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We have studied lamp configuration design for rapid thermal processing (RTP) systems. We considered a configuration consisting of four concentric circular lamp zones, three of them above the wafer and one circumventing the wafer. We propose a method to determine the geometric parameters, the width, height and radius, of the lamp zones so that the configuration designed has the capacity to achieve a uniform temperature on the wafer. The method is based on a necessary and sufficient condition for uniform temperature tracking and analytic expressions of the view factors. A design example is given in which a least square open-loop control law yields good temperature uniformity 相似文献
4.
Jan Buijs 《Creativity & Innovation Management》2007,16(2):203-210
Innovating is a multi‐faceted process. In this paper, four different, yet intertwined aspects of this process are distinguished. The first aspect concerns the content of the innovation; a new product, a new technology or a new market. The second aspect concerns the group dynamics of the innovation team. The third aspect concerns seeing the innovation process as a creative process. And the fourth aspect has to do with leadership. Since these four aspects are simultaneously working together during the innovation process, the leaders of this process are working in a very difficult situation, as all four aspects need to be dealt with in different ways. Nearly all of them are, in one way or another, in conflict with one another. They may conflict in real actions, in time horizons (past, present or future) or in effect (positive reactions during market introduction do not garantee ultimate market success). This means that innovation leaders need to show a special kind of leadership. This leadership must be balanced, people‐focused and must include a high tolerance for ambiguity and paradoxes. They have to be nice and nasty at the same time. In short: innovation leaders should be some kind of controlled schizophrenics. 相似文献
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Jan A. Derecki 《Journal of Great Lakes research》1985,11(3):201-207
Periodic man-made changes in the outlet of Lake Huron through the St. Clair River date back to the middle of the last century. These artificial channel changes have been well documented during the present century. They consist of dredging for commercial gravel removal in the upper river during 1908–25 and uncompensated navigation improvements for the 7.6-m (25-ft) and 8.2-m (27-ft) projects completed in 1933 and 1962, respectively. The total effect of these changes on the levels of Lakes Michigan and Huron (hydraulically one lake) and on the upper St. Clair River profile was determined with dynamic flow models. The ultimate effect of the above dredging was a permanent lowering of the Lake Michigan-Huron levels 0.27 m (0.89 ft), which represents a tremendous loss of freshwater resource [32 km3 (7.7 mi3)]. 相似文献
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The Steady radial distribution of chemical species in a wire‐to‐cylinder ozone generator filled with pure oxygen has been computed by applying four different plasma chemistry models of increasing complexity. The most complete model considers ten species (e, O2 +, O2 ?, O3 ?, O?, O2, O2(1Δg), O2(1∑g +), O and O3) and 79 reactions, including ionization by electron impact, electron attachment and detachment, electron-ion recombination, charge transfer, etc. The chemical model is coupled with the electrical model through Poisson's equation. The spatially averaged ozone density has been computed as a function of the current intensity and compared with the experimental values obtained by UV spectroscopy. 相似文献
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In most industrialized countries, the end of the Cold War marked a change in focus from preparedness for war to an increasing focus on civil society's own vulnerability and safety. To meet new threats and changing risks, there is also a need for new analytical concepts. Societal safety is a concept developed in Norway during the last decade. It could be defined as: ‘The society's ability to maintain critical social functions, to protect the life and health of the citizens and to meet the citizens' basic requirements in a variety of stress situations’. It aims to be a systematic approach for understanding, mitigating and responding to social problems such as extraordinary stresses and losses, interferences in complex and mutual dependent systems, or lack of trust in vital social institutions. Future threats to society are not limited to specific sectors or areas, but stem from complex interactions amongst economic, technological, social and cultural factors. Thus, the main challenges to improve societal safety will be the ability to coordinate, organize and assign clear roles to different actors at the international, national and local levels. Societal safety has interfaces with other safety‐related areas such as national security, sustainable development, human security and incident management (handling of isolated accidents, common illness and ordinary criminal acts). Societal safety is, however, a sensitive political issue containing dilemmas and value choices that are hardly possible to perceive or solve as pure scientific problems. 相似文献
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Fabrice Martin Marc-Etienne Jan Samuel Rey-Mermet Brahim Belgacem Dong Su Marco Cantoni Paul Muralt 《IEEE transactions on ultrasonics, ferroelectrics, and frequency control》2006,53(7):1339-1343
Polycrystalline A1N thin films were deposited by RF reactive magnetron sputtering on Pt(111)/Ti electrode films. The substrates were tilted by an angle ranging from 40 degrees to 70 degrees with respect to the target normal. A low deposition temperature and a high sputter gas pressure were found ideal for tilted growth. The resulting grain tilt angle amounts to about half the substrate tilt angle. For coupling evaluation, 5 GHz solidly mounted resonator structures have been realized. The tilted grain A1N films exhibited a permittivity in the 9.5-10.5 range and loss tangent of 0.3%. Two shear modes as well as the longitudinal mode could be clearly identified. The coupling coefficient k2(eff) of the fundamental thickness shear mode (TS0) was found to be about 0.5%, which is compatible with a c-axis tilt of about 6 degrees. 相似文献
10.
Maciej Winiewski Artur Jakubiak Jan Szymanowski 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》1995,63(3):209-214
Decyl isonicotiniate and decyl nicotiniate permit a rapid extraction of palladium(II) from its hydrochloride solutions. Decyl picoliniate is not a suitable extractant. 4-Octylphenylamine can act as a phase transfer catalyst when its concentration in the organic phase is at least 2·5 × 10?4 M . It seems that the interfacial adsorption of pyridine carboxylates and of 4-octylphenylamine is not the decisive phenomenon in palladium(II) extraction. The negligible protonation of the pyridine-type extractants and the phase transfer catalysis explains well the quick extraction of palladium(II) with the commercial and highly hydrophobic extractant ACORGA CLX-50. 相似文献