A virtual metrology system for semiconductor manufacturing

Nowadays, the semiconductor manufacturing becomes very complex, consisting of hundreds of individual processes. If a faulty wafer is produced in an early stage but detected at the last moment, unnecessary resource consumption is unavoidable. Measuring every wafer’s quality after each process can save resources, but it is unrealistic and impractical because additional measuring processes put in between each pair of contiguous processes significantly increase the total production time. Metrology, as is employed for product quality monitoring tool today, covers only a small fraction of sampled wafers. Virtual metrology (VM), on the other hand, enables to predict every wafer’s metrology measurements based on production equipment data and preceding metrology results. A well established VM system, therefore, can help improve product quality and reduce production cost and cycle time. In this paper, we develop a VM system for an etching process in semiconductor manufacturing based on various data mining techniques. The experimental results show that our VM system can not only predict the metrology measurement accurately, but also detect possible faulty wafers with a reasonable confidence.     

Glycoprotein hormone alpha-subunit secretion in non-functioning pituitary adenomas

The aim of the present study was to investigate the prevalence of elevated free glycoprotein hormone alpha-subunit in different pituitary adenomas, to establish the diagnostic value of the basal and stimulated free alpha-subunit secretion in non-functioning adenomas. Serum basal levels of alpha-subunit were increased in 1 of 22 untreated, in 1 of 16 operated patients with non-functioning adenoma, in 6 of 28 untreated, in 1 of 7 operated patients with acromegaly, in 0 of 5 untreated prolactinomas and in 0 of 1 untreated gonadotrop adenoma. Overall free alpha-subunit levels were increased in 9 of 79 cases (11.4%). In 6 of 9 patients with untreated non-functioning adenoma thyrotrop hormone releasing hormone caused an abnormal--paradox--elevation of serum alpha-subunit. These data indicate that measurement of basal and stimulated alpha-subunit is of relatively poor value in the diagnosis of non-functioning pituitary adenomas. The transsphenoidal surgery did not resulted in a change of alpha-subunit secretion neither in patients with non-functioning adenoma nor with acromegaly. The present data confirm the view that non-functioning pituitary adenomas are not homogeneous since this subset of tumors includes adenomas that either do not secrete measurable amounts of free alpha-subunit or produce normal or supranormal amounts of subunits as consequence of still undefined biosynthetic abnormalities.     

The effect of through plane pore gradient GDL on the water distribution of PEMFC

The effect of through plane pore gradient of gas diffusion layer (GDL) on the performance of Polymer Electrolyte Membrane Fuel Cell is investigated experimentally. The performance with GDLs having no, medium and high pore gradient are compared at 2 different relative humidity (RH) conditions. The medium pore gradient GDL shows generally the best performance in both RH conditions. The performance difference is analyzed based on the water distribution. The water distribution is measured through the X-ray visualization. The amount of water is reduced with the pore gradient GDL. This change reduces the concentration over-potential, and thereby increases the performance at high RH condition. However, the reduction of liquid water results in dehydration of the membrane at low RH condition. This makes lower performance with high pore gradient. The highest performance is not matched with the highest pore gradient. The effect of pore gradient is distinct when water exists sufficiently.     

Cathodic shift and improved photocurrent performance of cost-effective Fe2O3 photoanodes

We successfully fabricated cost-effective and efficient pulse electrodeposited Fe₂O₃ photoanodes for PEC water splitting application. Surface modifications of Fe₂O₃ by oxygen evolution catalysts like cobalt phosphate (Co–Pi), a monoclinic BiVO₄ or both showed cathodic/anodic shift in photocurrent with significantly improved photo-response.     

The analysis of adhesion force at the interface of gas diffusion layer and channel in polymer electrolyte membrane fuel cell

The adhesion force of water droplet on the gas diffusion layer (GDL) is modeled based on the droplet deformation. The deformed droplet is represented as an ovoid shape. The adhesion force is calculated based on it and verified by the surface tilting experiment. The model predicts the shape of deformed droplet and adhesion force within 30% error, whereas previous models predict adhesion force with error larger than 30%. The modified model is used to compare the adhesion force among 3 types of GDL having pore gradient. The comparison result is well matched with the water distribution in polymer electrolyte membrane fuel cell (PEMFC) and water detachment phenomena at the GDL. High adhesion force makes more water accumulation at the interface of GDL and gas supplying channel. This makes different boundary condition and changes the water distribution in PEMFC.     

Sintering behavior and mechanical properties of WC–10Co,WC–10Ni and WC–10Fe hard materials produced by high-frequency induction heated sintering

The comparison of sintering behavior and mechanical properties of WC–10 wt.%Co, WC–10 wt.%Ni and WC–10 wt.%Fe hard materials produced by high-frequency induction heated sintering (HFIHS) method was accomplished using ultra-fine powder of WC and binders (Co, Ni, Fe). The advantage of this process allows very quick densification to near theoretical density and prohibition of grain growth in nano-structured materials. Highly dense WC–10Co, WC–10Ni and WC–10Fe with a relative density of up to 99% could be obtained with simultaneous application of 60 MPa pressure and induced current within 1 min without significant change in grain size. The hardness and fracture toughness of the dense WC–10Co, WC–10Ni and WC–10Fe composites produced by HFIHS were investigated.     

Development of interpolation-free PTV

Journal of Mechanical Science and Technology - A new particle tracking velocimetry (PTV) algorithm, which has no interpolation process requirement, has been constructed. An affine transformation...     

Development of measurement technique of explosive flame using an optical measurement method

Journal of Mechanical Science and Technology - It is essential in weapons systems to understand how much explosive power is applied according to various chemicals and methods of the explosion. In...     

Viscoplastic parameter identification of temperature‐dependent mechanical behavior of modified polyphenylene oxide polymers

Modified polyphenylene oxide (MPPO) is a widely known thermoplastic polymer and is extensively utilized for weight reduction of automobiles since it possesses outstanding mechanical properties, such as resistance and toughness. In this study, the viscoplastic behaviors of MPPO with respect to changes in temperature were identified through an approximate optimization method. For this work, parameter studies were conducted with a tensile simulation of the MPPO polymer, in accordance with the modified two‐layer viscoplastic material parameters and the suggested shift parameter. The sensitivity tendency of the force‐displacement curves was captured in accordance with the material parameters. Computational experiments for obtaining calibration error data were performed using the material parameters based on interior central composite design. Surrogate models of root mean square error relative to force and displacement were generated using the response surface method. The accuracy of the surrogate models was evaluated with R‐square. Optimization for obtaining the material parameters was performed using the non‐dominant sorting genetic algorithm‐II. The results showed that the calibration error from the finite element analysis was minimized and agreed with experimental data. POLYM. ENG. SCI., 59:E200–E211, 2019. © 2018 Society of Plastics Engineers