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91.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
92.
A new commercially available diode model is described. This unified model is capable of simulating the widest range of diode technologies of any presently available. The emphasis of this paper is on describing the model's extensive features and flexibility in the different domains of operation and is of particular interest in power applications 相似文献
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The capacitive idling converters derived from the Cuk, SEPIC, Zeta, and flyback topologies allow soft commutation of power switches without the need for additional circuitry, making it possible to increase the switching frequency while maintaining high efficiency 相似文献
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S. Otakulov 《Cybernetics and Systems Analysis》1994,30(3):458-462
Translated from Kibernetika i Sistemnyi Analiz, No. 3, pp. 172–176, May–June, 1994 相似文献
100.
The study presents a hypothesis on how randomness could be simulated by human subjects. Three sources of deviation from randomness are predicted: (1) the preferred application of overlearned production schemata for producing sequences of digits, (2) a wrong concept of randomness, and (3) the impossibility to monitor for redundancies of higher- than those of first-order. Deviations of random generation of digits produced by healthy subjects, patients with chronic frontal lobe damage, and patients with Parkinson's disease from random sequences produced by a computer program can be explained by the differential influence of these factors. Whereas incorrect concepts of randomness and limits on monitoring capacity distinguished all sequences produced by humans from actual random sequences, persistence on a single production strategy distinguished brain-damaged patients from controls. Random generation of digits appears to be a theoretically transparent and clinically useful test of executive function. 相似文献