Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography

This paper describes the fabrication of poly(methyl methacrylate) (PMMA) microstructures with three-dimensional (3-D) sloped sidewalls using synchrotron-radiated (SR) deep X-ray lithography (DXRL). Here, the developer temperature was varied to produce variations in the inclination angle of the sloped sidewalls. We found that the PMMA sidewall inclination angle and height were controlled by the dosage, development time, and development temperature. When the development temperature was low, the inclination angle was nearly 0°, regardless of dosage amounts or exposure time. When the development temperature was high, microstructures with sloped sidewalls were fabricated; as the dosage amount and development time increased, the inclination angle increased. The ability to control the PMMA sidewall inclination angle suggests the application of this technique to microstructure fabrication technologies, such as 3-D microelectromechanical system (MEMS) device components, in which the inclination angle becomes the draft angle for moulding processes.     

A large discrepancy between CPM and ESR defect densities in light-soaked a-Si:H

A large discrepancy between defect densities evaluated by constant photocurrent method (CPM) and electron spin resonance (ESR) is investigated for hydrogenated amorphous silicon (a-Si:H) with various thicknesses in the process of light soaking (LS). It is shown by a computer simulation that the inhomogeneous defect distribution across the film thickness caused by a rather small penetration depth of the white light in the thick film is one of the possible origins of the discrepancy. But various other causes should also bring about the discrepancy, and the problem is still a puzzling one.     

Preparation of SrBi 2 Ta 2 O 9 Thin Films by Liquid-Delivery MOCVD Without Additional Solvents

SrBi 2 Ta 2 O 9 thin films were prepared by ECR plasma enhanced metalorganic chemical vapor deposition (ECR-MOCVD) with a liquid-delivery system using one cocktail source without an additional solvent. The strontium-tantalum double alkoxide, Sr{Ta[OC 2 H 4 H(CH 3 ) 2 ](OC 2 H 5 ) 5 } 2 , was dissolved in stabilized trimethyl bismuth, Bi(CH 3 ) 3 / dioxane. This source system has been used in a conventional bubbling system. Deposition rate and the composition of the films were strictly controlled by the concentration and the composition of the cocktail source. Therefore, high reproducibility was realized by using this system. The constituent phase of the stoichiometric SBT film as-deposited at 500 C on a (111)Pt/TiO 2 /SiO 2 /Si substrate was a fluorite phase and transformed to the single phase of SBT by the post annealing at 800 C. It showed almost the same ferroelectricity as the stoichiometric composition film.     

In Situ Observation of Deformation in Semi-solid Fe-C Alloys at High Shear Rate

Synchrotron X-ray radiography at 125 frames per second was used to study deformation mechanisms in semi-solid Fe-C alloys at high solid fraction and shear strain rates of 10^?1/s. An image correlation approach was also used to quantify the shear strain fields and study shear-induced dilation and the origin of shear cracking. It was shown that, at high solid fraction (90 to 93 pct solid), rearrangement including rotation and translation of solid particles became restricted and shear strain localized into narrow liquid-filled channels/fissures. Shear cracking was shown to originate from inadequate liquid flow into the expanding spaces between solid particles caused by shear-induced dilation. At lower solid fraction (~85 pct solid), solid particles rearranged with a significantly higher component of rotation leading to more shear-induced dilation and a wider shear band.     

Eye-tracking device comparisons of three methods of magnetic resonance image series displays

This study evaluated the effectiveness of three kinds of display methods for magnetic resonance (MR) image interpretation using an eye-tracking device. Seven radiologists interpreted head MR studies by using a single monitor (17-inch, 1,024 X 1,280 bit) in the 4 images/screen display format. Three paging modes were compared: (A) rapid paging only, (B) multiple image series display at the same slice position with consecutive rapid paging, and (C) simultaneous display of multiple series with each image series being browsed independently. Using an eye-mark camera, the radiologist's point of fixation and the duration of fixation were recorded during actual image interpretation. In mode A, the duration of fixation was short, and the points of fixation were distributed randomly over the visual field. In mode B, the points of fixation were clustered chiefly on a specific image series. In mode C, the points of fixation were not clustered on a specified series, but the duration of viewing the T2 series was relatively long. The total tracing area in mode B and C was smaller than that in mode A. Multiple series display, in which selected key series of slices could be viewed effectively, was found to be suitable for MR image interpretation.     

A challenge to global environmental issues by small reactor -nuclear desalination and prevention of desertification-

The water shortage in the developing countries, such as middle-east countries, is becoming very severe and the land of several million hectares around those countries is also becoming deserted.

The seawater desalination by nuclear energy is now being discussed at the IAEA, in response to the request from those countries. Recently, several small and medium reactors have been proposed by the member states of IAEA as the energy source for seawater desalination and also several related issues are being discussed. The production of potable water using small reactor (4S, Super Safe, Small and Simple-LMR), which has been proposed by CRIEPI and Toshiba, and its application for the plantation to prevent the desertification are described here. A challenge to the global environmental issues, such as prevention of desertification by the plantation and adsorption of carbon dioxide in the plantation is also described.     

A fast convergence algorithm for sparse-tap adaptive FIR filters identifying an unknown number of dispersive regions

This paper proposes a fast convergence algorithm for sparse-tap adaptive finite impulse response (FIR) filters to identify an unknown number of multiple dispersive regions. Coefficient values and tap-positions of the adaptive filter are simultaneously controlled. A constrained region for new-tap positions is selected from equisize subgroups of all possible tap-positions, and it hops from one subgroup to another to cover multiple dispersive regions. The hopping order and the stay time for each subgroup are adaptively determined based on the absolute coefficient values. Simulation results with colored signals show that the proposed algorithm saves more than 80% in the convergence time over the full-tap NLMS and 50% over the STWQ. Tracking capability of the proposed algorithm exhibits its superior characteristics. These characteristics are confirmed by hardware evaluations with a telephone network simulator.     

An extreame disposition method for low-level radioactive wastes using supercritical water (3)

Disposition of low-level radioactive wastes has been performed in supercritical water with RuO₂ as a catalyst without the addition of any oxidizing materials. These wastes arose from nuclear power plants etc., constituting of nonflammable organic materials, such as fire resistant sheeting and rubber gloves. We investigated the distribution behavior of iron and cobalt attached to nonflammable organic materials, in solid, liquid and gas phases during the decomposition of this method. The distributions of these elements under various conditions (initial amounts) were determined by using their radioisotopes as simulated low-level radioactive wastes in order to ease the detection of trace amounts of elements even in solid and gas phases. Iron and cobalt were found only in the solid phase when non-radioactive iron hydroxide was added as a precipitation reagent before the supercritical-water reaction.