一种新的基于水蒸气和水混合流体去胶方法

随着半导体器件尺寸越来越小,光刻胶的剥离,尤其是对硬烘后和离子注入后的光刻胶剥离,被认为是现代半导体器件制造过程中最具挑战的工艺之一。本文提出了一种新的湿法去胶技术从而可以替代现有的湿法剥离工艺和等离子灰化工艺。并针对固化后的光刻胶以及金膜和铬膜,进行了相关实验。然后给出了光刻胶的剥离图片,并分析和讨论了该过程的机理。结果表明,利用水蒸气和水的混合流体射流清洗技术可以很容易去除固化后的光刻胶和金属膜。     

On analysis method for infrared multi-sites system performance

The calculation method about infrared multi-sites passive system location is introduced based on the principle of the weighted least square method, and the variance matrix of estimated error is offered. Through deduction, it can be found out that treated appraise precision can be directly analyzed and deduced without carrying out real measure and reaching estimation value. The simulation result shows that the system performance based on the weighted least square method is much better than the traditional passive location method, and it can be also used for reference to the research of the location algorithm of similar system.     

MINITAB在可靠性数据分析中的应用

本文介绍了MINITAB软件在可靠性数据分析中的应用.给出了恒定应力加速寿命试验数据分析的步骤,并以恒定应力加速寿命试验为例,说明了使用MINITAB分析数据的操作步骤.     

基于FPGA的数字发射机的设计

软件无线电的基本思想是以一个通用、标准、模块化的硬件平台为依托,通过软件编程来实现无线电台的各种功能,从基于硬件、面向用途的电台设计方法中解放出来.随着软件无线电技术的发展,数字调制发射机具有调制中心频率可调、频移可编程、调制方式可重组、调制码速率高、可以与编码器合并扩展功能强等很多优点,成为今后发射机的发展主流.本文...     

一种基于路集矩阵的系统可靠度算法

利用路集矩阵与布尔运算计算系统可靠度是一种新的尝试,这种方法原理简单,易编程实现,然而人们对此方法的研究仅仅停留在实现层面,而在算法效率的提高方面研究较少。该文从网络的最小路集矩阵出发,从提高内存利用率,减少冗余运算人手,在一定程度上提高了算法的效率,并通过实例对改进后算法的有效性做了验证。     

高隔离度Ka波段平面魔T的设计

提出了一种适合于毫米波微波集成电路(M IC)的高隔离度平面魔T结构,该结构属于一种新型的180°平面型混合网络。基于传统的微带混合环原理,引入了微带-槽线过渡的结构,两个端口之间的180°相移通过微带-槽线转换结构实现,从而实现了输出端口的隔离。该结构采用多节阻抗匹配网络,增加了工作带宽,使微带-槽线过渡结的寄生耦合最小化。通过设计可实现得到最小尺寸的槽线终端,降低了微带-槽线过渡结的辐射损耗。引入的等效电路模型有效地提高了平面魔T的设计。借助CST软件,仿真优化了λg/4变换器以及微带-槽线转换结构的阻抗匹配,提高了隔离度。实验结果表明:在工作带宽(34～36 GHz)内,该结构输出端口2和3的隔离度达20 dB,输入端口回波损耗低于18 dB,插入损耗1 dB。     

Vibration control for active seat suspension systems via dynamic output feedback with limited frequency characteristic

This paper investigates the problem of H_∞ control for active seat suspension systems via dynamic output feedback control. A vertical vibration model of human body is introduced in order to make the modeling of seat suspension systems more precise. Meantime, different from the existing H_∞ control methods which conduct disturbance attenuation within the entire frequency domain, this paper addresses the problem of H_∞ control for active seat suspension systems in finite frequency domain to match the characteristics of the human body. By using the generalized Kalman-Yakubovich-Popov (KYP) lemma, the H_∞ norm from the disturbance to the controlled output is decreased over the chosen frequency band between which the human body is extremely sensitive to the vibration, to improve the ride comfort. Considering a practical situation of active seat suspension systems, a dynamic output feedback controller of order equal to the plant is designed, where an effective multiplier expansion is used to convert the controller design to a convex optimization problem. Compared with the entire frequency approach for active seat suspension systems, the finite frequency approach achieves better disturbance attenuation for the concerned frequency range, while the performance constraint is guaranteed in the controller design, which is verified by a practical example with certain and random road disturbances.     

基于光子晶体的远红外与激光兼容伪装材料

现代探测系统由单一工作模式向复合工作模式转变,对伪装材料的光谱特性提出了某些特殊要求.光子晶体是一种新型的人工结构功能材料,基于光子禁带的高反射特性,可以实现红外伪装;基于一维掺杂光子晶体,可以实现远红外与激光兼容伪装.设计了一种基于光子晶体的远红外与激光兼容伪装材料,利用薄膜光学理论的特征矩阵法计算了反射光谱,发现可...     

浅谈如何引导企业参与科普活动——从企业科普行为看科普活动市场化策略

本文以近年来国内外典型的企业科普行为为实证,同时借鉴北京奥运会和上海世博会的市场开发经验,运用案例分析法探寻科普活动市场化的策略,为今后高效引入企业开展科普活动提供参考。     

S波段大功率GaAs PHEMT单片放大器

GaAs单片集成电路具有体积小、质量轻和可靠性高等特性,已经成为微波领域重要的器件。采用MBE技术生长出双面掺杂AlGaAs/InGaAs PHEMT结构的外延材料,研制了高效率的GaAs PHEMT器件,S波段功率附加效率大于55%。建立了基于EEHEMT的大信号模型,利用ADS软件搭建了有耗匹配的二级放大电路拓扑结构,进行最佳效率匹配,得到优化电路。采用4英寸(1英寸=2.54cm)GaAs0.35μm标准工艺研制了AlGaAs/InGaAs/GaAsPHEMT MMIC电路,测试结果表明,在测试频率为2.2~3.4GHz,测试电压VDS为10V时,输出功率大于12W,功率增益大于22dB,功率附加效率大于40%。