Development of an end-point detector for parylene deposition process

Parylene is an emerging material for MEMS. It is an organic material that is grown by using the chemical vapor deposition method at room temperature. The deposition thickness is commonly controlled by the amount of solid-phase dimer loaded in a sublimation chamber. In a conventional deposition machine, the end point of the process is designated by the moment the dimer is exhausted. However, this end-of-process criterion does not offer precise, repeatable control of film thickness. We present the results of the development of an in situ end-point detector for a Parylene chemical vapor deposition process. The detector is based on the thermal transfer principle and can be implemented on commercial parylene deposition systems with minimal system modification. Such a sensor enables a user to stop the deposition when a targeted thickness is reached. The end point detector is very simple to implement on existing parylene deposition systems. A series of such sensors with different target deposition thickness would allow extraction of the actual deposition rate within a deposition run.     

单线年产30万吨水煤浆生产线的设计

介绍了山东枣庄矿业(集团)公司八一燎原水煤浆公司单线30万t水谋浆生产线设计的原则及其关键技术的研制开发情况。     

空调风机的特点及合理选型

介绍了空调风机的特点，并通过实例说明了风机合理的选型过程。     

Ultrasonic thin-walled tube wave structure for sensing devices

Theoretical and experimental investigations of thin-walled tube acoustic wave devices for gravimetric sensing applications are presented. Integrated sensor configurations have been demonstrated by employing a sol-gel processed thin piezoelectric lead zirconate titanate (PZT) film. This was coated coaxially on stainless steel tubes and interdigital transducers (IDT) fabricated as the transmitter and receiver on the curved tube surfaces. We have observed tube waves along both the axial and circumferential directions between 1 and 6.6 MHz. We have also analyzed the mass sensitivities of different modes propagating along the tubes and shown that high mass sensitivity can be achieved by keeping the tube wall thin     

Stabilization of wave equations coupled in parallel by viscous damping

In this article, we consider stabilization of two wave equations coupled in parallel by viscous damping. Uniform exponential stabilization can be achieved when damping is presented in two equations. In general only strong stabilization can be achieved when damping is present in one equation, while uniform exponential stabilization is still possible for some special cases.     

Stability of Mixtoxantrone Hydrochloride in Solution

A stability-indicating reversed-phase high performance liquid chromatographic method was developed for the detection of mitoxantrone HC1 and its degradation products under accelerated degradation conditions. The degradation kinetics of mitoxantrone HC1 in aqueous solution over a pH range of 1.18 to 7.20 and its stability in propylene glycol-or polyethylene glycol 400-based solutions were investigated. The observed rate constants were shown to follow apparent first-order kinetics in all cases. The pH-rate profile shows that maximum stability of mitoxantrone HC1 was obtained at pH 4.01. No general acid or base catalysis from acetate or phosphate buffer species was observed. The catalysis rate constants on the protonated mitoxantrone imposed by hydrogen ion water and hydroxy ion were determined to be 3.72 × 10 min^-1 5.64 × 10-min^-1 and 1.108 × 10^-2min^-1, respectively. The degradation rate constants of mitoxantrone affected by different ionic strength systems. Irradiation with 254 nm UV light at 25±0.5°C was found when canpared with the light-protected controls. Incorporation of nonaqueous propylene glycol or polyethylene glycol in the pH 4.01 mitoxantrone solution shows an increase in its stability at 502±0.5°C.     

化学镀Ni—P镀层的X射线衍射研究

根据X射线衍射分析结果,对化学镀高P(含P>11wt％或19at％)Ni-P镀层加热时效时,镀层成分和加热温度对结构转变的影响作了研究,结果表明,高P共晶、过共晶(含P>11wt％或19at％)合金的结构转变有如下特征:(1)相同加热时效条件下,Ni-P合金的结构转变与成分有密切关系:(2)对同一成分的过共晶合金,Ni-P合金的结构转变与时效温度密切相关;(3)过共晶合金在290～360℃温度范围内时效处理,出现Ni_xP_y介稳相,X射线衍射分析认为Ni_xP_y为Ni_(12)P_5。     

用αβ谱仪测量人工αβ放射性气溶胶体积活度的试验研究

本文介绍了用αβ谱仪系统同时测量αβ谱、实现Ｒｎ／Ｔｈ子体补偿、确定超铀α核素气溶胶体积活度及人工放射性气溶胶总β体积活度的技术途径。利用ＲａＡ、ＲａＣ′ａ峰的二段时间计数可确定空气中ＲａＡ、ＲａＢ、ＲａＣ的气溶胶体积活度，相应的，也能给出ＲａＢ、ＲａＣ对总β计数的贡献。根据一般环境条件下的平衡比，用ＴｈＣ′的。计数修正Ｔｈ子体对αβ测量的影响。￣［２３９］ｐｕ或／和￣［２４１］Ａｍ人工核素的α计数，可通过两段时间分别扣除ＲａＡ、ＲａＣ′拖尾的方法确定；β计数分别扣除Ｒｎ／Ｔｈ子体β贡献即可确定。在本文规定的测量条件下，对室内天然Ｒｎ子体水平在１５Ｂｑ／ｍ￣３以下，超铀α核素气溶胶体积活度的测量下限可达到０．１Ｂｑ／ｍ￣３；即使在７５Ｂｑ／ｍ￣３环境下，人工核素总β的测量下限也可达ｌＢｑ／ｍ￣３以下。