Swords to plowshares: Shock wave applications to advanced lithography

xtreme ltra iolet ithography (EUVL) seeks to apply radiation in a wavelength region centered near 13 nm to produce microcircuits having feature sizes 0.1 micron or less. A critical requirement for the commercial application of this technology is the development of an economical, compact source of this radiation which is suitable for lithographic applications. A good candidate is a laser-plasma source, which is generated by the interaction of an intermediate intensity laser pulse (up to 10¹² W/cm²) with a metallic target. While such a source has radiative characteristics which satisfy the needs of an EUVL source, the debris generated during the laser-target interaction strikes at the economy of the source. Here, we review the use of concepts and computer modeling, originally developed for hypervelocity impact analysis, to study this problem.     

New Tractable Classes From Old

The constraint satisfaction problem is known to be NP-hard in general, but a number of restrictions of the problem have been identified over the years which ensure tractability. This paper introduces two simple methods of combining two or more tractable classes over disjoint domains, in order to synthesise larger, more expressive tractable classes. We demonstrate that the classes so obtained are genuinely novel, and have not been previously identified. In addition, we use algebraic techniques to extend the tractable classes which we identify, and to show that the algorithms for solving these extended classes can be less than obvious.     

Golden interfaces: The Surface of Self-Assembled Monolayers

Self-assembled monolayers (SAMs) of alkanethiols and disulfides on gold form organic interfaces with properties largely controlled by the end groups of the molecules composing the film. SAMs provide a unique link between the science of organic surfaces and technologies that seek to exploit their adaptable character. Many techniques are useful for probing the structure of SAMs although only scanning tunneling microscopy (STM) at picoamperes reveals the details of the packing of their end groups at the sub-angstrom level. This review demonstrates that STM effectively tests new types of control over the microscopic structure–property relationships characteristic of SAMs on gold that should prove useful to their application.