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Demir H.V. Jun-Fei Zheng Sabnis V.A. Fidaner O. Hanberg J. Harris J.S. Jr. Miller D.A.B. 《Semiconductor Manufacturing, IEEE Transactions on》2005,18(1):182-189
This work reports an easy planarization and passivation approach for the integration of III-V semiconductor devices. Vertically etched III-V semiconductor devices typically require sidewall passivation to suppress leakage currents and planarization of the passivation material for metal interconnection and device integration. It is, however, challenging to planarize all devices at once. This technique offers wafer-scale passivation and planarization that is automatically leveled to the device top in the 1-3-/spl mu/m vicinity surrounding each device. In this method, a dielectric hard mask is used to define the device area. An undercut structure is intentionally created below the hard mask, which is retained during the subsequent polymer spinning and anisotropic polymer etch back. The spin-on polymer that fills in the undercut seals the sidewalls for all the devices across the wafer. After the polymer etch back, the dielectric mask is removed leaving the polymer surrounding each device level with its device top to atomic scale flatness. This integration method is robust and is insensitive to spin-on polymer thickness, polymer etch nonuniformity, and device height difference. It prevents the polymer under the hard mask from etch-induced damage and creates a polymer-free device surface for metallization upon removal of the dielectric mask. We applied this integration technique in fabricating an InP-based photonic switch that consists of a mesa photodiode and a quantum-well waveguide modulator using benzocyclobutene (BCB) polymer. We demonstrated functional integrated photonic switches with high process yield of >90%, high breakdown voltage of >25 V, and low ohmic contact resistance of /spl sim/10 /spl Omega/. To the best of our knowledge, such an integration of a surface-normal photodiode and a lumped electroabsorption modulator with the use of BCB is the first to be implemented on a single substrate. 相似文献
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针对饲料机械采用人工加脂润滑存在的弊端,研究了自动集中润滑系统的工作原理及技术方案,提出了干油泵和压力表等关键部件的结构设计方法.应用性能考核表明,该干油集中润滑系统能满足60~100个润滑点的需求,干油泵的输出压力及输油脂量均达到设计标准.该系统工作稳定,性能可靠,达到了满意的应用效果. 相似文献
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Yu Zheng Haiyi Zhang Li Zhao Liujing Wei Xingyuan Ma Dongzhi Wei 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》2008,83(10):1409-1412
BACKGROUND: 2,3‐Butanediol (2,3‐BD) is a valuable chemical that can be biosynthesized from many kinds of substrates. For commercial biological production of 2,3‐BD, it is desirable to use cheap substrate without pretreatment, such as starch. However, there have been few reports on the production of 2,3‐BD directly from starch. RESULTS: In this work, gene malS coding for α‐amylase (EC 3.2.1.1) precursor was inserted into plasmid pUC18K, and secretory over‐expression of α‐amylase was achieved by engineered Klebsiella pneumoniae. The extracellular recombinant amylase accelerated the hydrolyzation of starch, and one‐step production of 2,3‐BD from starch was carried out by engineered K. pneumoniae. A 2,3‐BD concentration of 3.8 g L?1 and yield of 0.19 g 2,3‐BD g?1 starch were obtained after 24 h fermentation. CONCLUSION: The one‐step production of 2,3‐BD from starch was achieved by secretory over‐expression of amylase in K. pneumoniae. This would simplify the process and reduce the production cost considerably by enabling use of starch with minimal pretreatment. Copyright © 2008 Society of Chemical Industry 相似文献
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Distributed Rule-Regulated Spectrum Sharing 总被引:2,自引:0,他引:2
Lili Cao Haitao Zheng 《Selected Areas in Communications, IEEE Journal on》2008,26(1):130-145
Dynamic spectrum access is a promising technique to use spectrum efficiently. Without being restricted to any prefixed spectrum bands, nodes choose operating spectrum on-demand. Such flexibility, however, makes efficient and fair spectrum access in large-scale networks a great challenge. Prior work in this area focused on explicit coordination where nodes communicate with peers to modify local spectrum allocation, and may heavily stress the communication resource. In this paper, we introduce a distributed spectrum management architecture where nodes share spectrum resource fairly by making independent actions following spectrum rules. We present five spectrum rules to regulate node behavior and maximize system fairness and spectrum utilization, and analyze the associated complexity and overhead. We show analytically and experimentally that the proposed rule-based approach achieves similar performance with the explicit coordination approach, while significantly reducing communication cost. 相似文献
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电信运营企业重组后,中国电信业具有广阔的市场前景.文章分别从知识营销、定位营销、服务营销等方面阐述了电信业务营销的基本思路.同时,分析了在营销的整个过程中的多种营销技巧. 相似文献