Advanced mask aligner lithography (AMALITH) for thick photoresist

Advanced mask aligner lithography (AMALITH) is a holistic approach to improve shadow printing (contact and proximity lithography) in mask aligners. AMALITH is based on two tools, the MO Exposure Optics^®, a new illumination system allow shaping the angular spectrum of the illumination light, and LAB, a software tool for full 3D simulation of the shadow printing process. MO Exposure Optics^® is provided by SUSS MicroTec AG (http://www.suss.com), as an upgrade for all current and older mask aligner models. MO Exposure Optics^® decouples the illumination from lamp misplacement (self-calibrated light source), improves the light uniformity, provides telecentric illumination and enables customized illumination in mask aligners. LAB is a software tool provided by GenISys GmbH (http://www.genisys-gmbh.com), and allows simulating the complete chain from illumination, mask pattern, photoresist and resist processing. The combination of both tools allows optimizing mask aligner lithography beyond today’s limits.     

Novel transparent hybrid polymer working stamp for UV-imprinting

Transparent stamps are an integral and crucial part of the UV-imprinting. Time consuming fabrication of quartz stamps increases the price of the technology. In the presented work a thermally stable transparent imprint stamp made of a novel hybrid polymer system is demonstrated. As a low-cost and highly efficient alternative the hybrid polymer stamp contributes to the acceptance and application of the nanoimprint technology. By using the UV-patternable inorganic–organic hybrid polymer quartz stamps might become superfluous in the UV-imprint process entirely, because transparent working stamps can be manufactured also with use of opaque silicon master stamps.     

Reactive scheduling: improving the robustness of schedules and restricting the effects of shop floor disturbances by fuzzy reasoning

Practical scheduling usually has to reach to many unpredictable events and uncertainties in the production environment. Although often possible in theory, it is undesirable to reschedule from scratch in such cases. Since the surrounding organization will be prepared for the predicted schedule, it is important to change only those features of the schedule that are necessary.We show how, on one side, fuzzy logic can be used to support the construction of schedules that are robust with respect to changes due to certain types of event. On the other side, we show how a reaction can be restricted to a small environment by means of fuzzy constraints and a repair-based problem-solving strategy.We demonstrate the proposed representation and problem-solving method by introducing a scheduling application in a steelmaking plant. We construct a preliminary schedule by taking into account only the most likely duration of operations. This schedule is iteratively "repaired" until some threshold evaluation is found. A repair is found with a local search procedure based on Tabu Search. Finally, we show which events can lead to reactive scheduling and how this is supported by the repair strategy.     

A new UV sensitive positive resist for X-ray masks manufacture

LIGA is a well-established process to fabricate metallic micro parts with high resolution, high precision and very low sidewall roughness by means of X-ray lithography and electroplating. The availability of a precise X-ray mask is a precondition for the final precision of the manufactured micro parts. Typical mask substrate materials, e.g. beryllium, carbon based foils, Si₃N₄ or SiC show different disadvantages such as low X-ray transparency or high toxicity or high prices or low conductivity or high thermal expansion or surface porosity causing X-ray scattering. For the fabrication of X-ray masks, PMMA with its unique features such as high aspect ratio patterns with high precision, exhibits low sensitivity and the layers preparation is not easy. SU-8, an epoxy-based UV and X-ray sensitive, chemically amplified, negative tone photoresist exhibits high aspect ratio patterns with vertical sidewalls. The difficult remove of the resist after the electroplating process significantly hinders the inspection of the fabricated X-ray mask. We present the use and suitability of an UV sensitive, chemically amplified, viscous, aqueous-alkaline developable, and easy removable positive tone photoresist, XP mr-P 15 AV, exhibiting high aspect ratio patterns with vertical sidewalls for the fabrication of X-ray masks by means of UV lithography on vitreous carbon substrates.     

Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive^® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive^® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price.     

Noninterferometric topography measurements of fast moving surfaces

The topography of moving surfaces is recovered by noninterferometric measurements. The phase reconstruction is derived by measuring the intensities of a backscattered pulsed laser light and solving the transport intensity equation (TIE). The TIE is solved by expanding the phase into a series of Zernike polynomials, leading to a set of appropriate algebraic equations. This technique, which enables us to make a direct connection between experiments and the TIE, has been successfully tested in gas gun experiments. In particular, the topographies of a moving projectile and the free surface of a shocked target were recovered.     

Comparison of steroid hormone patterns in different fat tissues of Synovex-S implanted and control steers

Four different adipose tissues (kidney fat, heart fat, fat over rib, tailhead fat) of six control and seven Synovex-S (containing progesterone and 17#-estradiol benzoate)-implanted steers were investigated for their profiles of progesterone, androgens, and their precursors and metabolites. The steers were implanted with Synovex-S and slaughtered after 84 days. The tissues represent different bovine depot fats. Kidney and heart fat deposit at an earlier stage of development than the other subcutaneous fat tissues was investigated. Androgens, their precursors and progesterone were analysed by GC-MS. Estrogens could not be detected by GC-MS. Resulting hormone patterns were compared between treatments and between fat depots. The statistical Kruskal-Wallis-H-test was used for comparison. The adipose tissues showed similar hormone patterns. Only progesterone showed an increased concentration in adipose tissues of implanted steers. The steroid patterns did not show the influence of exogenous steroid administration.     

Flow field and performance of Cross Flow Fans — Experimental and theoretical investigations

Due to the construction and the operaling principle the prediction of performance of Cross Flow Fans (CFF） is difficult and the knowledge about the internal flow regime is limited. To investigate the impact of geometrical parameters on the performance of CFF, experimental investigations, using Particle Imaging Velocimetry (PIV),and CFD calculations were carried out. Some results of PIV measurements and CFD calculations are presented,which give an impression of the internal flow and confirm the numerical calculations.     

Hydroxyl Content of BaTiO3 Nanoparticles with Varied Size

Different types of tetragonal BaTiO₃ particles were synthesized in a wet chemical process including an autoclave treatment. The synthesis and autoclaving medium was varied from isopropyl alcohol to water in different ratios, leading to a size variation of the particles from 38 to 145 nm. By applying combustion analysis of carbon and hydrogen (C/H analysis) released from the samples, it can be demonstrated that the amount of hydroxyl impurities incorporated into the crystal lattices of the particles increases with the water content of the synthesis medium. C/H analysis is a suitable tool for this characterization task as it allows discriminating different sources of these elements, i.e., different impurities. By comparing the self‐synthesized particles with commercial ones, it can be concluded that the particle size has the dominant influence on the tetragonality, if the amount of internal hydroxyl groups is relatively low. In contrast, if the amount of water originating from the internal OH groups is elevated (greater than ~0.4 wt%) an impairment of the tetragonality is caused.     

Report on the 10th International Conference on Autonomous Infrastructure,Management, and Security (AIMS 2016)

This article is a report of the IFIP AIMS 2016, which was held at Universität der Bundeswehr München, Germany from June 20 to June 23, 2016. AIMS 2016 focused on the theme “Management and Security in the Age of Hyperconnectivity”. The AIMS conference positions itself in the network management community as an educational venue for young researchers and Ph.D. students. The AIMS program included keynotes, technical sessions and Ph.D. Workshop sessions, but also hands-on labs and an educational panel for training young academics. The highlights on each of the parts of the AIMS 2016 program are summarized in this article.