 1200 mg of plant sterol, and the difference between 0 and 1200 mg groups was statistically significant. The difference between 0 and 800 mg groups was near significant (p=0.053). Intake of 400 mg of plant sterol did not change serum LDL-C concentration. EXP.2: Twenty-one healthy Japanese subjects (TC > or = 180 mg/dL, 10 men, 11 women) were given 2400 mg/day of plant sterol in 45 g dressing for 4 weeks. Clinical data were all remained normal. These results indicated that minimal effective dose of the plant sterol on serum cholesterol concentration in healthy male subjects is around 800 mg/day, and intake of 2400 mg/day of plant sterol is regarded to be safe.     

Development and verification of a new nuclear data processing system FRENDY

Japan Atomic Energy Agency developed the new nuclear data processing system FRom Evaluated Nuclear Data librarY to any application (FRENDY) in order to solve the problems of the current widely used nuclear data processing systems and process the new evaluated nuclear data file. Verification of FRENDY was carried out by three steps, i.e. verification of each function, comparison of the results, and comparison of the k_eff values for the 79 benchmark experiments in the ICSBEP handbook using cross section data library processed by FRENDY with those by NJOY99. These results verified that FRENDY generates the ACE (A Compact ENDF) file correctly.