Electrical properties of N2O/NH3 plasma grownoxynitride on strained-Si

Growth of ultrathin (<100 Å) oxynitride on strained-Si using microwave N₂O and NH₃ plasma is reported. X-ray photoelectron spectroscopy (XPS) results indicate a nitrogen-rich layer at the strained-Si/SiO₂ interface. The electrical properties of oxynitrides have been characterized using a metal-insulator-semiconductor (MIS) structure. A moderately low value of insulator charge density (6.1×10¹⁰ cm^-2) has been obtained for NH₃ plasma treated N₂O oxide sample. Nitrided oxide shows a larger breakdown voltage and an improved charge trapping properties under Fowler-Nordheim (F-N) constant current stress     

Pad effects on material-removal rate in chemical-mechanical planarization

The role of a porous pad in controlling material-removal rate (MRR) during the chemical-mechanical planarization (CMP) process has been studied numerically. The numerical results are used to develop a phenomenological model that correlates the forces on each individual abrasive particle to the applied nominal pressure. The model provides a physical explanation for the experimentally observed domains of pressure-dependent MRR, where the pad deformation controls the load sharing between active-abrasive particles and direct pad-wafer contact. The predicted correlations between MRR and slurry characteristics, i.e., particle size and concentration, are in agreement with experimentally measured trends reported by Ouma¹ and Izumitani.²     

Photostability of polyetherurethaneureas

Polyetherurethaneureas (PEUUs) were synthesised from polyethylene-glycols (PEGs) of molecular weight 400, 600 and 1000, 4,4′-diphenylmethanediisocyanate (MDI) and aliphatic diamine chain extenders, 1,3-propanediamine (PDA) and 1,6-hexanediamine (HDA). Polymer films were irradiated with 365 nm light at 293 K and the effects of polyether soft segment length and urea hard segment on photo-oxidative stability were studied by following the variation in weight-average molecular weight (M _w), gel formation and stress-strain properties. Changes in ultraviolet and infrared spectroscopy were monitored on photo-oxidation and hydroperoxide content determined. The soft segment length was increased by increasing the molecular weight of PEG from 400 to 1000 and hard segment structure was changed by variation of diamine. It was noted that the structure of urea and polyether soft segment length plays an important role in photostability of PEUUs. PDA chain extended PEUUs were more stable than HDA chain extended PEUUs.     

Exploratory analysis of brain connectivity with ICA.

Covariance-based methods of exploration of functional connectivity of the brain from functional magnetic resonance imaging (fMRI) experiments, such as principal component analysis (PCA) and structural equation modeling (SEM), require a priori knowledge such as an anatomical model to infer functional connectivity. In this research, a hybrid method, combining independent component analysis (ICA) and SEM, which is capable of deriving functional connectivity in an exploratory manner without the need of a prior model is introduced. The spatial ICA (SICA) derives independent neural systems or sources involved in task-related brain activation, while an automated method based on the SEM finds the structure of the connectivity among the elements in independent neural systems. Unlike second-order approaches used in earlier studies, the task-related neural systems derived from the ICA provide brain connectivity in the complete statistical sense. The use and efficacy of this approach is illustrated on two fMRI datasets obtained from a visual task and a language reading task.