Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Marmaray project: Tunnels and stations in BC contract

Istanbul is one of the most famous historical cities in the world. However, the project alignment selected as the best of a range of alignments cannot avoid passing beneath the historical and cultural heritages of Istanbul as well as under ancient and densely inhabited areas of the city. This paper will explain some of the challenges related to the bored tunnels.

Historical buildings are vulnerable. Yet many existing residential and office buildings are old and constructed on minimal foundations. As a consequence, it is vital that any drawdown of groundwater and any ground settlements have to be minimized.

In addition, the connection between the immersed and bored tunnels will be made directly and totally underground, without the usual intermediate shafts and beneath the deep waters of the Bosphorus Strait. This operation needs the utmost control of the tunnel excavation face to ensure its stability and to minimize water ingress. Based on such considerations, tunnel excavation by tunnel boring machine (TBM) using a slurry shield and having the ability to operate under high pore pressures was recommended as the method of excavation for the main running tunnels.

The paper will explain how the design team from Avrasyaconsult – the Employer’s Representative – arrived at the final minimum, specific and functional requirements of the bored tunneling works which are to be carried out using the ‘FIDIC EPC/Turnkey Project’ conditions.     

Titania NOx sensors for exhaust monitoring

Oxide semiconductors have been examined to develop NO_x sensors for exhaust monitoring. Titania doped with trivalent elements, such as Al³⁺, Sc³⁺, Ga³⁺ or In³⁺, has a good sensitivity and selectivity to NO between 450 and 550 °C, and shows rapid response. A sensor probe for monitoring exhaust NO_x has been fabricated. Many kinds of interference gases, such as C₃H₆, CO and SO₂, have been found to have only a slight influence on the sensor response to NO. The influence of O₂ and H₂O is also negligible, except for the cases of 0% H₂O and fuel-rich conditions. In accordance with these results, the sensor probe operates satisfactority in the exhaust gas of various combustion conditions without interference from the various kinds of gas species in the exhaust gases.     

Breakdown Trade-Off Relation of Mechanical Properties via Micro-alloying in Mg–Mn Alloys

The impact of micro-alloying on tensile behavior at strain rates in various ranges is examined using five types of extruded Mg-0.3 at. pct Mn–0.1 at. pct X ternary alloys, where X is selected as a common element, Al, Li, Sn, Y or Zn. Microstructural observations reveal that the average grain size of these extruded alloys is between 1 and 3 μm, and these micro-alloying elements segregate at grain boundaries. In room temperature tensile and compression tests, these results show that the mechanical properties and deformation behavior are influenced by the micro-alloying element, even as a small addition of 0.1 at. pct. Mg–Mn–Y and Mg–Mn-Zn alloys show higher strength and smaller strain rate sensitivity (m-value) among the present alloys, owing to the rate-controlling mechanism as dislocation slip. On the other hand, the Mg–Mn–Li alloy exhibits the largest elongation to failure in tension and the highest strain rate sensitivity, associated with high contribution of grain boundary sliding to deformation. These differences are due to the grain boundary segregation of the micro-alloying elements. Compared to the common Mg alloys, the present ternary alloys also show a trade-off relationship between strength and ductility, which is similar to that of the well-known Mg alloys; however, these properties of the Mg–Mn system ternary alloys could be controlled via the type of micro-alloying elements with a chemical content of 0.1 at. pct.

     

Physical properties of silk fibers treated with ethylene glycol diglycidyl ether by the pad/batch method

This paper deals with the epoxide treatment of silk fabrics by the pad/batch method. The optimum reaction conditions, i.e., NaOH concentration, and reaction temperature were 2.5 g/L and 30°C, respectively. A weight gain of 8.5% was attained at a reaction time of 6 h. This value slightly increased to 10% after 24 h. The reactivity of tyrosine and basic amino acid residues was dependent on the reaction time and did not significantly differ from the results of epoxide-treated silk fiber by the conventional method in tetrachloroethylene. The moisture regain slightly decreased at 4% weight gain and then increased with the epoxide content, exceeding the value of the untreated control. The crease recovery of the epoxide-treated silk fabrics measured in the wet state was significantly improved, whereas that in the dry state was almost unchanged. The rate of photoyellowing of the epoxide-treated silk fabrics by the pad/batch method was reduced significantly compared with that of the untreated control. Among the mechanical properties, elongation at break and tensile modulus remained unchanged, whereas the tensile strength slightly increased following the epoxide reaction. The thermal properties were evaluated by DSC and TGA and on the basis of the dynamic viscoelastic measurements. The DSC curve of the epoxide-treated sample showed a slight increase of the decomposition temperature of silk fibroin. The rate of weight loss determined by TGA remained unchanged regardless of the chemical modification, whereas the peak of loss modulus became broader and shifted to lower temperature. The X-ray diffractograms showed that the crystalline structure of silk fibers was not affected by the reaction with epoxides. © 1993 John Wiley & Sons, Inc.     

Balanced corpus of contemporary written Japanese

The balanced corpus of contemporary written Japanese (BCCWJ) is Japan’s first 100 million words balanced corpus. It consists of three subcorpora (publication subcorpus, library subcorpus, and special-purpose subcorpus) and covers a wide range of text registers including books in general, magazines, newspapers, governmental white papers, best-selling books, an internet bulletin-board, a blog, school textbooks, minutes of the national diet, publicity newsletters of local governments, laws, and poetry verses. A random sampling technique is utilized whenever possible in order to maximize the representativeness of the corpus. The corpus is annotated in terms of dual POS analysis, document structure, and bibliographical information. The BCCWJ is currently accessible in three different ways including Chunagon a web-based interface to the dual POS analysis data. Lastly, results of some pilot evaluation of the corpus with respect to the textual diversity are reported. The analyses include POS distribution, word-class distribution, entropy of orthography, sentence length, and variation of the adjective predicate. High textual diversity is observed in all these analyses.     

Origin of Hole-Trapping States in Solution-Processed Copper(I) Thiocyanate and Defect-Healing by I2 Doping

Solution-processed copper(I) thiocyanate (CuSCN) typically exhibits low crystallinity with short-range order; the defects result in a high density of trap states that limit the device's performance. Despite the extensive electronic applications of CuSCN, its defect properties are not understood in detail. Through X-ray absorption spectroscopy, pristine CuSCN prepared from the standard diethyl sulfide-based recipe is found to contain under-coordinated Cu atoms, pointing to the presence of SCN⁻ vacancies. A defect passivation strategy is introduced by adding solid I₂ to the processing solution. At small concentrations, the iodine is found to exist as I⁻ which can substitute for the missing SCN⁻ ligand, effectively healing the defective sites and restoring the coordination around Cu. Computational study results also verify this point. Applying I₂-doped CuSCN as a p-channel in thin-film transistors shows that the hole mobility increases by more than five times at the optimal doping concentration of 0.5 mol.%. Importantly, the on/off current ratio and the subthreshold characteristics also improve as the I₂ doping method leads to the defect-healing effect while avoiding the creation of detrimental impurity states. An analysis of the capacitance-voltage characteristics corroborates that the trap state density is reduced upon I₂ addition.     

Mobility and Localization of Carriers in a Quasi-One-Dimensional Electron System over Liquid Helium

The properties of a quasi-one-dimensional (Q1D) electron system on liquid helium are considered and the experiments on the carrier transport are presented. It has been shown that the electron mobility changes from high values close to that for bulk helium to very small values as a function of the Q1D channel width. Such a behaviour of is connected to a gradual transition from the regime of the quasi-free movement of the carriers in a Q1D system to the conditions of strong localization of the electrons. In the last case depends on temperature exponentially with the activation energy of a few degrees. It is predicted that in Q1D channels in regime of the localization two optical plasmon branches can exist. One of them (a high frequency branch) is connected with the oscillations of electrons in potential wells and another one has lower frequency and is due to the oscillations of dimples, which are created by localized electrons on the liquid helium surface, in the potential wells. Possible new experiments on study of magnetotransport, plasma oscillations and phase diagram of ordered-disordered states in a Q1D electron system of a finite length over liquid helium are proposed and discussed.     

Effect of poly(acrylic acid) on the preparation of thick silica films by electrophoretic sol–gel deposition of re-dispersed silica particles

Thick silica films were prepared by the electrophoretic sol–gel deposition technique in the presence of poly(acrylic acid) (PAA) using monodispersed silica particles; the particles were prepared by the sol–gel method, pre-heat treated and then re-dispersed in the mixture of H2O and ethanol. The weight of deposited silica films was maximized when 0.2 mass % of PAA against the whole amount of sol was added. The particles constructing the thick silica films were packed densely when the amount of added PAA was less than 0.2 mass%. The weight of the film increased with decrease in the content of H2O in the sol when a fixed amount of PAA was added. After the heat treatment of deposited films at 800 °C, crack-free silica films of about 30 m thickness were prepared. © 1998 Chapman & Hall     

Search intensity versus search diversity: a false trade off?

An implicit tenet of modern search heuristics is that there is a mutually exclusive balance between two desirable goals: search diversity (or distribution), i.e., search through a maximum number of distinct areas, and, search intensity, i.e., a maximum search exploitation within each specific area. We claim that the hypothesis that these goals are mutually exclusive is false in parallel systems. We argue that it is possible to devise methods that exhibit high search intensity and high search diversity during the whole algorithmic execution. It is considered how distance metrics, i.e., functions for measuring diversity (given by the minimum number of local search steps between two solutions) and coordination policies, i.e., mechanisms for directing and redirecting search processes based on the information acquired by the distance metrics, can be used together to integrate a framework for the development of advanced collective search methods that present such desiderata of search intensity and search diversity under simultaneous coexistence. The presented model also avoids the undesirable occurrence of a problem we refer to as the ‘ergometric bike phenomenon’. Finally, this work is one of the very few analysis accomplished on a level of meta-meta-heuristics, because all arguments are independent of specific problems handled (such as scheduling, planning, etc.), of specific solution methods (such as genetic algorithms, simulated annealing, tabu search, etc.) and of specific neighborhood or genetic operators (2-opt, crossover, etc.).