Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS

This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC₂H₅)₄ (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO₂-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm² at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV.     

A complete strategy for efficient and accurate multibody dynamics of flexible structures with large lap joints considering contact and friction

This paper deals with the dynamics of jointed flexible structures in multibody simulations. Joints are areas where the surfaces of substructures come into contact, for example, screwed or bolted joints. Depending on the spatial distribution of the joint, the overall dynamic behavior can be influenced significantly. Therefore, it is essential to consider the nonlinear contact and friction phenomena over the entire joint. In multibody dynamics, flexible bodies are often treated by the use of reduction methods, such as component mode synthesis (CMS). For jointed flexible structures, it is important to accurately compute the local deformations inside the joint in order to get a realistic representation of the nonlinear contact and friction forces. CMS alone is not suitable for the capture of these local nonlinearities and therefore is extended in this paper with problem-oriented trial vectors. The computation of these trial vectors is based on trial vector derivatives of the CMS reduction base. This paper describes the application of this extended reduction method to general multibody systems, under consideration of the contact and friction forces in the vector of generalized forces and the Jacobian. To ensure accuracy and numerical efficiency, different contact and friction models are investigated and evaluated. The complete strategy is applied to a multibody system containing a multilayered flexible structure. The numerical results confirm that the method leads to accurate results with low computational effort.     

Parameterization and reconstruction from 3D scattered points basedon neural network and PDE techniques

Reverse engineering ordinarily uses laser scanners since they can sample 3D data quickly and accurately relative to other systems. These laser scanner systems, however, yield an enormous amount of irregular and scattered digitized point data that requires intensive reconstruction processing. Reconstruction of freeform objects consists of two main stages: parameterization and surface fitting. Selection of an appropriate parameterization is essential for topology reconstruction as well as surface fitness. Current parameterization methods have topological problems that lead to undesired surface fitting results, such as noisy self-intersecting surfaces. Such problems are particularly common with concave shapes whose parametric grid is self-intersecting, resulting in a fitted surface that considerably twists and changes its original shape. In such cases, other parameterization approaches should be used in order to guarantee non-self-intersecting behavior. The parameterization method described in this paper is based on two stages: 2D initial parameterization; and 3D adaptive parameterization. Two methods were developed for the first stage: partial differential equation (PDE) parameterization and neural network self organizing maps (SOM) parameterization. The Gradient Descent Algorithm (GDA) and Random Surface Error Correction (RSEC), both of which are iterative surface fitting methods, were developed and implemented     

Parameterization for reconstruction of 3D freeform objects from laser-scanned data based on a PDE method

Published online: 19 July 2001     

Comparative study of the pharmacokinetics of amitriptyline oxide and trimipramine after single administration in healthy male probands and patients with renal failure

The pharmacokinetics of the antidepressants amitriptyline oxide and trimipramine and their major metabolites amitriptyline, nor-triptyline and desmethyltrimipramine, were studied in twelve healthy male subjects (aged from 22 to 62 years) and twelve patients (aged from 25 to 73 years) with severe renal impairment (glomerular filtration rate < 10 ml/min). Oral single doses of 60 mg amitriptyline oxide and 50 mg trimipramine, separated by a washout period, were administered to all study participants. Blood and urine samples were collected up to 120 hours after administration. For trimipramine and desmethyltrimipramine, a new HPLC method was developed. The "Fischer Somatic and Undesired Effects Check List" was used for the assessment of adverse events. The mean plasma half-life and AUC of amitriptyline oxide and its metabolites were significantly higher in patients than in healthy adults. For trimipramine the AUC was significantly higher in patients. The plasma half-life of trimipramine was longer in patients, but statistically not significant. The maximum plasma concentrations for both drugs and metabolites were at an average distinctly higher in patients. Clearance rate of amitroptylinoxide and trimipramine also differed between the two groups. Correlating with these results a high incidence and a longer persistence (in most cases > 12 hours) and more pronounced adverse effects were noted in the patient group, whereas in volunteers adverse events were only observed up to approximately eight hours.     

Energy sensitive detection of heavy ions with transition edge calorimeters

Status and results of a research project are reported, which aims at developing calorimetric low temperature detectors for heavy ions. The special conditions for the detection of energetic heavy ions are discussed. The response of an aluminium transition edge calorimeter, operated at about1.5K, to the impact of heavy ions was investigated. The observed energy resolutions E/E=3.9×10^–3for5.9MeV/u ²⁰⁸ Pb-ions, E/E=1.6×10^–3for4.8MeV/u ⁵⁸ Ni-ions and E/E=4.3×10^–3for100MeV/u ²⁰ Ne-ions are most probably not yet limited by the intrinsic detector resolution. The present results already represent an improvement over conventional solid state detectors and ionization chambers.     

Just how insoluble are monoterpenes?

Prior generalizations about the ecological roles of monoterpenes may be misleading if based on the presumed insolubility of monoterpenes in water. We determined the aqueous solubility of 31 biologically active monoterpenes by gas chromatography. While hydrocarbons were of low solubility (< 35 ppm), oxygenated monoterpenes exhibited solubilities one or two orders of magnitude higher, with ranges of 155–6990 ppm for ketones and of 183–1360 ppm for alcohols. Many monoterpenes are phytotoxic in concentrations under 100 ppm, well below the saturated aqueous concentrations of oxygenated monoterpenes. Therefore, even dilute, unsaturated solutions of monoterpenes, occurring naturally in plant tissues and soil solutions, may act as potent biological inhibitors.     

Thermochemische Kennwerte für die Reaktion,Mo + O2 ⇌ MoO2 sowie in Eisenschmelzen

Zusammenstellung von Schrifttumsangaben für die Änderung der freien Standardenthalpien der Reaktionen , Mo + O₂ ? MoO₂ und in Eisenschmelzen. Neubestimmung der Temperaturabhängigkeiten der Größen ΔG^oCr₂O₃, ΔG^oMoO₂ und ΔG^o_O im Eisen bei Temperaturen zwischen 1460 bzw. 1530 und 1725 °C. Nachweis der Anwendbarkeit der neu ermittelten thermodynamischen Funktionen durch EMK-Parallelmessungen an ThO₂ (Y₂O₃)- und ZrO₂ (MgO)-Festelektrolytzellen mit Cr-Cr₂O₃- und Mo-MoO₂-Referenzelektroden in Reineisenschmelzen bei 1600 °C. Ermittlung des Parameters p_e′ der Elektronenteilleitfähigkeit für einen teilstabilisierten ZrO₂-Festelektrolyten mit einem Stoffmengengehalt von 5% MgO.     

Temperature stability of thin anodic oxide films in metal/insulator/metal structures: A comparison between tantalum and aluminium oxide

The dielectric breakdown of thin (d = 3–4 nm) aluminium and tantalum oxide films was investigated by means of current voltage plots in metal/insulator/metal systems. Dielectric breakdown field strengths, E_DB, of 0.6 GV m^− 1 were found for both oxide types at room temperature. Differences appear in the temperature dependence of E_DB. Tantalum oxide films show an unchanged breakdown behaviour for temperatures up to 420 K while aluminium oxide films lose already 80% of their E_DB value in the same temperature range. Time-resolved investigations of the electric breakdown revealed intermediate states of both oxide types which were stable for several ms being characterized by an enhanced tunnel current. The breakdown voltage clearly scales with the oxide thickness for both oxide types.     

Pulsed laser deposition of La0.67Ca0.33MnO3 thin films on LiNbO3 and surface acoustic wave studies

Surface Acoustic Waves on piezoelectric substrates can be used to investigate the dynamic conductivity of thin films in a non-contact and very sensitive way, especially at low conductivities. Here, we report on such surface acoustic wave studies to characterize thin manganite film like La_0.67Ca_0.33MnO₃, exhibiting a Jan Teller effect with a strong electron phonon interaction and a metal insulator transition at high temperatures.

We report on the deposition of La_0.67Ca_0.33MnO₃ on piezoelectric substrates (LiNbO₃ in different crystal cuts, employing a pulsed laser deposition technique. The structural quality of the thin films are examined by X-Ray Diffraction, Scanning Electron Microscope and Energy Dispersive X-ray spectroscopy. For the electrical characterization, we employ the surface acoustic wave technique, accompanied by conventional direct current resistance measurements for comparison.