Densification of plasma deposited silicon nitride films by hydrogen dilution

The effects of hydrogen dilution on the bonding characteristics, composition, and properties of SiN films deposited from a SiH₄/NH₃ mixture by r.f. plasma enhanced chemical vapor deposition were studied. The addition of relatively small amounts of hydrogen increased the Si/N ratio resulting in a corresponding increase in the Si---H/N---H bonding ratio. At higher hydrogen dilutions, the Si/N ratio decreased towards stoichiometric with significant changes in the hydrogen bonding characteristics. Changes in the physical properties are discussed in terms of the measured changes in bonding structure. Changes normally associated with changes in bulk film density were found to be well correlated to the Si---N bond density. The effects of substrate temperature and NH₃/SiH₄ ratio on films deposited under conditions of high hydrogen dilution were similar to those widely reported in the literature for plasma-enhanced chemical vapor deposition films deposited without hydrogen. Films deposited by remote plasma using hydrogen as the excitation exhibited high Si---N bond densities and low hydrogen. Experiments are planned to clarify the mechanism responsible for the observed changes in film properties.     

Synthesis of fine composite particles for hydrogen storage, starting from Mg-YNi2 mixture

We synthesized new composite particles for hydrogen storage on the basis of an idea of “particle designing”. As starting materials, powders of Mg and YNi₂ were selected. Fine composite particles containing mainly Mg₂Ni could be designed by repetitive hydriding and dehydriding cycles at 673 K. In the synthesis process of the composite particles, the following two points were found to be essential for this technique. The first point is that, after being activated by the sequential processes of hydrogenation, amorphization and disproportionation, YNi₂ reacts effectively with Mg. The second point is that evaporated Mg, which occurs during dehydriding, adheres to the surface of the activated YNi₂ and accelerates a diffusion reaction to form Mg₂Ni at the interface. In these composite particles, Mg₂NiH₄ is formed, even at 373 K, under a hydrogen pressure of 5 MPa.     

Bisensors for amino acids

Two kinds of biosensors for amino acids (one with nonspecific enzyme as bioelement, the other with specific enzyme(s) as bioelement), including their principles, applications, recent researches and future trends were discussed in detail. 61 references were given. A part of work for gaining Ph. D in chemical and biochemical application at FPMs (Mons, Belgique) Synopsis of the first author Xia Jinlan, Male, born in 1963, now at Facult’e Polytechnique de Mons, Belgique     

农村电话用户市场调查与分析

受中国电信委托、原邮电部经济技术发展研究中心在全国进行一次农村电信市场调查，以了解当前农村通信市场发展潜力，本文公布了此次调查的结果，从经济能力、资费和潜在市场等方面提出了发展农话的建议 。     

双旋Y切石英振子厚度模式的频温特性的研究

本文利用描述固体中弹性声波的克里斯托费尔方程,建立了双旋Y切石英振子厚度模式的频温特性分析方法,并编制了相应的计算机程序。该程序可给出双旋Y切石英振子在任意切角(ф_3ф_1)下的厚度模(a、b、c模)的频率温度特性曲线。文中给出了单旋AT切、BT切(b模)、双旋SC切(b、c模)、FC切、IT切、LC切、NL_1切、NL_2切、AK切等各已知切型的频温特性曲线。对石英谐振器的切角灵敏度和切角误差进行了分析。     

Novel miniature integrated optical goniometers

A new principle and arrangement for directly determining the angle of incidence of an optical beam on an object are proposed and demonstrated. The novelty of the approach lies in the realization of a ‘smart object’, which extracts a portion of the incident beam's power into an optical waveguide attached to the object's surface or embedded in its body for converting the angle of incidence into the position of a guided beam with finite lateral extent. This ‘integrated optical light pointer’ beam is accomplished by means of creating additional degrees of freedom on the target in two different ways. While a first type is based on introducing spatial variations of the waveguide thickness, a second type makes use of a chirp of the grating periodicity. The feasibility for practical applications has been experimentally demonstrated by a direct comparison with a commercial high-resolution encoder, resulting in an r.m.s. error of <30′'. Measurements have been performed for chips fabricated based on replicated polycarbonate substrates and with no external optics, showing the great potential of this approach for realizing low-cost yet high-performance miniature goniometers.     

实用语音传感器

介绍了利用MCS-96单片计算机构成实用语音传感器的电路设计方案和配合该系统研究的语音识别方法以及实验结果等。     

柔性制造系统生产中的零件分批算法

根据ＦＭＳ资源、加工任务、零件工艺提出了零件分批算法，该算法在零件交货期的束下，以机床负荷平衡为目标，搜索零件集合，找出最合适的零件组合形成零件加工批。此算法为简化ＦＭＳ的动态调度和提高系统生产率创造了条件。仿真结果表明分批算法是行之有效的。     

病险水工建筑物可靠性评估方法初探

 水工建筑物可靠性评估是水利工程管理中急需解决的问题，将水工建筑物分解为由分部工程组成的层次结构，引入子系统概率重要性系数，用层次分析法导出水工建筑物系统可靠度指标的实用计算方法。     

木犀科植物花粉的扫描电镜研究

植物花粉的形态特征具有种属特异性。本文用扫描电子显微镜观察了木犀科(Oleaceae)的六属八种植物花粉的形态特征。结果表明,除迎春有个别四萌发沟外,其它花粉都是三沟型,外壁纹饰均为网状。但各种植物花粉的细微形态仍有明显差异。因此,用扫描电镜观察研究植物花粉的亚微形态特征,可为植物分类提供一些必要的形态依据。