Investigation of RF sputtered PSG films for MEMS and semiconductor devices

In this work, we report the preparation of phospho-silicate-glass (PSG) films using RF magnetron sputtering process and its application as a sacrificial layer in surface micromachining technology. For this purpose, a 76 mm diameter target of phosphorus-doped silicon dioxide was prepared by conventional solid-state reaction route using P₂O₅ and SiO₂ powders. The PSG films were deposited in a RF (13.56 MHz) magnetron sputtering system at 200-300 W RF power, 10-20 mTorr pressure and 45 mm target-to-substrate spacing without external substrate heating. To confirm the presence of phosphorus in the deposited films, hot-probe test and sheet resistance measurements were performed on silicon wafers following deposition of PSG film and a drive-in step. As a final confirmatory test, a p-n diode was fabricated in a p-type Si wafer using the deposited film as a source of phosphorus diffusion. The phosphorus concentration in the target and the deposited film were analyzed using energy dispersive X-rays (EDAX) tool. The etch rate of the PSG film in buffered HF was measured to be about 30 times higher as compared to that of thermally grown SiO₂ films. The application of RF sputtered PSG film as sacrificial layer in surface micromachining technology has been explored. To demonstrate the compatibility with MEMS process, micro-cantilevers and micro-bridges of silicon nitride were fabricated using RF sputtered PSG as a sacrificial layer in surface micromachining. It is envisaged that the lower deposition temperature in RF sputtering (<150 °C) compared to CVD process for PSG film preparation is advantageous, particularly for making MEMS on temperature sensitive substrates.     

Formulae for determining heterodyne system spurious frequencies that coincide with desired output frequency

In this paper, formulae to determine the lowest order and other higher order spurious frequencies that coincide with desired output signal frequencies of mixers have been derived. The proposed formulae give general expressions that are suitable for any order of heterodyne mixing. The formulae have been verified using a suitable example and compared with the simulation results obtained through the radio frequency simulation software of Advanced Design System. The formulae directly reveal the order of the troublesome spurious frequencies that the designers would encounter in heterodyne systems. In comparison with these direct formulae, the results of existing spurious analysis software are based on the maximum order of simulation carried out. Based on these simulations, the coinciding spurious components have to be manually sorted out. Proposed formulae are quick tools used by the microwave system and circuit designers for choosing and finalizing heterodyne frequencies in their designs without the need for any simulations.     

Supersonic Nozzle Flow Simulations for Particle Coating Applications: Effects of Shockwaves,Nozzle Geometry,Ambient Pressure,and Substrate Location upon Flow Characteristics

Characteristics of supersonic flow are examined with specific regard to nano-particle thin-film coating. Effects of shockwaves, nozzle geometry, chamber pressure, and substrate location were studied computationally. Shockwaves are minimized to reduce fluctuations in flow properties at the discontinuities across diamond shock structures. Nozzle geometry was adjusted to ensure optimal expansion (i.e., P _exit = P _ambient), where shock formation was significantly reduced and flow kinetic energy maximized. When the ambient pressure was reduced from 1 to 0.01316 bar, the nozzle’s diverging angle must be increased to yield the optimum condition of minimized adversed effects. Beyond some critical distance, substrate location did not seem to be a sensitive parameter on flow characteristics when P _amb = 0.01316 bar; however, overly close proximity to the nozzle exit caused flow disturbances inside the nozzle, thereby adversely affecting coating gas flow.     

Estimating correlations between rheological and engineering properties of rubberized asphalt concrete mixtures containing warm mix asphalt additive

In recent years, warm mix asphalt (WMA) is widely used for reducing energy requirements and emissions in hot mix asphalt (HMA) industry. In addition, the use of rubberized asphalt in the past has proven to be economical, environmentally sound and effective in improving the performance of pavements across the US and the world. The objective of this research was to investigate the mixture performance characteristics of rubberized warm asphalt mixtures, and their correlation with binder properties, through a series of laboratory tests (e.g., viscosity, dynamic shear rheometer (DSR), and bending beam rheometer (BBR)) conducted on the binders, and obtaining the indirect tensile strength, rutting resistance, and resilient modulus of various mixtures. The results of the experiments indicated that the use of crumb rubber and WMA additive in HMA can effectively improve the engineering properties of these mixes at lower mixing and compacting temperatures and some statistical correlations between rheological and/or engineering properties were developed successfully.     

Effect of Zr on dielectric, ferroelectric and impedance properties of BaTiO3 ceramic

A polycrystalline sample of Zr-doped barium titanate (BaTiO₃) was prepared by conventional solid state reaction method. The effect of Zr (0·15) on the structural and microstructural properties of BaTiO₃ was investigated by XRD and SEM. The electrical properties (dielectric, ferroelectric and impedance spectroscopy) were measured in wide range of frequency and temperature. With substitutions of Zr, the structure of BaTiO₃ changes from tetragonal to rhombohedral. Lattice parameters were found to increase with substitution. The room temperature dielectric constant increases from ～ 1675 to ～ 10586 and peak dielectric constant value increases from ～ 13626 to ～ 21023 with diffuse phase transition. Impedance spectroscopy reveals the formation of grain and grain boundary in the material and found to decrease with increase in temperature.     

Structural and ferroelectric properties of lanthanum modified BPZT ceramics

Lanthanum modified Ba_0.80Pb_0.20Ti_0.90Zr_0.10O₃ (BPZT) ceramics with composition Ba_0.80−xLa_x Pb_0.20Ti_0.90Zr_0.10O₃; x = 0–0.01 in steps of 0.0025 were prepared by conventional solid state method. All the samples were sintered at 1325 °C after compacting in circular discs. Detailed structural and ferroelectric properties were carried out for sintered specimens. X-ray diffraction analysis for all the sintered specimens shows tetragonal structure with perovskite. Coercive field (E_c) and remanent polarization (P_r) to spontaneous polarization (P_s) ratio (P_r/P_s) was found to decrease with increase in temperature. P_r/P_s ratio was found to decrease with increase in x, except x = 0.0025.     

Long‐Range Nanoparticle Surface‐Energy‐Transfer Ruler for Monitoring Photothermal Therapy Response

A recent gold nanotechnology‐driven approach opens up a new possibility for the destruction of cancer cells through photothermal therapy. Ultimately, photothermal therapy may enter into clinical therapy and, as a result, there is an urgent need for techniques to monitor the tumor response to therapy. Driven by this need, a nanoparticle surface‐energy‐transfer (NSET) approach to monitor the photothermal therapy process by measuring a simple fluorescence intensity change is reported. The fluorescence intensity change is due to the light‐controlled photothermal release of single‐stranded DNA/RNA via dehybridization during the therapy process. Time‐dependent results show that just by measuring the fluorescence intensity change, the photothermal therapy response during the therapy process can be monitored. The possible mechanism and operating principle of the NSET assay are discussed. Ultimately, this NSET assay could have enormous potential applications in rapid, on‐site monitoring of the photothermal therapy process, which is critical to providing effective treatment of cancer and multidrug‐resistant bacterial infections.     

In vitro study of lipid peroxidation and free radical scavenging activity of cow urine

This study represents a comprehensive analysis and scientific validation of our ancient knowledge about the ethnopharmacological aspects of cow urine by measuring the lipid peroxidation, radical scavenging, and level of reduced glutathione and catalase activity. Graded doses of cow urine were administered orally to experimentally treated rats. Results of liver and plasma from experimentally treated rats indicated that cow urine reduced the levels of thiobarbituric acid reactive substance significantly in all the treatments (P < 0.01). In vitro experiments with the liver of control and experimentally treated rats were also carried out against cumene hydroperoxide-induced lipid peroxidation. On LCMS analysis, the antioxidant component of cow urine was identified as uric acid (m/z 169.07). The results demonstrate that the cow urine-mediated induction of antioxidant level controls oxidative damage, even after minimal processing, and thus is indicative of its potential as a viable substitute of synthetic antioxidants.