Mechanism of electrodeposition of copper from cupric pyrophosphate solutions

Cathodic polarization curves were measured for copper in cupric pyrophosphate solutions of different concentrations and temperatures. A rotating disc electrode was used to eliminate concentration polarization. For all solutions, two potential regions are distinguishable in the polarization curve; one is less negative than a critical potential E_b around ?0.75 V vs sce (Region I) and the other more negative than E_b (Region II). A weak adsorption of pyrophosphate ions and hence some inhibition of the electrodeposition of copper is expected for Region I but there is no adsorption in Region II. The exchange current density i_o for the copper deposition was obtained by extrapolating the Tafel relation observed in Region II to the rest potential corresponding to the equilibrium potential. The following reaction mechanisms are proposed to explain the dependence of i_o on the concentration of Cu(P₂O₇)^6?₂ and P₂O^4?₇ ions.

Apparent activation energies are estimated to be about 11 kcal/mol in both cases.     

Closed-form forward kinematics solutions of a 4-DOF parallel robot

It is well known that the forward kinematics of parallel robots is a very difficult problem. Closed-form forward kinematics solutions have been reported only to a few special classes of parallel robots. This paper presents closed-form forward kinematics solutions of a 4-DOF parallel robot H4. A 16th order polynomial in a single variable is derived to solve the forward kinematics of the H4. The 16 roots of the polynomial lead to at most 16 different forward kinematics solutions. A numerical verification is also presented.     

Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system

A technique for preparation of a pillar-shaped specimen and its multidirectional observation using a combination of a scanning transmission electron microscope (STEM) and a focused ion beam (FIB) instrument has been developed. The system employs an FIB/STEM compatible holder with a specially designed tilt mechanism, which allows the specimen to be tilted through 360 degrees [T. Yaguchi, M. Konno, T. Kamino, T. Hashimoto, T. Ohnishi, K. Umemura, K. Asayama, Microsc. Microanal. 9 (Suppl. 2) (2003) 118; T. Yaguchi, M. Konno, T. Kamino, T. Hashimoto, T. Ohnishi, M. Watanabe, Microsc. Microanal. 10 (Suppl. 2) (2004) 1030]. This technique was applied to obtain the three-dimensional (3D) elemental distributions around a contact plug of a Si device used in a 90-nm technology. A specimen containing only one contact plug was prepared in the shape of a pillar with a diameter of 200nm and a length of 5mum. Elemental maps were obtained from the pillar specimen using a 200-kV cold-field emission gun (FEG) STEM model HD-2300C equipped with the EDAX genesis X-ray energy-dispersive spectrometry (XEDS) system through a spectrum imaging technique. In this study, elemental distributions of minor elements with weak signals were enhanced by applying principal component analysis (PCA), which is a superior technique to extract weak signals from a large dataset. The distributions of elements, especially the metallization component Ti and minor dopant As in this particular device, were successfully extracted by PCA. Finally, the 3D elemental distributions around the contact plug could be visualized by reconstruction from the tilt series of maps.     

Enzyme structure with two catalytic sites for double-sieve selection of substrate

High-fidelity transfers of genetic information in the central dogma can be achieved by a reaction called editing. The crystal structure of an enzyme with editing activity in translation is presented here at 2.5 angstroms resolution. The enzyme, isoleucyl-transfer RNA synthetase, activates not only the cognate substrate L-isoleucine but also the minimally distinct L-valine in the first, aminoacylation step. Then, in a second, "editing" step, the synthetase itself rapidly hydrolyzes only the valylated products. For this two-step substrate selection, a "double-sieve" mechanism has already been proposed. The present crystal structures of the synthetase in complexes with L-isoleucine and L-valine demonstrate that the first sieve is on the aminoacylation domain containing the Rossmann fold, whereas the second, editing sieve exists on a globular beta-barrel domain that protrudes from the aminoacylation domain.     

Automated 360° profilometry of a three-dimensional diffuse object and its reconstruction by use of the shading model

The 360° profilometry of a three-dimensional (3-D) diffuse object by use of the light intersection and its image reconstruction by surface shading are presented. The lack of data in one direction, which was due to occlusion, was compensated by the projection of two lines of light from different directions. Some experiments to profile objects and their reconstruction by computer are shown. The entire surface model was constructed, and a real shading image was obtained by means of computer graphics.     

Fabrication of piezoelectric multilayer thin-film actuators

In this study, we fabricated multilayer ceramics (MLCs) composed of multilayered Pb(Zr,Ti)O₃ (PZT) piezoelectric thin films with internal electrodes and evaluated their dielectric and piezoelectric properties. The stack of PZT ferroelectric layers (550 nm) and SrRuO₃ (SRO, 80 nm) electrodes were alternatively deposited on Pt/Ti-coated silicon-on-insulator substrates by radio-frequency magnetron sputtering. The MLCs composed of one, three, and five PZT layers were fabricated by the alternate sputtering deposition of PZT ferroelectric layers and SRO electrodes through the movable shadow mask. The capacitances of MLCs were proportionally increased with the number of PZT layers, while their relative dielectric constants were almost same among the each MLC. The MLCs exhibited symmetric and saturated P–E hysteresis loops similar to the conventional PZT thin films. We estimated that the piezoelectric properties of MLCs by FEM simulation, and confirmed that the effective transverse piezoelectric coefficients (d _31,eff ) increased with the number of PZT layers. The piezoelectric coefficients calculated to be d _31,eff  = ?2964 pC/N at 25 PZT layers, which is much higher than those of conventional single-layer piezoelectric thin films.     

A CMOS 1/spl times/-16/spl times/ speed DVD write channel IC

Optical recording demands a meticulous write strategy to control the laser beam power and regulate the phase change layer temperature tightly. The width, height, and delay of a string of short pulses applied to the laser diode need to be adjusted in fine steps, and the writing speed varies widely per applications. A multi-phase phase-locked loop (PLL) tracks a wide range of clock frequencies, and provides a low-jitter time base for write pulses. With two enabling circuit concepts, PLL loop filter voltage folding/unfolding and switch-in of parallel MOS resistors in delay cells, it is possible to operate a PLL to cover a frequency range spanning over three octaves with one VCO. A 10-stage differential VCO is phase-locked to the input channel clock ranging from 26 to 420 MHz (1/spl times/-16/spl times/ DVD speed), and its 20-phase outputs are used to generate write pulses. The pulsewidth and delay are programmed with 120 /spl plusmn/ 40 ps time resolution. The prototype chip fabricated in 0.35 /spl mu/m CMOS occupies 3.5/spl times/3.3 mm/sup 2/, and consumes 294 mW at 3.3 V.