Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

激光熔覆Ni基SiC合金涂层组织与性能的研究

利用5kWCO2连续波激光器在16Mn钢基材表面对含20%(体积比)SiC陶瓷粉末的镍基自熔性合金粉末进行激光熔覆得到Ni基SiC合金涂层(NiSiC)。研究了合金涂层的组织形貌及相结构,并用单纯的镍基合金涂层(Ni60)进行了显微硬度及滑动磨损性能的对比试验。结果表明,NiSiC合金涂层由γ枝晶及其间的共晶组织组成,主要组成相为γ-Ni,γ-(Ni,Fe)固溶体和(Cr,Fe)7C3,Cr23C6及(Cr,Si)3Ni3Si等化合物。添加SiC的镍基合金涂层NiSiC比单纯的镍基合金涂层Ni60具有较高的硬度和耐磨性。     

Kinetic of CO2 absorption and carbamate formation in aqueous solutions of diethanolamine

The absorption rates of CO₂ into aqueous solutions of Diethanolamine (DEA) with varying concentrations from 0.2 to 4M and temperature range from 293 to 323 K were measured by using a laboratory stirred reactor. The CO₂ partial pressure was varied in a range that the reaction would occur in pseudo first order regime. Experimental data were analyzed and the kinetic parameters associated with the reaction were determined. The activation energy for the deprotonation of the intermediate zwitterion was estimated at about 11.4 kcal/mol. The contribution of carbamate formation to the overall absorbed CO₂ was experimentally evaluated and found to be of the order of 100%.     

Properties of nanoporous organosilicate hybrid thin films with a bimodal pore size distribution

Low dielectric poly[methylsilsesquioxane‐ran‐trifluoropropylsilsesquioxane‐ran‐(2,4,6,8‐tetramethyl‐2,4,6,8‐tetraethylenecyclotetrasiloxane)silsesquioxane]s {P[M‐ran‐TFP‐ran‐(TCS)]SSQs} having various compositions were synthesized using trifluoropropyl trimethoxysilane, methyl trimethoxysilane and 2,4,6,8‐tetramethyl‐2,4,6,8‐tetra(trimethoxysilylethyl)cyclotetrasiloxane. The chemical composition of the polymers and the content of SiOH end‐groups were controlled by adjusting the reaction conditions, and they were characterized by ¹H‐NMR. The thermally decomposable trifluoropropyl groups on the P[M‐ran‐TFP‐ran‐(TCS)]SSQ backbone and heptakis(2,3,6‐tri‐O‐methyl)‐β‐cyclodextrin (CD) were employed as pore generators. The dielectric constants of the porous CD/P[M‐ran‐TFP‐ran‐(TCS)]SSQ films were in the range 2.0–2.7 (at 100 kHz) depending on the concentration of the porogens, and showed no change over 4 days under aqueous conditions. The pore size of the films showed a bimodal distribution, with diameters of ca 0.5–1.0 nm for those originating from the trifluoropropyl groups and 1.7 nm from the CD. The elastic modulus and hardness of the 30 vol% CD‐blended film with a dielectric constant of 2.26 were 2.40 and 0.38 GPa, respectively, as determined by a nanoindenter. Copyright © 2005 Society of Chemical Industry     

High-performance error amplifier for fast transient DC-DC converters

A new error amplifier is presented for fast transient response of dc-dc converters. The amplifier has low quiescent current to achieve high power conversion efficiency, but it can supply sufficient current during large-signal operation. Two comparators detect large-signal variations, and turn on extra current supplier if necessary. The amount of extra current is well controlled, so that the system stability can be guaranteed in various operating conditions. The simulation results show that the new error amplifier achieves significant improvement in transient response than the conventional one.     

长颗粒(柱状晶)Si3N4陶瓷的研究及进展

Si3N4陶瓷材料由于具有很好的高温性能及高的力学性能，而被广泛地用于结构陶瓷，如切削刀具等。然而，因为其对缺陷很敏感，故易受灾难性的失效。人们发展了多种Si3N4增韧陶瓷，其中自增韧由于一些优异的性能越来越受到人们的重视。在此文中，着重介绍了影响Si3N4陶瓷长颗粒(柱状晶)晶粒生成的因素，并介绍了国内外对长颗粒Si3N4晶的控制研究。     

Observer-based wheelbase preview control of active vehicle suspensions

Optimal observer-based wheelbase preview regulator problem is investigated for active vehicle suspension systems. It is shown that the problem reduces to the classical linear quadratic Gaussian problem, whose solution is well defined, by augmenting dynamics of system and road inputs. The resulting optimal controller is in the form of augmented state feedback controller and this augmented state is estimated by Kalman-Bucy filter using dynamics of the augmented system. Numerical examples of a half car model are given to verify the performance improvement achievable with the proposed controller.     

大型储罐的罐壁设计

根据十万立方米浮顶油罐罐壁板应力测试的实测结果，运用应力分析程序，对罐壁板应力分布情况进行了分析和比较，通过调整罐壁板的厚度，使新设计储罐的罐壁板应力分布更加均匀、合理。     

四气门汽油机缸内气流运动LDA测量结果的小波分析方法

主要采用小波分析方法研究了四气门汽油机缸内空气运动的频率结构。在一台四气门汽油机上 ,使用激光多普勒测速仪 (L DA)在倒拖工况下测量了气缸内的滚流运动 ,使用了 MATL AB 5 .1数学工具包中的小波分析方法对试验结果进行数据处理 ,得到了时域和频域分解速度信息。从这些信息中可以清楚地看到滚流 (低频湍流 )在压缩末期破碎并形成高频湍流的现象     

α厚层测量法的定标方法探讨

本文比较了几种常用的α厚层测量法的定标方法。实验结果表明,共沉淀法是一种比较理想的定标方法,它所制得的标准样品的定标曲线线性较好,探测效率较稳定。