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801.
吴英  蒋博  邸克  邹新海  刘宇 《压电与声光》2020,42(3):409-412
微机电系统(MEMS)陀螺仪具有体积小、精度高、应用前景广等优点。由于惯性器件材料的热阻值、热应力差异,对应传感器输出会产生温度滞后效应,严重影响了陀螺仪零偏稳定性。针对传统陀螺仪温度误差补偿法适应性较差的问题,该文利用滑动平均算法(MAA),提出了一种温度滞后零偏补偿模型,在全温范围内对MEMS陀螺仪零偏进行补偿。实验结果表明,补偿后陀螺仪工作温度在-30~+90 ℃变化时,对应的零偏标准偏差从0.21 (°)/s降至0.02 (°)/s,零偏稳定性提升了近1个数量级。  相似文献   
802.
微细厚铜金属互连线不仅具有耐大电流的能力,而且具有低的电阻值,在MEMS领域具有重要的应用。采用分布式涂胶法,通过控制各工艺参数,在PC板衬底上制备了厚的光刻胶掩模图形。利用恒流电镀法在PC板衬底上沉积出宽度为5μm,间距为5μm的厚金属铜互联线,可为厚金属互连工艺提供一定的技术支持。  相似文献   
803.
Flow cytometry can simultaneously measure and analyze multiple properties of single cells or particles with high sensitivity and precision. Yet, conventional flow cytometers have fundamental limitations with regards to analyzing particles larger than about 70 μm, analyzing at flow rates greater than a few hundred microliters per minute, and providing analysis rates greater than 50,000 per second. To overcome these limits, we have developed multinode acoustic focusing flow cells that can position particles (as small as a red blood cell and as large as 107 μm in diameter) into as many as 37 parallel flow streams. We demonstrate the potential of such flow cells for the development of high throughput, parallel flow cytometers by precision focusing of flow cytometry alignment microspheres, red blood cells, and the analysis of a CD4+ cellular immunophenotyping assay. This approach will have significant impact toward the creation of high throughput flow cytometers for rare cell detection applications (e.g., circulating tumor cells), applications requiring large particle analysis, and high volume flow cytometry.  相似文献   
804.
Sahu PP 《Applied optics》2012,51(14):2601-2605
In this paper, we have introduced optically controlled two-mode interference (OTMI) coupler having silicon core and GaAsInP cladding as an all-optical switch. By taking advantage of refractive index modulation by launching optical pulse into cladding region of TMI waveguide, we have shown optically controlled switching operation. We have studied optical pulse-controlled coupling characteristics of the proposed device by using a simple mathematical model on the basis of sinusoidal modes. The device length is less than that of previous work. It is also seen that the cross talk of the OTMI switch is not significantly increased with fabrication tolerances (±δw) in comparison with previous work.  相似文献   
805.
系统地研究了三峡电站水轮机叶片的铸造工艺,并利用数值模拟技术对叶片铸件在充型过程的流场、凝固过程的温度场和应力场进行模拟计算,优化叶片的铸造工艺方案,验证工艺的可行性。利用该工艺方案批量生产的三峡叶片内外部质量优良,加工余量分布均匀,目前已应用于三峡右岸电站及地下机组。  相似文献   
806.
基于碳纳米管的微纳单元的实验研究   总被引:1,自引:0,他引:1  
利用碳纳米管生长技术和微加工技术,开展了微纳单元的实验方法研究,探索了"管压电极"和"电极压管"的微纳单元制备工艺.结构表征和电学特性测试结果表明,这两种工艺均可以加工出具有欧姆接触或者是肖特基接触的微纳单元,但"管压电极"工艺具有过程简单、成本低等特点,为基于碳纳米管的微纳单元的集成化制备工艺提供了新的思路.  相似文献   
807.
A 110/137 GHz radiometer pair with collimated antenna pattern is being used to diagnose optically thin harmonic electron cyclotron emission from hot electrons in LDX. Signal levels of 0.1-1 keV and 110/137 ratios of 2-4 stationary with ECRH power have been observed. The large plasma core magnetic field gradient causes all relevant harmonics to be simultaneously viewed over a angle(k,B) angular range of 0°-90° representing a unique geometry for interpretation of ECE in terms of hot electron temperature and density.  相似文献   
808.
Amorphous carbon (a-C) nanoclusters were synthesized by the implantation of carbon ions (C-) into thermally grown silicon dioxide film (-500 nm thick) on a Si (100) wafer and processed by high temperature thermal annealing. The carbon ions were implanted with an energy of 70 keV at a fluence of 5 x 10(17) atoms/cm2. The implanted samples were annealed at 1100 degrees C for different time periods in a gas mixture of 96% Ar+4% H2. Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and High Resolution Transmission Electron Microscopy (HRTEM) were used to study the structural properties of both the as-implanted and annealed samples. HRTEM reveals the formation of nanostructures in the annealed samples. The Raman spectroscopy also confirms the formation of carbon nano-clusters in the samples annealed for 10 min, 30 min, 60 min and 90 min. No Raman features originating from the carbon-clusters are observed for the sample annealed further to 120 min, indicating a complete loss of implanted carbon from the SiO2 layer. The loss of the implanted carbon in the 120 min annealed sample from the SiO2 layer was also observed in the XPS depth profile measurements. Room temperature photoluminescence (PL) spectroscopy revealed visible emissions from the samples pointing to carbon ion induced defects as the origin of a broad 2.0-2.4 eV band, and the intrinsic defects in SiO2 as the possible origin of the -2.9 eV bands. In low temperature photoluminescence spectra, two sharp and intense photoluminescence lines at -3.31 eV and -3.34 eV appear for the samples annealed for 90 min and 120 min, whereas no such bands are observed in the samples annealed for 10 min, 30 min, and 60 min. The Si nano-clusters forming at the Si-SiO2 interface could be the origin of these intense peaks.  相似文献   
809.
The toxic effects of ZnO nanoparticles (nano-ZnO) (1-100 microg/mL) suspended in DMEM were examined in human A549 cells, HepG2 cells, human skin fibroblast cells, human skin keratinocytes, and rat primary neuronal cells for 24 h. Nano-ZnO induced dose dependent cytotoxicity and damaged cell membranes. Cell death was not mediated by reactive oxygen species (ROS) or apoptosis. Nano-ZnO induced DNA damage in rat primary neuronal cells, human fibroblasts, and A549 cells. The cytotoxicity of nano-ZnO in DMEM supplemented with 10% FBS, instead of serum free DMEM, was also examined in the A549 cells, human skin fibroblast cells, and human skin keratinocytes. The levels of cytotoxicity induced were similar to those tested without FBS; in addition, ROS was observed. These results indicate that the cause of cytotoxicity is medium dependent and imply that cellular growth conditions may play a significant role in induction of cytotoxicity and DNA damage by nano-ZnO.  相似文献   
810.
针对目前学生采用深层次学习方式占比偏低的问题,提出从“教”入手对计算机网络课程优化设计,从多维度引导和激发学生深层次学习,从教学内容、教学方法、实践环节、评价机制方面阐述面向深层学习的课程优化设计总体思路,并通过几个具体案例介绍课程优化的细节设计,最后以综合实验为例,介绍相应的实验目的、实验内容设置和实验方法。  相似文献   
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