Effect of Pre-heat and Inert Gas Species on Cryogenic Aerosol Cleaning Performance in Semiconductor Manufacturing

Cryogenic aerosol cleaning is a dry cleaning method used in the back end of line (BEOL) semiconductor manufacturing to remove defects from planar hydrophobic surfaces such as SiCOH and SiCxNyHz. Cryogenic aerosol cleaning is preferred over conventional wet cleaning methods as it is a non-contact cleaning method, which uses inert gases to generate sub-micrometer-sized solid aerosol particles that physically remove nanometer-sized contaminants on wafer surfaces. Particle removal mechanism involves detachment of the particles upon impact with aerosol, diffusion, and finally entrainment away from the wafer. In BEOL metal line patterning, particles on the dielectric isolation surfaces translate through the subsequent lithography and copper fill steps in to single or multiple metal line open defects that are yield killers. In this study, we show that the particle removal performance of the standard aerosol cleaning can be enhanced by pre-heating the wafer and use of a higher molecular weight inert gas, namely Ar, for aerosol generation. Both the addition of a Pre-heat step and the use of Ar as the aerosol source showed 47–52% reduction in single and multiple line opens detected through wafer electrical tests during high volume semiconductor manufacturing process.     

Thermal performance comparisons between passive solar and conventional housing in an Irish climate

The thermal performance of a passive solar house in Ireland having high energy conservation standards is compared with that of a similar sized conventional dwelling house. In both cases the performance over a meteorological Test Reference Year is assessed using climatically responsive models developed experimentally which predict their internal temperature without heating.

The results indicate that the conventional house required over three times as much auxiliary heating as the passive solar house. Solar gain accounted for over half the gross heat demand in the solar house compared to 13% in the bungalow. An added advantage of the increased utilization of solar gain was the estimated reduction in the heating season from nine to six months.     

Public reaction to wind development in California

Substantial controversy has been produced from the location of over 4000 wind turbines in San Gorgonio Pass, California. The principal point of controversy is the conflicting land use which results from developing wind power in a populated area. A public opinion survey was conducted which demonstrated that the vocal opposition to the wind turbines so commonly expressed is not borne out in fact. While there is indeed some opposition to the development of wind power at this site, particularly in terms of aesthetic degradation, the majority of respondents favoured the development. This level of approval will be of interest to those developing large wind projects elsewhere.     

Solar stills for production of distilled water

Solar stills have been designed to produce water for use in teaching and research laboratories. Various designs and configurations have been constructed and tested over the past 10 years. The original double-surfaced cascade stills (stills A and B) were constructed in aluminium and were rather expensive. Later models termed Series D and E were of galvanised mild steel with stainless steel distillate drains and safety overflow drains. These galvanised steel units suffered from severe corrosion after a few years of operation. The latest design series F, is built in aluminium with stainless steel distillate drains and automatic feed valves. All of the stills produce very pure distilled water (conductance ～1.5 × 10^?6 Ω^?1 cm^?1; pH 6.8–7.4) at a cost which is below that of conventional electrically heated stills.     

Morphological and Elemental Investigations on Co–Fe–B–O Thin Films Deposited by Pulsed Laser Deposition for Alkaline Water Oxidation: Charge Exchange Efficiency as the Prevailing Factor in Comparison with the Adsorption Process

Catalysis Letters - Mixed transition-metals oxide electrocatalysts have shown huge potential for electrochemical water oxidation due to their earth abundance, low cost and excellent...     

Microstructure and Mechanical Property Correlation of Mg-Si Alloys

Silicon - The present work aims at understanding the microstructure and mechanical property correlation of hypo (Mg-0.5, 0.7, 1.15 wt% Si) and hyper (Mg-2, 4, 6, 8 and 10 wt% Si) eutectic binary...     

An Effective Approach on Attaining Enhanced Silicon Solar Cell Performance Through Sputter Deposited Perovskite Thin Films

Silicon - Antireflection coatings (ARCs) have become one of the key techniques for mass production of Si solar cells. They are generally performed by vacuum processes such as thermal evaporation,...     

Mechanical properties of SiCp/Al2O3 ceramic matrix composites prepared by directed oxidation of an aluminum alloy

Silicon carbide particulate reinforced alumina matrix composites were fabricated using DIrected Metal OXidation (DIMOX) process. Continuous oxidation of an Al-Si-Mg-Zn alloy with appropriate dopants along with a preform of silicon carbide has led to the formation of alumina matrix surrounding silicon carbide particulates. SiC_p/Al₂O₃ ceramic matrix composites fabricated by the DIMOX process, possess enhanced mechanical properties such as flexural strength, fracture toughness and wear resistance, all at an affordable cost of fabrication. SiC_p/Al₂O₃ matrix composites were investigated for mechanical properties such as flexural strength, fracture toughness and hardness; the composite specimens were evaluated using standard procedures recommended by the ASTM. The SiC_p/Al₂O₃ ceramic matrix composites with SiC volume fractions from 0.35 to 0.43 were found to possess average bend strength in range 158-230 MPa and fracture toughness was found to be in range of 5.61-4.01 MPa√m. The specimen fractured under three-point loading as observed under scanning electron microscope was found to fail in brittle manner being the dominant mode. Further the composites were found to possess lower levels of porosity, among those prepared by DIMOX process.