Effect of wafer size on the film internal stress measurement by wafer curvature method

Wafer curvature method has been applied to determine the internal stress in the films using Stoney’s equation. During the film deposition, the wafer fixation on the sample holder will restrict the deformation of the rectangle-shaped wafer, which may result in the stress datum difference along length and width direction. In this paper, the effect of wafer size and the wafer fixation on the TiN film internal stress measured by wafer curvature method was discussed. The rectangle-shaped wafers with different length/width ratios (L/W=1:1, 2:1, 3:1 and 4:1) were fixed as a cantilever beam. After the TiN films deposition, the profiles of the film/wafer were measured using a stylus profilometer and then the internal stress was calculated using the Stoney equation in the film. The results showed that the fixed end of the wafers limited to some degree the curvature of the wafers along the width direction. For film internal stress measured by wafer curvature method, the wafer profile should be scanned along the length direction and the scan distance should be greater than or equal to half of wafer length. When the length/width ratio of the wafer reached 3:1, the wafer curvature and the calculated stress were basically the same at different positions along the length direction. For film internal stress measured by wafer curvature method, it was recommended that the length/width ratio of wafer should be considered to be greater than or equal to 3:1, and the deformed profile was scanned along the length direction.     

对水利工程项目建议书阶段设计取费问题的讨论与建议

通过相关规范、法规进行分析,对于实行立项简化程序未编制项目建议书的水利工程,项目建议书阶段的设计工作应该取费,但不宜直接套用现行设计取费标准;建议根据项目特点在计算的设计费基础上按0.5～0.8的折扣系数取费。     

聚羧酸助磨剂合成及其性能

利用水泥粉磨过程中的机械力促使水解聚马来酸酐（HPMA）与聚乙二醇单甲醚（MPEG）进行酯化反应形成聚羧酸助磨剂。试验研究了HPMA、MPEG、HPMA与MPEG的混合物、HPMA与MPEG的反应合成物对水泥助磨效果以及对砂浆性能的影响。结果表明,HPMA与MPEG都有一定的助磨性,HPMA与MPEG的混合物和反应合成物具有更佳的助磨性能,且可以改善水泥砂浆的流动性能和显著提高水泥砂浆的早期强度。激光拉曼光谱测试表明HPMA与MPEG的混合物和反应合成物与水泥共同粉磨后吸附在水泥颗粒表面,具有相似的拉曼位移图谱。     

分布式病房监测装置的设计

为了减轻医务人员的负担和保证病人的安全,设计了一种分布式病房监测装置。该装置以无线通讯技术、光线折射/散射原理为基础,实现病房输液监测的自动化和智能化。红外发射器(IR908)发射的红外线透过输液管,被红外接收器(PT908)接收,由于输液管中的药液变化会改变接收光线的强弱,引起红外接收器的电压变化,最后单片机对红外接收器的电压进行判断。实验结果表明:该装置结构简单、可靠性高、成本低廉,且能实现长时间的自动监测。     

Broadband excited Na3Tb(PO4)2:Ce3+/Eu2+ green/yellow-emitting phosphors with high color purity for LED-based application

To enhance the display quality of light-emitting diodes (LEDs), it is of great significance to exploit green/yellow-emitting phosphors with narrow emission band, high quantum yield, and excellent color purity to satisfy the application. Herein, orthophosphate-based green/yellow-emitting Na₃Tb(PO₄)₂:Ce³⁺/Eu²⁺ (NTPO:Ce³⁺/Eu²⁺) phosphors have been successfully synthesized by a facile solid-state reaction method. The absorption band of NTPO samples was extended to the near-ultraviolet region and the absorption efficiency was significantly improved owing to a highly efficient energy transfer from Ce³⁺/Eu²⁺ ion to Tb³⁺ ion in NTPO host certified by time-resolved PL spectra. Upon 300 nm excitation, the NTPO:Ce³⁺ is characterized by ultra-narrow-band green emission of Tb³⁺ with an absolute quantum yield of 94.5%. Unexpectedly, NTPO:Eu²⁺ emits bright yellow light with a color purity of 73% as a result of the blending of green light emission from Tb³⁺ and red light emission from Eu³⁺. The thermal stability has been improved by controlling the stoichiometric ratio of Na⁺. The prototype white LED used yellow-emitting NTPO:Eu²⁺ phosphor has higher color-rendering index (Ra = 83.5), lower correlated color temperature (CCT = 5206 K), and closer CIE color coordinates (0.338, 0.3187) to the standard white point at (0.333, 0.333) than that used green-emitting NTPO:Ce³⁺ phosphor, indicating the addition of the yellow light component improved the Ra of the trichromatic (RGB) materials.     

自动金刚石刀头磨弧机

针对采用激光焊接工艺的金刚石锯片上，其金刚石刀头内弧面需要磨抛的工艺要求，研发了一种自动金刚石刀头磨弧机。该设备将金刚石刀头放置在作间歇回转的工作转盘上，工作转盘由槽轮机构驱动；磨削砂轮安装在拖板系统上，拖板的间歇往复运动由一种在滑块上开有长槽的曲柄滑块机构实现，可满足工作转盘转位时，拖板停歇；工作转盘停歇时，拖板运动的工作要求。用靠模控制砂轮磨削的进给量。通过靠模的更换及设计能快速装卡的刀头夹具，可实现对不同弧度刀头的磨弧。本文介绍了该设备的结构组成、设计参数的选择及相关的设计方案，并对在滑块上开有长槽的曲柄滑块机构的设计方法进行了详细地讨论。     

基于等效电路分析的航空锂电池工作特性研究

针对航空锂电池安全保障问题,提出了一种基于等效电路模型的锂电池工作特性分析方法。该方法通过PNGV等效电路处理,实现对航空锂电池物理反应过程的电路模拟,并基于此研究了航空锂电池的工作特性。实验结果表明,该方法能够实现对航空用75 Ah锂电池等效电路的有效模拟,等效模型能够有效分析不同条件下的电池工作状态,获得锂电池工作特性规律,为锂电池的安全航空应用提供保障。     

基于空心微针阵列的连续监测葡萄糖传感器

研制了一种基于空心微针阵列并可微痛刺入皮下实时连续监测人体血糖浓度的葡萄糖传感器.微针阵列由等间距的三根微针组成,分别作为工作电极、辅助电极和参比电极,其中工作电极与辅助电极采用表面溅射了Ti/Pt的空心不锈钢微针来制作,采用戊二醛-牛血清白蛋白交联法将葡萄糖氧化酶固定并仅置于作为工作电极的针尖通孔处;参比电极采用Ag/AgCl实心微针制作.测试结果表明:葡萄糖浓度在0～21 mmol·L-1范围内传感器输出电流为线性,灵敏度为0.575 μA/(mmol·L-1),响应时间为16s,且具有很好的抗干扰性.     

基于多端元混合光谱模型与Landsat影像的北京不透水层动态研究

中国正在经历快速地城市化过程,及时又准确地掌握城市化过程对我国社会经济发展具有重要的实际意义。以Landsat-TM和ETM+为主要数据源,通过多端元光谱混合分析法(MESMA)提取北京建成区不透水层的时空演变信息。在Ridd的V-I-S(植被—不透水层—土壤)概念模型框架下,基于最小噪音变换(MNF)将TM或ETM+的6个光谱波段转换成MNF空间,并定义4种端元光谱分别代表植被、高反射率地表、低反射率地表和土壤,同时构建北京建成区端元光谱数据库。然后在MATLAB软件包中实现MESMA模型程序,依次提取北京市6个时段的不透水层信息。研究结果表明:MESMA方法能够提高植被、土壤和不透水层提取精度,相对误差分别为14.6%、17.3%和11.9%。研究结论充分说明MESMA方法应用到一个时间序列的中分辨率多光谱遥感影像是非常有效的。MESMA光谱分解方法能高效实现北京城市动态变化和城市扩张的监测。