Phase‐shifting differential interference contrast microscope with Savart shear prism and rotatable analyser

A novel differential interference contrast microscope (DICM) is proposed in this research. It is constituted by inserting a Savart shear prism between the objective and sample of a polarising microscope having a rotatable analyser as the phase‐shifter, and it is with the ability to enhance image contrast using the principle of shearing interferometry. This letter is to introduce the configuration, interpret the interference patterns and present the experimental setup of the DICM. In addition, this letter is to display the experimental results from the uses of the setup; the results demonstrate the validity and ability of the DICM.     

1 100 kV GIS用断路器的设计

介绍了所研制的1 100 kV、50 kA GIS用断路器的技术规范、基本结构及合闸电阻的合理布置;利用商用Maxwell2D,3D软件及专用的程序,对断路器灭弧室的电场分布情况进行了分析,对合闸电阻的热容量进行了计算,并做了相关的试验验证,证明该型断路器的开断性能良好,其所配用的合闸电阻的热容量满足使用要求。     

Numerical modelling of a low power non-transferred arc plasma reactor for methane conversion

Thermal flow characteristics and the methane conversion reaction in a low power arc plasma reactor for efficient storage and transport of methane, which is the main component of shale gas, were simulated. The temperature and velocity distributions were calculated according to the type of discharge gases and arc current level by a self-developed magnetohydrodynamics (MHD) code and a commercial ANSYS-FLUENT code; the transport of chemical species was analyzed as including the chemical reactions of methane conversion. The simulated results were verified by the comparison of calculated and measured arc voltages with permissible low error as under 4%. Three C₂ hydrocarbon gases with ethane (C₂H₆), ethylene (C₂H₄), and acetylene (C₂H₂) were selected as the converted species of methane from experimental data. The mass fraction of C₂ hydrocarbons and hydrogen as the product of the conversion reaction at the reactor was also calculated. Those values show good agreement with the actual experimental results in that the major conversion reaction occurred in C₂H₂ and hydrogen, and the conversions to C₂H₆, C₂H₄, and hydrogen were minor reactions of methane pyrolysis conversion.     

Relation between etching profile and voltage–current shape of sintered SiC etching by atmospheric pressure plasma

Sintered silicon carbide (SiC) was etched by a dielectric barrier discharge source. A high voltage bipolar pulse was used with helium gas for the plasma generation. One stable filament plasma was generated and could be used for SiC etching. As the processing gas (NF₃) mixing rate increased, the width and depth of the etching profile became narrower and deeper. The differentiated V–Q Lissajous method was used for measuring the capacitances (C_eq) of the electrode after the plasma turned on. The width of the etching profile was proportional to C_eq. As the current peak value I_smx of the substrate current increased, the volume removal rate of SiC increased. The etch depth was proportional to the ratio of I_smx to C_eq. Additionally, because of the different characteristics of the plasma disks on SiC substrate by the voltage polarity, the etching profile was unstable. However, in high NF₃ mixing process, the etching profile became stable and deeper.     

Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

Application of a Novel Method for Machine Performance Degradation Assessment Based on Gaussian Mixture Model and Logistic Regression

The currently prevalent machine performance degradation assessment techniques involve estimating a machine’s current condition based upon the recognition of indications of failure features,which entail complete data collected in different conditions.However,failure data are always hard to acquire,thus making those techniques hard to be applied.In this paper,a novel method which does not need failure history data is introduced.Wavelet packet decomposition(WPD) is used to extract features from raw signals,principal component analysis(PCA) is utilized to reduce feature dimensions,and Gaussian mixture model(GMM) is then applied to approximate the feature space distributions.Single-channel confidence value(SCV) is calculated by the overlap between GMM of the monitoring condition and that of the normal condition,which can indicate the performance of single-channel.Furthermore,multi-channel confidence value(MCV),which can be deemed as the overall performance index of multi-channel,is calculated via logistic regression(LR) and that the task of decision-level sensor fusion is also completed.Both SCV and MCV can serve as the basis on which proactive maintenance measures can be taken,thus preventing machine breakdown.The method has been adopted to assess the performance of the turbine of a centrifugal compressor in a factory of Petro-China,and the result shows that it can effectively complete this task.The proposed method has engineering significance for machine performance degradation assessment.     

回转窑轮带在受接触力时的非线性有限元仿真

用有限元非线性分析方法，建立回转窑轮带和托轮接触有限元分析模型；并通过编程计算出轮带和托轮的最佳接触刚度；通过仿真，可绘出整个轮带的应力分布图和变形图。与理论算法比较，此方法所得结果更直接，观察结果更方便，且与理论结果很相近。     

不同形态白炭黑对胎面胶性能的影响

通过选用不同形态的白炭黑,来研究其在同一个胎面胶中的硫化特性和物理机械性能。研究表明,其对胶料的性能影响不大,只是粉末状样品由于颗粒较小,比重较轻,较易产生粉尘较易飞扬,在密炼过程中容易对环境造成污染以及给工人身心健康带来负面影响。故在生产过程中,即使在成本小量增加的前提下也应该选用颗粒状等较不易产生粉尘的白炭黑来使用,以免对员工健康造成危害。     

Interface characterization of Al/Cu 2-ply composites under various loading conditions

The effects of reduction ratio during roll bonding on the microstructural evolution at interface and subsequent mechanical properties of roll-bonded Al/Cu 2-ply sheets were investigated. The interface microstructures for several Al/Cu 2-ply sheets fabricated under different reduction ratios between 30% and 65% were verified by transmission electron microscopy (TEM). Taking the difference of interface microstructure into consideration, 3-point bending and peel tests were performed for obtaining flexural and bonding strengths for Al/Cu 2-ply sheets. The effect of the quantified areas of metallurgical bonding at interfaces on the bonding strength was also discussed. The results show that both the bonding and flexural strengths for Al/Cu 2-ply sheets are reduced by decreasing the reduction ratio during the roll bonding process, which is strongly correlated with the interface microstructure. This was especially verified by observing the interface delamination from the 3-point bent samples.