A model of self-limiting residual acid diffusion for pattern doubling

Pattern doubling by cross-linking of a spacer triggered by residual acid diffusion from a previously developed primary structure into the spacer is a possible option to create the necessary structure widths for the 32 nm node with current exposure technology by pattern doubling. A particular advantage of this process step would be the self-alignment to the primary structure, which would render a second exposure step unnecessary. In the paper, we present a new prototypical model of the bake step of this process and discuss the dependency of the desired behavior on parameters of the model.     

Polymerization of epoxy resins initiated by metal complexes

BACKGROUND: Processing parameters and material properties of epoxy resins can be vastly influenced by choice of curing agent. In this work, metal complexes were investigated as initiators for anionic and cationic epoxide polymerization. Systems for thermally induced and electron beam‐induced curing are described. RESULTS: Zinc or cobalt imidazole complexes of the type [M(imidazole)₂(anion)₂] are efficient initiators for anionic polymerization of glycidyl‐based epoxy resins. The complexes can be employed to prepare tailored resin systems ranging from fast curing systems at slightly elevated temperatures to systems with very high thermal latencies curable at temperatures far above 150 °C. Silver complexes [Ag(L)_n]SbF₆ (L = crown ether or alkene) are highly efficient initiators for cationic curing and low initiator contents of around 1% are sufficient to reach high degrees of crosslinking. The complexes are excellent initiators for both thermally induced and electron beam‐induced polymerizations. CONCLUSION: Metal complexes are powerful initiators for the homopolymerization of epoxy resins and can be designed not only for anionic and cationic polymerization but also for thermal and radiation curing. Based on this study and additional work, a library can be compiled which allows retrieval of optimized metal–ligand–anion combinations and adjustment of the initiators to the respective processing and material demands. Copyright © 2009 Society of Chemical Industry     

Rohdichtebestimmung von Holzwerkstoffen mittels Computertomographie

In this work the vertical density profiles of three different commercial wood based panels (particleboard, MDF, OSB) were investigated using a conventional X-ray method as well as an industrial computer tomography (CT) method. The reconstructed gray level images of the obtained CT data were used to calculate a standardized density profile of each panel. The results showed that the measured (X-ray) and the calculated (CT) density profiles of the panels fit well in the core layer of the boards; in the most outer surface layers some anomalies in the results can occur in both methods. The advantage in the implementation and evaluation of the more complicated CT measurement compared to the conventional X-ray procedure is the three-dimensional data structure and the opportunity to do appropriate structural analysis of the investigated wood based panels.     

Untersuchung des einflusses molekularer parameter auf morphologie und eigenschaften von polyethylenen niedriger dichte

Based on the example of PE-LD grades and on model substances obtained by preparative fractionation (fractions in the molecular weight range M?_w = 1.2 ? 390·10⁴ g/mol), comprehensive investigations regarding the problems of structure/properties have been carried out. The correlations of M?_w with 15 physical and application technological perameters have been investigated taking into account the reaction mechanism during the manufacturing of PE-LD in the tubular and agitated autoclave reactor, resulting in the formation of so-called primary structure perameters M?_n, M?_w, molar mass distribution, short chain branching and long chain branching. For the interpretation of the results, among other factors, also the morphological conditions have been taken into consideration, which in connection with the molecular parameters reveal — for specific M?_w-ranges — strong changes and saturation ranges, resp., for the physical and application technological properties.     

Cross-linking of macromolecules in coal

Cross-linking in bituminous coals has been studied by internal friction methods. A low temperature damping peak occurring at 130 K for a frequency of 1 Hz has been used to deduce the character of cross-linking in coal. The molecular units responsible for the internal friction are found to be methylene chains connecting ring structures of the macromolecular material. The number varies progressively from a Braunkohle with 67wt% carbon to anthracites of > 90 wt% carbon. The number goes through a maximum at ≈80 wt%C, showing that the cross-link density reaches a maximum at that carbon level. It falls of markedly at higher carbon concentrations and remains at a low level > 85 wt%C. These findings correlate well with models of coal structure.     

Optische Methoden zur Charakterisierung von hochpolymeren Fasern. 1. Methodik der Interferenzmikroskopie

Density and orientation describe, besides other characteristics, the structure of high polymers. They can be obtained as a function of the radius by measurement of the refraction index of the fibre. The influence of refraction of light on the obtained index of refraction n(r) is demonstrated by an optical model of the fibre. For fibres having a radius R < 30 μm and changes in the refraction index < 0.02 the influence of refraction is less than ± 0.0002 and therefore of no significance for most textile fibres. Important is the exact adaption of the refraction index of the embeding medium to the margin of the fibre. The computed index at the margin of the fibre takes always the refraction index of the embeding medium. An incorrect adaption can be traced up to 0.2·R into the fibre. A spline function used for the approximation of the relative displacement of interference fringes gives the opportunity to calculate extreme variations in refractive index, this is demonstrated using hollow fibres filled with paraffin-oil. Using a HeNe-laser interference-holographie became possible.     

Statistical Analysis of the Intergranular Film Thickness in Silicon Nitride Ceramics

Silicon nitride materials typically reveal thin amorphous intergranular films along grain boundaries, with only the exception of special boundaries. It is known that such grainboundary films strongly affect the high-temperature properties of the bulk material. High-resolution electron microscopy (HREM) was used to study these amorphous films in different Si₃N₄ ceramics. The observed film thicknesses at grain boundaries in these materials varied between 5and 15 Å. It was shown that the grain-boundary film thickness strongly depends on film chemistry. Careful inspections of film-thickness measurements across grain boundaries in a given material suggest that the film widths vary on the order of 1 Å. Therefore, a quantitative evaluation should allow for the determination of the standard deviation of the film thickness. The amorphous film widths along grain boundaries in four materials were measured over the entire length (up to 1 μm) of the grain boundary between two triple points. Forty to fifty data points were evaluated for each boundary, giving a Gaussian-like distribution of the film thickness around a median value, which corresponded well with the film width measured from single HREM micrographs. The accuracy achieved by the statistical method was better than ± 1 Å.     

An XPS investigation of polymer surface dynamics. I. A study of surface modified by CF4 and CF4/CH4 plasmas

For making the surface hydrophobic, poly(ethylene terephthalate) (PET) films were subjected to treatment by CF₄ and CF₄/CH₄ plasmas, and the PET fabrics, to impregnation (padding) with Oleophobol S for comparison. The electronic structure of the modified surface was differenentiated by XPS (ESCA). The surface dynamics upon heating and dipping into water was investigated by the angle-dependent XPS technique. Application of the XPS technique to these topics gave a wealth of information. © 1993 John Wiley & Sons, Inc.